US2010300361A1PendingUtilityA1

Delivery device

Assignee: ROHM & HAAS ELECT MATPriority: Dec 8, 2004Filed: May 25, 2010Published: Dec 2, 2010

Est. expiryDec 8, 2024(expired)· nominal 20-yr term from priority

Inventors:Deodatta Vinayak Shenai-Khatkhate Michael Timmons Charles J. Marsman Egbert Woelk Ronald L. Dicarlo, Jr.

C23C 16/4481C23C 16/4402F04D 17/168H10P 72/0468H10P 14/20

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Abstract

Delivery devices for delivering solid precursor compounds in the vapor phase to reactors are provided. Such devices include a precursor composition of a solid precursor compound with a layer of packing material disposed thereon. Also provided are methods for transporting a carrier gas saturated with the precursor compound for delivery into such CVD reactors.

Claims

exact text as granted — not AI-modified

1 . A vapor phase delivery device comprising an outlet chamber and an inlet chamber comprising packing material, wherein the packing material comprises a stabilizing agent. 
     
     
         2 . The vapor phase delivery device of  claim 1  wherein the stabilizing agent is chosen from oxygen scavengers, thermal stabilizers, antioxidants, anti-static agents, free-radical scavengers, and tagging agents. 
     
     
         3 . The vapor delivery device of  claim 1  wherein the packing material is chosen from ceramics, glasses, clays and organic polymers. 
     
     
         4 . The vapor delivery device of  claim 1  wherein the delivery device does not contain a dip tube.

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