Inkjet head and method for manufacturing the same

Abstract

A method for manufacturing an inkjet head includes providing a piezoelectric substrate having a porous structure, a diaphragm on the porous structure, and a piezoelectric substance layer on the diaphragm, and forming a cavity by etching out the porous structure from the piezoelectric substrate.

1 .- 7 . (canceled) 
   
   
       8 . An inkjet head comprising:
 a piezoelectric substance layer;   a diaphragm provided with the piezoelectric substance layer; and   a cavity,   wherein the diaphragm is made of silicon containing 5×10 17 /cm 3  or less of oxygen.   
   
   
       9 . The inkjet head according to  claim 8 , wherein a sidewall of the cavity is made of silicon containing 5×10 17 /cm 3  or more of oxygen. 
   
   
       10 . The inkjet head according to  claim 8 , wherein the cavity is connected to a nozzle plate having a nozzle.