Electrostatic chuck device

Abstract

The object of this invention is to provide an electrostatic chuck device which can properly and promptly diselectrify a substrate to be processed. In an electrostatic chuck device attracting a substrate to be processed on the surface of a susceptor electrically, a diselectrifying circuit is provided which includes diselectrifying electrode means facing the surface of the susceptor, a diselectrifying potential, and a diselectrifying resistance connected between the diselectrifying electrode means and the diselectrifying potential. The resistance value of the diselectrifying resistance is established such that it is lower than that of an insulating layer of the surface of the susceptor and the diselectrifying resistance can hold the potential of the substrate during an electrostatic chuck operation, such that the diselectrifying resistance can dissipate the potential of the substrate into the ground potential when the electrostatic chuck is canceled. This structure can thus appropriately and promptly diselectrify the substrate.

1 . An electrostatic chuck device for electrostatically attracting a substrate to be processed, the device comprising;
 a susceptor having a top surface;   a chuck electrode for electrically attracting said substrate to said top surface of said susceptor, said chuck electrode arranged in the inside of said susceptor;   a diselectrifying electrode for diselectrifying said substrate, said diselectrifying electrode arranged on said susceptor so as to be capable of contacting a back surface of said substrate placed on said susceptor;   a diseletrifying potential source;   a diselectrifying resistance connected between said diselectrifying electrode means and said diselectrifying potential source; and   a biasing member attached to said diselectrifying electrode and impressing a biasing force upon said diselectrifying electrode toward said top surface of said susceptor.   
     
     
         2 . The electrostatic chuck device according to  claim 1 , in which plural of said chuck electrode are arranged in the inside of said susceptor. 
     
     
         3 . The electrostatic chuck device according to  claim 2 , in which said diselectrifying electrode is formed through a space provided between said plural chuck electrodes placed in the inside of said susceptor. 
     
     
         4 . The electrostatic chuck device according to  claim 1 , further comprising;
 switch means which connects/cuts-off electrically between said diselectrifying electrode means and said diselectrifying potential source   
     
     
         5 . The electrostatic chuck device according to  claim 4 , in which the potential of said diselectrifying potential source is ground. 
     
     
         6 . The electrostatic chuck device according to  claim 4 , in which the potential of said diselectrifying potential source is a predetermined power supply potential. 
     
     
         7 . The electrostatic chuck device according to  claim 4 , in which said diselectrifying electrode is arranged at plural positions relative to said surface of said susceptor.