Continuous micro anode guided electroplating device and method thereof

Abstract

A continuous micro anode guided electroplating device and a method thereof are revealed. By real-time image monitoring and capillary action of the micro/nanoscale tube, a three-dimensional microstructure is deposited on a workpiece at the cathode. The deposit is growing smoothly under the real-time image monitoring. Moreover, the workpiece is not immersed in an electrolyte so that contaminations of the workpiece caused by electrolyte are reduced.

1 . A continuous micro anode guided electroplating device comprising:
 a micro anode that includes a capillary and a conductor while the conductor is disposed inside the capillary and the capillary is filled with an electrolyte,   a loading platform that is set under the micro anode,   a cathode that is a workpiece and is put on the loading platform,   a power supply that is connected to the conductor of the micro anode and the cathode so as to provide a bias to the micro anode and the cathode and generate a deposit at the cathode,   a monitor that is connected to the power supply as well as the loading platform for monitoring a distance between the micro anode and the cathode and controlling movement of the loading platform so as to maintain the distance between the micro anode and the cathode at a fixed value.   
     
     
         2 . The device as claimed in  claim 1 , wherein the monitor includes
 an image capture device that takes an image between the micro anode and the cathode, and   a controller that connects with the image capture device and the cathode and receives the image and then check a distance between the micro anode and the cathode calculated according to the image so as to control movement of the loading platform.   
     
     
         3 . The device as claimed in  claim 2 , wherein the image capture device is a charge-coupled device (CCD). 
     
     
         4 . The device as claimed in  claim 2 , wherein the controller is a computer. 
     
     
         5 . The device as claimed in  claim 1 , wherein the conductor is made from platinum. 
     
     
         6 . The device as claimed in  claim 1 , wherein the loading platform includes a driving device that drives the loading platform to move. 
     
     
         7 . The device as claimed in  claim 6 , wherein the driving device is a motor. 
     
     
         8 . The device as claimed in  claim 1 , wherein the fixed value of the distance ranges from 10 mm (micrometer) to 20 mm. 
     
     
         9 . A method of continuous micro anode guided electroplating comprising the steps of:
 disposing a micro anode above a cathode,   adding an electrolyte into the micro anode,   applying a bias to the micro anode and the cathode,   generating a deposit at the cathode from the micro anode,   capturing an image between the micro anode and the cathode, and   checking a distance between the micro anode and the cathode according to the image and controlling movement of a loading platform so as to maintain the distance between the micro anode and the cathode at a fixed value.   
     
     
         10 . The device as claimed in  claim 9 , wherein the fixed value of the distance ranges from 10 mm (micrometer) to 20 mm. 
     
     
         11 . The device as claimed in  claim 9 , wherein the image is treated by binary processing. 
     
     
         12 . The device as claimed in  claim 9 , wherein the micro anode includes a capillary and a conductor while the conductor is disposed inside the capillary. 
     
     
         13 . The device as claimed in  claim 12 , wherein the conductor is made from platinum.