Deposition source

Abstract

A deposition source with uniform deposition characteristics includes a crucible in which a deposition material is disposed; a heat transfer member disposed on upper portions of the deposition material in the crucible; and an accommodation member for accommodating the heat transfer member and including a mesh plate.

1 . A deposition source comprising:
 a crucible in which a deposition material is disposed;   an accommodation member comprising a mesh plate and which is disposed adjacent the deposition material; and   a heat transfer member disposed within the accommodation member and separated from an upper portion of the deposition material by the mesh plate.   
     
     
         2 . The deposition source of  claim 1 , wherein the heat transfer member comprises a thermo ball. 
     
     
         3 . The deposition source of  claim 1 , wherein:
 the accommodation member comprises a bottom portion disposed between the heat transfer member and the upper portion of the deposition material, and a side portion extending from the bottom portion and forming a side surface of the accommodation member,   the bottom portion comprises the mesh plate, and   the side portion comprises another mesh plate.   
     
     
         4 . The deposition source of  claim 3 , wherein:
 the accommodation member further comprises a top portion that is parallel to the bottom portion and is connected to the side portion such that the heat transfer member is disposed between the top and bottom portions, and   the top portion comprises a further mesh plate.   
     
     
         5 . The deposition source of  claim 4 , wherein the top portion is connected to the side portion by welding. 
     
     
         6 . The deposition source of  claim 3 , wherein:
 the accommodation member comprises a cover portion disposed on upper portions of the heat transfer member, and   the cover portion comprises a further mesh plate and is detachable from the side portion.   
     
     
         7 . The deposition source of  claim 3 , further comprising supports disposed on the side portion and connected to the bottom portion. 
     
     
         8 . The deposition source of  claim 7 , wherein the supports comprise titanium (Ti). 
     
     
         9 . The deposition source of  claim 1 , wherein the accommodation member has a shape formed to correspond to an inner circumferential surface of the crucible. 
     
     
         10 . The deposition source of  claim 1 , wherein the mesh plate is formed so that the heat transfer member does not escape from the accommodation member. 
     
     
         11 . The deposition source of  claim 1 , wherein the heat transfer member comprises particles having a diameter greater than a size of openings in the mesh plate. 
     
     
         12 . The deposition source of  claim 1 , wherein the heat transfer member comprises silicon (Si) powder. 
     
     
         13 . A deposition material holder for use in a crucible holding a deposition material source, the holder comprising:
 a housing having openings which allow the deposition material when in a gaseous form to pass through the housing and which is shaped to be accommodated in the crucible; and   a heat transfer member disposed within the housing and comprising particles having a diameter greater than a size of the openings, the particles being non-reactive with the deposition material and having a good heat transfer efficiency property and a high heat-resistance property.   
     
     
         14 . The holder of  claim 13 , wherein the heat transfer member comprises silicon (Si) powder. 
     
     
         15 . The holder of  claim 13 , wherein:
 the housing comprises a top and a bottom connected by a side to form a space which accommodates the particles, and   each of the top and bottom comprise the openings.   
     
     
         16 . The holder of  claim 15 , wherein a shape of the bottom is substantially a circumferential shape of the crucible at an upper surface of the deposition material. 
     
     
         17 . The holder of  claim 15 , wherein top is connected to the side by welding. 
     
     
         18 . The holder of  claim 15 , wherein the top is removable from the housing. 
     
     
         19 . The holder of  claim 18 , further comprising a protrusion which extends from the top and supports the top when the top is removed. 
     
     
         20 . A method of performing deposition comprising:
 accommodating a deposition material holder in a crucible holding a deposition material source, the holder comprising: a housing having openings; and a heat transfer member disposed within the housing and comprising particles having a diameter greater than a size of the openings, the particles being non-reactive with the deposition material and having a good heat transfer efficiency property and a high heat-resistance property; and   heating the crucible and the particles to transform the deposition material into a gas which passes through the particles and openings to a substrate.   
     
     
         21 . The method of  claim 20 , further comprising:
 disposing the particles within the deposition material holder; and   covering the particles within the deposition material holder with a cover having the openings.