Microchannel cooling device for small heat sources

Abstract

According to the invention, an apparatus for transferring heat with a target is disclosed. The apparatus may include a body which defines a surface, inlet and outlet ports, inlet and outlet manifold passages, and heat transfer passages. The surface may couple the target with the body. The inlet port may be configured to receive and direct a fluid into inlet manifold passages. The outlet port may be configured to receive and output the fluid. The inlet and outlet manifold passages may be configured to receive and direct the fluid to and from the heat transfer passages. The heat transfer passages may be configured to receive and direct all of the fluid from the inlet manifold passages in one or more directions substantially parallel to the surface and substantially perpendicular the input manifold passages. At least one heat transfer passages may have a plurality of fins on at least one surface.

1 . An apparatus for transferring heat with a target, the apparatus including a body, wherein the body defines:
 a surface for coupling the target with the body, wherein heat transfers between the target and the body when the target is coupled with the body;   an inlet port, wherein the inlet port is configured to:
 receive a fluid; and 
 direct the fluid into a plurality of inlet manifold passages; 
   the plurality of inlet manifold passages, wherein the plurality of inlet manifold passages are configured to:
 receive the fluid from the inlet port; and 
 direct the fluid to a plurality of heat transfer passages; 
   the plurality of heat transfer passages, wherein the plurality of heat transfer passages are configured to:
 receive the fluid from the plurality of inlet manifold passages; 
 direct all of the fluid from the inlet manifold passages in one or more directions substantially parallel to the surface and substantially perpendicular to the plurality of input manifold passages; and 
 direct the fluid to a plurality of outlet manifold passages, wherein heat transfers between the body and the fluid when fluid flows through the plurality of heat transfer passages; 
   a plurality of fins on at least one surface of at least one of the plurality of heat transfer passages;   the plurality of outlet manifold passages, wherein the plurality of outlet manifold passages are configured to:
 receive the fluid from the plurality of heat transfer passages; and 
 direct the fluid to an outlet port; and 
   an outlet port, wherein the outlet port is configured to:
 receive the fluid from the plurality of outlet manifold passages; and 
 output the fluid. 
   
     
     
         2 . The apparatus for removing heat from a heat source of  claim 1 , the apparatus further comprising the target. 
     
     
         3 . The apparatus for removing heat from a heat source of  claim 1 , the target comprising a laser diode. 
     
     
         4 . The apparatus for removing heat from a heat source of  claim 1 , wherein each of the plurality of heat transfer passages are characterized by a hydraulic diameter, and each of the plurality of heat transfer passages have a hydraulic diameter of about 500 microns or less. 
     
     
         5 . An apparatus for transferring heat with a target, the apparatus comprising:
 a plurality of sheets, wherein the plurality of sheets are coupled such that a body is formed by the coupled plurality of sheets, and wherein the body defines:
 a surface for coupling the target with the body, wherein heat transfers between the target and the body when the target is coupled with the body; 
 an inlet port, wherein the inlet port is configured to:
 receive a fluid; and 
 direct the fluid into a plurality of inlet manifold passages; 
 
 the plurality of inlet manifold passages, wherein the plurality of inlet manifold passages are configured to:
 receive the fluid from the inlet port; and 
 direct the fluid to a plurality of heat transfer passages; 
 
 the plurality of heat transfer passages, wherein the plurality of heat transfer passages are configured to:
 receive the fluid from the plurality of inlet manifold passages; 
 direct all of the fluid received from the inlet manifold passages in one or more directions substantially parallel to the surface and substantially perpendicular to the plurality of input manifold passages; and 
 direct the fluid to a plurality of outlet manifold passages, wherein heat transfers between the body and the fluid when fluid flows through the plurality of heat transfer passages; 
 
 the plurality of outlet manifold passages, wherein the plurality of outlet manifold passages are configured to:
 receive the fluid from the plurality of heat transfer passages; and 
 direct the fluid to an outlet port; 
 
 a plurality of fins protruding into at least one of the plurality of input manifold passages or the plurality of output manifold passages; and 
 the outlet port, wherein the outlet port is configured to:
 receive the fluid from the plurality of outlet manifold passages; and 
 output the fluid. 
 
