Thin-film actuator, liquid ejection head, ink cartridge, and image forming apparatus

Abstract

A thin-film actuator that deforms a diaphragm to generate force includes a lower electrode disposed on the diaphragm, a first piezoelectric layer disposed on the lower electrode, an intermediate electrode disposed on the first piezoelectric layer, a second piezoelectric layer disposed on the intermediate electrode, and an upper electrode disposed on the second piezoelectric layer.

1 . A thin-film actuator that deforms a diaphragm to generate force, the actuator comprising:
 a lower electrode disposed on the diaphragm;   a first piezoelectric layer disposed on the lower electrode;   an intermediate electrode disposed on the first piezoelectric layer;   a second piezoelectric layer disposed on the intermediate electrode; and   an upper electrode disposed on the second piezoelectric layer.   
     
     
         2 . The thin-film actuator according to  claim 1 , wherein peripheral edges of the intermediate electrode are closer to the center of the actuator than peripheral edges of the first piezoelectric layer and peripheral edges of the upper electrode are closer to the center of the actuator than peripheral edges of the second piezoelectric layer. 
     
     
         3 . The thin-film actuator according to  claim 1 , wherein the lower electrode is covered by the first piezoelectric layer and the intermediate electrode is covered by the second piezoelectric layer. 
     
     
         4 . The thin-film actuator according to  claim 1 , further comprising a protective coating that covers end faces of the lower electrode, the first piezoelectric layer, the intermediate electrode, the second piezoelectric layer, and the upper electrode. 
     
     
         5 . The thin-film actuator according to  claim 1 , wherein Lm>Lp 1 >Lp 2 ,
 where Lm represents a width of the diaphragm,   Lp 1  represents a width of a first deformation layer including the lower electrode and the first piezoelectric layer, and   Lp 2  represents a width of a second deformation layer including the intermediate electrode and the second piezoelectric layer.   
     
     
         6 . The thin-film actuator according to  claim 1 , wherein the upper electrode is electrically connected to the lower electrode and the intermediate electrode is used as a common electrode while the lower electrode and the upper electrode are used as signal electrodes. 
     
     
         7 . The thin-film actuator according to  claim 1 , wherein the upper electrode is electrically connected to the lower electrode and the intermediate electrode is used as a signal electrode while the lower electrode and the upper electrode are used as common electrodes. 
     
     
         8 . A liquid-droplet ejection head, comprising:
 a nozzle orifice through which a liquid droplet is ejected;   a pressure chamber connected to the nozzle orifice;   a diaphragm that forms a wall of the pressure chamber; and   a thin-film actuator that deforms the diaphragm to eject the liquid droplet from the nozzle orifice,   the thin-film actuator comprising:
 a lower electrode disposed on the diaphragm; 
 a first piezoelectric layer disposed on the lower electrode; 
 an intermediate electrode disposed on the first piezoelectric layer; 
 a second piezoelectric layer disposed on the intermediate electrode; and 
 an upper electrode disposed on the second piezoelectric layer. 
   
     
     
         9 . An ink cartridge, comprising:
 the liquid-droplet ejection head according to  claim 8 ; and   an ink container integrated with the liquid-droplet ejection head, the ink container storing ink to be supplied to the liquid-droplet ejection head.   
     
     
         10 . An image forming apparatus comprising an ink cartridge, the ink cartridge comprising:
 an ink container that stores ink; and   a liquid-droplet ejection head integrated with the ink container,   the liquid-droplet ejection head comprising:
 a nozzle orifice through which a liquid droplet is ejected; 
 a pressure chamber connected to the nozzle orifice; 
 a diaphragm that forms a wall of the pressure chamber; and 
 a thin-film actuator that deforms the diaphragm to eject the liquid droplet from the nozzle orifice, 
 the thin-film actuator comprising:
 a lower electrode disposed on the diaphragm; 
 a first piezoelectric layer disposed on the lower electrode; 
 an intermediate electrode disposed on the first piezoelectric layer; 
 a second piezoelectric layer disposed on the intermediate electrode; and 
 an upper electrode disposed on the second piezoelectric layer.