Method for producing microscopic components

Abstract

A method is provided for producing microscopically small components. The method can produce components with a size of less than 10 μm. The method includes: (a) Production of a precipitation hardenable alloy comprising at least two phases, in which alloy of a first phase forms a matrix structure in which a second phase is embedded in the form of discrete particles of a size less than 10 μm; (b) Dissolution of the matrix and separation of particles from the alloy; and (c) Mechanical deformation by forging respectively a separated particle with at least one striking tool to form the desired element.

1 . A method for producing microscopically small components, comprising:
 Production of a precipitation hardenable alloy comprising at least two phases (γ, γ′), in which alloy of a first phase (γ) forms a matrix structure in which a second phase (γ′) is embedded in a form of discrete particles of a size less than 10 μm;   Dissolution of the matrix and separation of particles from the alloy; and   Mechanical deformation by forging respectively a separated particle with at least one striking tool to form a desired element.   
     
     
         2 . The method according to  claim 1 , wherein the particles are embodied in an essentially cuboid form. 
     
     
         3 . The method according to  claim 2 , wherein the particles are embodied in an essentially cubic form. 
     
     
         4 . The method according to  claim 2 , wherein a maximum edge length is less than 10 μm. 
     
     
         5 . The method according to  claim 1 , wherein the dissolution of the matrix is carried out chemically and/or electrochemically. 
     
     
         6 . The method according to  claim 1 , wherein particles bonded on a metal surface are shaken off by ultrasound for the separation. 
     
     
         7 . The method according to  claim 6 , wherein the shaking off is carried out in an aqueous solution, which is subsequently centrifuged to obtain the particles. 
     
     
         8 . The method according to  claim 1 , wherein the alloy is monocrystalline in the particles. 
     
     
         9 . The method according to  claim 1 , wherein the alloy is a nickel-based superalloy. 
     
     
         10 . The method according to  claim 9 , wherein the nickel-based superalloy comprises 1-9% by weight aluminum, 0-8% by weight titanium and 0-15% by weight tantalum. 
     
     
         11 . The method according to  claim 10 , wherein the alloy is composed of nickel, aluminum, tantalum, chromium, tungsten and molybdenum, comprising 11.6 At. % Al, 2.4 At. % Ta, 6 At. % Cr, 3.5 At. % W, 1.3 At. % Mo; and a balance being nickel and unavoidable contaminants. 
     
     
         12 . (canceled) 
     
     
         12 . The method according to  claim 1 , wherein a processing surface of the striking tool is smaller than 50 μm. 
     
     
         13 . The method according to  claim 1 , wherein a manipulator with a tungsten tip is used as the striking tool and a silicon cantilever arm is used as an anvil. 
     
     
         14 . The method according to  claim 13 , wherein the silicon cantilever arm has a flat surface. 
     
     
         15 . The method according to  claim 13 , wherein the silicon cantilever arm has at least one recess functioning as a die. 
     
     
         16 . The method according to  claim 15 , wherein the at least one recess has a base area, a maximum dimension of which is smaller than 5 μm. 
     
     
         17 . The method according to  claim 16 , wherein the recess is produced by nanolithography or microlithography. 
     
     
         18 . The method according to  claim 13 , wherein the tungsten tip has a plateau with a diameter of less than 50 μm. 
     
     
         19 . The method according to  claim 13 , wherein it is carried out completely in a scanning electron microscope. 
     
     
         20 . The method according to  claim 13 , wherein it is carried out completely in a high vacuum. 
     
     
         21 . The method according to  claim 1 , wherein the alloy is a nickel-iron alloy and the particles comprise Ni 3 Fe. 
     
     
         22 . The method according to  claim 2 , wherein a maximum edge length is less than 1 μm. 
     
     
         23 . The method according to  claim 1 , wherein a processing surface of the striking tool is smaller than 5 μm. 
     
     
         24 . The method according to  claim 13 , wherein the tungsten tip has a plateau with a diameter of less than 5 μm.