Coating apparatus, coating method thereof, and method of forming organic layer using the same

Abstract

A coating apparatus includes a stage supporting a coating target, a coating part on the stage, the coating part being configured to apply a coating material onto the coating target, and a heating source opposite to and spaced apart from the stage, the heating source being configured to supply heat to the coating target after application of the coating material onto the coating target.

1 . A coating apparatus, comprising:
 a stage supporting a coating target;   a coating part on the stage, the coating part being configured to apply a coating material onto the coating target; and   a heating source opposite to and spaced apart from the stage, the heating source being configured to supply heat to the coating target after application of the coating material onto the coating target.   
     
     
         2 . The coating apparatus as claimed in  claim 1 , wherein the heating source overlaps the entire coating target, the heating source being configured to simultaneously and uniformly supply heat to the entire coating target. 
     
     
         3 . The coating apparatus as claimed in  claim 1 , wherein the heating source is an infrared heater or a halogen lamp. 
     
     
         4 . The coating apparatus as claimed in  claim 3 , wherein the heating source is a halogen lamp, and the heating source further comprises a reflection plate. 
     
     
         5 . The coating apparatus as claimed in  claim 1 , wherein the heating source is vertically movable toward the stage. 
     
     
         6 . The coating apparatus as claimed in  claim 1 , wherein the heating source is completely separated from the stage. 
     
     
         7 . The coating apparatus as claimed in  claim 1 , wherein the coating part includes:
 a movable support frame on the stage; and   an ejection part on the movable support frame, the ejection part being movable in a direction perpendicular to a movement direction of the movable support frame and being configured to eject the coating material.   
     
     
         8 . The coating apparatus as claimed in  claim 7 , wherein the movable support frame includes:
 first support frames spaced a predetermined distance from and opposite to each other and having a predetermined height; and   a second support frame having two ends disposed on the first support frames and crossing the first support frames.   
     
     
         9 . The coating apparatus as claimed in  claim 8 , wherein the second support frame is vertically movable toward and away from the stage. 
     
     
         10 . The coating apparatus as claimed in  claim 8 , wherein the ejection part includes:
 a movable coating head configured to move in a longitudinal direction of the second support frame; and   a nozzle in the coating head, the nozzle being configured to eject the coating material.   
     
     
         11 . The coating apparatus as claimed in  claim 1 , further comprising a chamber, the stage being in a lower part of the chamber, and the heating source being in an upper part of the chamber. 
     
     
         12 . A coating method, comprising:
 positioning a coating target on a stage in a coating apparatus;   applying a coating material onto the coating target using a coating part; and   supplying heat to the coating target, after applying the coating material onto the coating target, using a heating source, the heating source being opposite to and spaced apart from the stage in the coating apparatus.   
     
     
         13 . The coating method as claimed in  claim 12 , wherein supplying heat to the coating target includes supplying uniform heat simultaneously to the entire coating target. 
     
     
         14 . The coating method as claimed in  claim 12 , wherein applying a coating material includes applying an organic emission material, an organic thin layer transistor material, and/or a solar cell material. 
     
     
         15 . The coating method as claimed in  claim 12 , wherein supplying heat to the coating target includes drying the coating material at a temperature of about 100° C. to about 200° C. 
     
     
         16 . The coating method as claimed in  claim 12 , wherein supplying heat to the coating target includes using an infrared heater or a halogen lamp. 
     
     
         17 . A method of forming an organic layer, comprising:
 applying an organic material on a substrate using a coating part, the substrate being on a stage in a coating apparatus; and   supplying heat to the organic material and drying the organic material to form an organic layer using a heating source, after the organic material is applied, the heating source being opposite to and spaced apart from the stage in the coating apparatus.   
     
     
         18 . The method as claimed in  claim 17 , wherein applying the organic material includes applying a material for forming an emission layer, a hole injection layer, a hole transport layer, an electron injection layer, and/or an electron transport layer of an organic light emitting diode. 
     
     
         19 . The method as claimed in  claim 17 , wherein supplying heat to the organic material includes drying the organic material at a temperature of about 100° C. to about 200° C. 
     
     
         20 . The method as claimed in  claim 17 , wherein supplying heat to the organic material includes supplying uniform heat simultaneously to the entire substrate to dry the organic material.