Roll-to-roll deposition apparatus with improved web transport system

Abstract

A system for the continuous deposition of a semiconductor material onto one or more webs of substrate material which are advanced therethrough includes a web transport system having a plurality of web support assemblies. Each web support assembly includes a base having a primary support arm pivotally mounted thereto so as to be displaceable from a first position to a second position. The support includes a first biasing member in mechanical communication with the primary support arm. The first biasing member operates to impart a first biasing force to the primary support arm so as to move it from its first position to its second position. The support includes a dancer arm which is pivotally mounted to the primary support arm so as to be displaceable from a first position to a second position relative to the primary support arm. The system further includes a second biasing member in mechanical communication with the dancer arm. The second biasing member operates to impart a second biasing force to the dancer arm so as to move it from its first position to its second position. A roller is rotatably supported on the dancer arm. The roller is configured to engage a portion of the web. The web support assembly operates to maintain continuous contact between the roller and the moving web of substrate material as it passes through the deposition system.

1 . In a roll-to-roll system for the continuous deposition of a semiconductor material onto a web of substrate material, wherein in the operation of said apparatus, the web of substrate material is continuously advanced therethrough, wherein said system includes a plurality of web support assemblies which engage and direct said web as it passes through said system, each web support assembly comprising:
 a base;   a primary support arm which is pivotally mounted on the base so as to be displaceable from a first position to a second position relative to said primary support arm;   a first biasing member in mechanical communication with said primary support arm, said first biasing member being operable to impart a first biasing force to said primary support arm so as to move said primary support arm from its first position to its second position;   a dancer arm which is pivotally mounted on said primary support arm so as to be displaceable from a first position to a second position relative thereto;   a second biasing member in mechanical communication with said dancer arm, said second biasing member being operable to impart a second biasing force to said dancer arm so as to move said dancer arm from its first position to its second position; and   a web support roller rotatably supported by said dancer arm, said roller being configured to engage a portion of said web.   
     
     
         2 . The system of  claim 1 , wherein in said web support assembly, said first biasing force is greater than said second biasing force. 
     
     
         3 . The system of  claim 1 , wherein in said web support assembly, said first biasing member and said second biasing member are selected from the group consisting of: springs, elastomers, pneumatic cylinders, hydraulic cylinders, magnetic devices, and combinations thereof. 
     
     
         4 . The system of  claim 1 , wherein in said web support assembly, said first biasing member is a spring which extends between said primary support arm and said base. 
     
     
         5 . The system of  claim 1 , wherein in said web support assembly, said second biasing member is a spring which extends between said dancer arm and said primary support arm. 
     
     
         6 . The system of  claim 1 , wherein in said web support assembly, said web support roller includes a groove which is configured to engage an edge of the web. 
     
     
         7 . The system of  claim 6 , wherein said groove is an asymmetric groove. 
     
     
         8 . The system of  claim 6 , wherein said groove includes a first face and a second face, and wherein said first face and said second face form a 90 degree angle. 
     
     
         9 . The system of  claim 6 , wherein said groove is configured so that said groove includes a first face and a second face, and wherein said faces establish a pinch contact with said substrate so that an end surface of said substrate does not contact the bottom of said groove. 
     
     
         10 . The system of  claim 6 , wherein said roller is configured so that when web of substrate material is disposed within the groove, a first face of said groove forms a first angle A, with a first face of said web, and a second face of said groove forms a second angle B with a second face of said web, and wherein angle A and angle B are different. 
     
     
         11 . The system of  claim 10 , wherein angle A and angle B are complementary. 
     
     
         12 . The system of  claim 1 , wherein said web of substrate is continuously advanced through said system in a vertical orientation and wherein at least some of said plurality of web support assemblies engage a lower edge of said web. 
     
     
         13 . The system of  claim 12 , wherein at least one of said plurality of web support assemblies engage an upper edge of said web. 
     
     
         14 . The system of  claim 12 , wherein at least one of the plurality of web support assemblies has a different configuration compared to the other web support assemblies. 
     
     
         15 . The system of  claim 1 , wherein in the operation of said system, a plurality of webs of substrate material are continuously advanced therethrough, and wherein said web support assemblies engage and guide said plurality of webs as they pass through said system. 
     
     
         16 . The system of  claim 15 , wherein the system comprises a first web support assembly and a second web support assembly configured so a first web and a second web of the plurality of webs have a spaced substantially parallel relationship. 
     
     
         17 . The system of  claim 16 , wherein the web support roller of the first web support assembly is configured to support/guide the first web independent of the second web-roller interaction with respect to the second web support assembly. 
     
     
         18 . The system of  claim 17 , wherein the first and second web support assemblies are joined to a common base. 
     
     
         19 . The system of  claim 1 , wherein said system is operable to deposit a photovoltaic semiconductor material onto said web of substrate material. 
     
     
         20 . In a roll-to-roll system for the continuous deposition of a semiconductor material onto a web of substrate material, wherein in the operation of said apparatus, the web of substrate material is continuously advanced therethrough, wherein said system includes a plurality of web support assemblies which engage and direct said web as it passes through said system, each web support assembly comprising a multi-biasing arrangement configured so a surface of the web is biased along a first direction with a first bias force and the surface of the web is biased along a second direction with a second bias force, the second direction being substantially opposite the first direction. 
     
     
         21 . The web support assembly of  claim 16 , wherein the multi-biasing arrangement is configured to have a biasing force transition zone between a web first position and a web second position where the web has a deflection within the biasing force transition zone that is substantially zero. 
     
     
         22 . The web support assembly of  claim 16 , wherein the multi-biasing arrangement biases the surface of the web with a greater force along the first direction compared to a biasing force exerted upon the web along the second direction. 
     
     
         23 . The web support assembly of  claim 18 , further comprising a roller, wherein the first bias force along the first direction reacts web movement into the roller, and the second bias force along the second direction acts to maintain contact between the roller and web as the web moves away from the roller. 
     
     
         24 . The web support assembly of  claim 16 , wherein the biasing arrangement includes a coil spring.