Device and method for removing liquid from a surface of a disc-like article

Abstract

A method for removing liquid from a surface of a disc includes, rotating the disc article about an axis perpendicular to the disc's main surface, supplying liquid from a supply port, moved across the substrate towards the edge of the disc, onto the rotated disc, supplying a first gas flow through a first gas supply port onto the disc article to an area whose centre has a distance to the centre of rotational movement of not more than 20 mm, the area being covered with a liquid layer thereby opening the liquid layer at a discrete area, and supplying a second gas flow through a second gas supply port moved across the substrate towards the edge of the substrate onto the rotated disc wherein the distance of the second gas supply port to the centre is lower than the distance of the liquid supply port to the centre.

1 . Device for removing liquid from a surface of a disc-like article comprising
 1.1 a spin chuck for holding and rotating one single disc-like article,   1.2 liquid dispensing means for dispensing liquid onto the disc-like article,   1.3 a first gas dispensing means comprising at least one nozzle with orifice(s) for blowing gas onto the disc-like article,   1.4 a second gas dispensing means comprising at least one nozzle with orifice(s) for blowing gas onto the disc-like article,   1.5 moving means for moving the liquid dispensing means and the second gas dispensing means across the disc-like article so that the second gas dispensing and the liquid dispensing means move towards an edge region, and   1.6 means for controlling the gas flows dispensed through the first gas dispensing means separate from the second gas dispensing means,   wherein the sum of cross-sectional areas of the orifice(s) of the first gas dispensing means is smaller than the sum of cross-sectional areas of the orifice(s) of the second gas dispensing means.   
     
     
         2 . Device according to  claim 1  wherein the moving means for moving the liquid dispensing means and the second gas dispensing means across the disc-like article are configured so that the second gas dispensing means follows the liquid dispensing means. 
     
     
         3 . Device according to  claim 1  wherein the moving means further comprise means for moving the first dispensing means across the disc-like article so that the first gas dispensing means follows the liquid dispensing means. 
     
     
         4 . Device according to  claim 1  wherein the sum of cross-sectional areas of the orifice(s) of the first and second gas dispensing means have a ratio 1:1.1 to 1:20. 
     
     
         5 . Device according to  claim 1  wherein the first gas dispensing means has a sum of cross-sectional areas of less than 20 mm 2 . 
     
     
         6 . Device according to  claim 1  wherein the second gas dispensing means has a sum of cross-sectional areas of more than 5 mm 2 . 
     
     
         7 . Device according to  claim 1  wherein the second gas dispensing means comprises a slit-shaped nozzle, the slit being substantially perpendicularly arranged to the radius of the rotational movement, whereby the second gas dispensing means dispense a gas curtain. 
     
     
         8 . Device according to  claim 1  wherein the second gas dispensing means comprises an array of nozzles arranged on a substantially straight line, the line being substantially perpendicular to the moving direction of the second gas dispensing means, whereby the nozzles dispense a gas curtain. 
     
     
         9 . Device according to  claim 1  wherein the second gas dispensing means and the liquid dispensing means are fixed to each other with a distance d 2  between the second gas dispensing means and the liquid dispensing means. 
     
     
         10 . Device according to  claim 9  wherein the first gas dispensing means, the second gas dispensing means and the liquid dispensing means are fixed to each other with a distance d 1  between the first gas dispensing means and the liquid dispensing means. 
     
     
         11 . Device according to  claim 9  wherein difference of distance d 2  and distance d 1  (d 2 −d 1 ) is between −1 cm and +1 cm. 
     
     
         12 . Method for removing liquid from a surface of a disc-like article comprising
 12.1 rotating the disc-like article about an axis perpendicular to the disc-like article's main surface,   12.2 supplying liquid onto the disc-like article when rotated, wherein the liquid is supplied from a supply port, which is moved across the substrate towards the edge of the disc-like article,   12.3 supplying a first gas flow through a first gas supply port onto the disc-like article to an area, wherein the area's centre has a distance to the centre of the rotational movement of not more than 20 mm, wherein the area, to which the first gas is supplied, is covered with a liquid layer when the first gas is supplied, and thereby opening the liquid layer at a discrete area, and   12.4 supplying a second gas flow through a second gas supply port onto the disc-like article when rotated, wherein the second gas flow is supplied from a second gas supply port, which is moved across the substrate towards the edge of the substrate, wherein the distance of the second gas supply port to the centre is lower than the distance of the liquid supply port to the centre while the second gas flow and the liquid are supplied.   
     
     
         13 . Method according to  claim 12  wherein the supplying the second gas flow starts after the first gas flow has started. 
     
     
         14 . Method according to  claim 12  wherein the second gas flow is started when the outer edge of the second gas supply port is at a distance to the centre of the rotational movement of at least 20 mm. 
     
     
         15 . Method according to  claim 12  wherein the gas velocity of the first gas flow is at least double of the gas velocity of the second gas flow. 
     
     
         16 . Method according to  claim 12  wherein the gas volume flow of the first gas flow is not more than half of the gas volume flow of the second gas flow. 
     
     
         17 . Method according to  claim 12  wherein the gas velocity v 1  of the first gas flow is minimum 3 m/s. 
     
     
         18 . Method according to  claim 12  wherein the gas velocity v 2  of the second gas flow is maximum 5 m/s. 
     
     
         19 . Method according to  claim 12  wherein the rotation speed decreases when the liquid dispensing means moves towards the edge. 
     
     
         20 . Method according to  claim 12  wherein the moving speed at which the liquid dispensing means moves towards the edge decreases when the liquid dispensing means moves towards the edge. 
     
     
         21 . Method according to  claim 12  wherein a substance decreasing the surface tension of a removing liquid is applied either through the removing liquid or through at least the second gas flow or through both the removing liquid and at least the second gas flow.