Method and apparatus for laser micromachining a conical surface

Abstract

Embodiments of the present invention are directed to methods and systems for micromachining a conical surface. In one embodiment, such a system may include a rotating platform for receiving a long line of laser illumination, a mask having a predetermined pattern comprising a sector of a planar ring, the mask being positioned on the rotating platform, a workpiece stage having a rotational axis for rotating a removably-affixed workpiece comprising a conical surface, wherein the sector comprises the planar image of the conical surface, an excimer laser for producing a laser beam, a homogenizer for homogenizing the laser beam in at least a single direction, at least one condenser lens, a turning mirror and at least one projection lens.

1 . A system for micromachining a conical surface comprising:
 a rotating platform for receiving a long line of electromagnetic radiation;   a mask having a predetermined pattern comprising a sector of a planar ring, the mask being positioned on the rotating platform; and   a workpiece stage having a rotational axis for rotating a removably affixed workpiece comprising a conical surface, wherein the sector comprises the planar image of the conical surface.   
     
     
         2 - 19 . (canceled) 
     
     
         20 . An application program operational on a computer for enabling a method for imaging a conical surface of a workpiece, the method comprising:
 directing an irradiating beam of electromagnetic radiation at a mask, wherein the mask includes a planar surface of a sector of a ring and a predetermined image thereon, the ring sector corresponds to an unwrapped area of a conical surface of a workpiece;   producing, as a result of the irradiating beam interacting with the mask, an image field for projection on the conical surface of the workpiece;   projecting the image field onto the conical surface of the workpiece;   rotating the mask about an axis, wherein the axis comprises the center of the ring;   synchronously rotating the workpiece about a second axis, the second axis corresponding to the conical surface of the workpiece.   
     
     
         21 . (canceled)