Methods and apparatus for ink delivery to nanolithographic probe systems

Abstract

Inkwells adapted for use in direct-write nanolithography and other applications including use of wells, channels, and posts. The wells can possess a geometry which matches the geometry of tips which are dipped into the inkwells. The channels can be open or closed. Hydrophilicity and hydrophobicity can be used to control ink flow. SEM can be used to characterize the inkwells. Ink flow can be monitored with video. Hydrophobic material layers can be used to prevent cross contamination. Microsyringes can be used to fill reservoirs. Satellite reservoirs can be used to prevent bubble formation.

1 - 30 . (canceled) 
     
     
         31 . A method of creating an array of inked probes for performing direct-write nanolithographic printing, the method comprising the steps of:
 (a) providing an array of wells, channels, or posts, wherein at least some of the wells, channels, or posts have an ink therein;   (b) providing an array of tips, wherein the tips are adapted to be associated and aligned with said wells, channels, or posts;   (c) transferring ink in at least some of the wells, channels, or posts having ink therein onto the tips or probes associated therewith by:
 (c1) immersing the tips or probes in the wells or channels associated therewith; or 
 (c2) contacting the tips or probes with the posts associated therewith. 
   
     
     
         32 . The method according to  claim 31 , wherein the number of tips and the number of wells, channels, or posts is the same. 
     
     
         33 . The method according to  claim 31 , wherein the number of tips is less than the number of wells, channels, or posts. 
     
     
         34 . The method according to  claim 31 , further comprising the step of:
 controlling the surface chemistry of each of the wells, channels, or posts, and/or controlling the surface chemistry of surrounding areas which surround the wells, channels, or posts.   
     
     
         35 . The method according to  claim 34 , wherein the step of controlling the surface chemistry of each of the wells, channels, or posts comprises:
 controlling the hydrophilicity or hydrophobicity of the wells channels, or posts; and/or controlling the hydrophilicity or hydrophobicity of the surrounding areas.   
     
     
         36 . The method according to  claim 34 , wherein the step of controlling the surface chemistry of each of the wells, channels, or posts is selected from the following group:
 (a) coating the wells, channels, posts or the surrounding areas with a thin film,   (b) coating the wells, channels, posts or the surrounding areas with a self-assembled monolayer,   (c) coating the wells, channels, posts or the surrounding areas with a fluorinated polymer material,   (d) coating the wells, channels, posts or the surrounding areas with polyimide, wherein the polyimide is spinned-on and patterned by: (1) depositing a thick photoresist or metal film, (2) creating a window in the photoresist or metal film; and (3) treating with oxygen plasma,   (e) coating the wells, channels, posts or the surrounding areas with a thermal, plasma-enhanced or low temperature deposited oxide,   (f) coating the wells, channels, posts or the surrounding areas with silicon nitride, a metal or metal oxide, and   (g) plasma treating the wells, channels, posts or the surrounding areas through a patterned resist.   
     
     
         37 . The method according to  claim 34 , wherein the step of controlling the surface chemistry of each of the wells, channels, or posts is by chemical treatment with oxidizer. 
     
     
         38 . The method according to  claim 31 , wherein the ink provided in at least some wells, channels, or posts is provided by an external device. 
     
     
         39 . The method according to  claim 38 , wherein the external device is selected from the group consisting of an inkjet print head, a pipette, pin-and-ring or microcapillary micro spotter system. 
     
     
         40 . The method according to  claim 38 , wherein the external device is a syringe. 
     
     
         41 . The method according to  claim 38 , wherein the external device is a microsyringe on an x-y-z stage. 
     
     
         42 . The method according to  claim 31 , wherein the ink provided in at least some wells, channels, or posts is continuously provided by an integrated microfluidic network. 
     
     
         43 . The method according to  claim 42 , wherein the microfluidic network comprises a set of microfabricated reservoirs connected via microscopic channels to at least some wells, channels, or posts. 
     
     
         44 . A system comprising:
 an array of probes;   at least one ink source having an ink therein;   a microfluidic delivery system adapted to carry said ink to said array of probes;   device for transferring the ink onto selected probes; and   a substrate adapted to be contacted by said array of probes, and wherein when the array of probes is in contact with the substrate, those probes having ink thereon will deposit the ink onto the substrate.   
     
     
         45 . The system according to  claim 44 , wherein the ink source is a reservoir. 
     
     
         46 . The system according to  claim 44 , further comprising:
 an environmental control system.   
     
     
         47 . The system according to  claim 44 , further comprising:
 an alignment mechanism adapted to align the probes with the device for transferring the ink onto the selected ones of said probes.   
     
     
         48 . The system according to  claim 44 , wherein solid-phase synthetic methods are applied to the probe surface to generate ink on the probe surface. 
     
     
         49 . The system according to  claim 44 , wherein the device for transferring ink comprises an inkjet nozzle. 
     
     
         50 . The system according to  claim 44 , wherein the device for transferring the ink onto the selected ones of said probes provides for dipping said selected ones of said probes in at least one reservoir containing the ink. 
     
     
         51 . A substrate comprising:
 an array of wells and channels,   wherein the wells and channels are adapted to be associated and aligned with an array of tips for direct-write nanolithographic printing of ink on the tips.   
     
     
         52 - 60 . (canceled) 
     
     
         61 . An ink delivery device comprising a probe holding device for direct-write nanolithographic printing of inks with tips, wherein the device is integrated directly with microfluidic circuitry for delivery of ink to the probe. 
     
     
         62 - 96 . (canceled)