   
     
     
         6 . The apparatus for removing heat from a heat source of  claim 5 , wherein a plurality of fins protruding into at least one of the plurality of input manifold passages or the plurality of output manifold passages comprises at least one fin protruding from between two adjacent heat transfer passages. 
     
     
         7 . The apparatus for removing heat from a heat source of  claim 5 , wherein each of the plurality of sheets is characterized by a thickness and each of the plurality of heat transfer passages is characterized by a height, wherein the height of each of the plurality of heat transfer passages is substantially half of the thickness of at least one of the plurality of sheets. 
     
     
         8 . The apparatus for removing heat from a heat source of  claim 5 , wherein each of the plurality of sheets is comprised of a selection from a group consisting of:
 copper;   copper alloy;   molybdenum;   tungsten;   nickel;   aluminum;   stainless steel;   silicon;   beryllia;   aluminum nitride;   silicon carbide;   chemical vapor deposition diamond;   copper-diamond;   copper-graphite;   copper-tungsten; and   copper-molybdenum.   
     
     
         9 . The apparatus for removing heat from a heat source of  claim 5 , the plurality of sheets comprising an upper sheet, a plurality of interior sheets, and a lower sheet, wherein:
 at least one of the upper sheet and the lower sheet define the surface;   at least one of the upper sheet, the plurality of interior sheets, and the lower sheet define the inlet port;   the plurality of interior sheets define:
 the plurality of inlet manifold passages; 
 the plurality of heat transfer passages; and 
 the plurality of outlet manifold passages; and 
   at least one of the upper sheet, the plurality of interior sheets, and the lower sheet define the outlet port.   
     
     
         10 . The apparatus for removing heat from a heat source of  claim 9 , wherein interior sheets coupled closer to the upper sheet define more heat transfer passages than interior sheets coupled closer to the lower sheet define. 
     
     
         11 . The apparatus for removing heat from a heat source of  claim 9 , wherein at least two interior sheet define more than one heat transfer passages between one inlet manifold passage and one outlet manifold passage. 
     
     
         12 . The apparatus for removing heat from a heat source of  claim 9 , wherein the upper sheet and lower sheet are characterized by a thickness, and the upper sheet and lower sheet are each between about 50 microns and about 10,000 microns thick. 
     
     
         13 . The apparatus for removing heat from a heat source of  claim 9 , wherein the upper sheet and lower sheet are characterized by a thickness, and the upper sheet and lower sheet are each about 250 microns thick. 
     
     
         14 . The apparatus for removing heat from a heat source of  claim 9 , wherein each of the plurality of interior sheets is characterized by a thickness, and each of the plurality of interior sheets is between about 12.5 microns and about 500 microns thick. 
     
     
         15 . The apparatus for removing heat from a heat source of  claim 9 , wherein each of the plurality of interior sheets is characterized by a thickness, and each of the plurality of interior sheets is about 50 microns thick. 
     
     
         16 . An apparatus for transferring heat with a target, the apparatus comprising:
 an upper sheet;   a plurality of interior sheets; and   a lower sheet, wherein:
 the upper sheet defines a surface for coupling with a target, wherein heat transfers between the target and the upper sheet when the target is coupled with the surface; 
 at least one of the upper sheet, the plurality of interior sheets, and the lower sheet define the inlet port, wherein the inlet port is configured to receive a fluid; 
 the plurality of interior sheets are coupled with the upper sheet, wherein heat transfers between the upper sheet and the plurality of interior sheets, and wherein the plurality of interior sheets define:
 a plurality of inlet manifold passages for receiving the fluid from the inlet port; 
 a plurality of heat transfer passages for receiving the fluid from the plurality of inlet manifold passages, wherein heat transfers between the fluid and the plurality of interior sheets, and wherein the plurality of heat transfer passages are configured to direct all of the fluid received from the inlet manifold passages in one or more directions substantially parallel to the surface, and wherein one or more of the heat transfer passages are curved; and 
 a plurality of outlet manifold passages for receiving the fluid from the plurality of heat transfer passages; 
 
 the lower sheet is coupled with at least one of the plurality of interior sheets; and 
 at least one of the upper sheet, the plurality of interior sheets, and the lower sheet define the outlet port, wherein the outlet port is configured to receive the fluid from the plurality of outlet manifold passages and output the fluid. 
   
     
     
         17 . The apparatus for removing heat from a heat source of  claim 16 , wherein one or more of the heat transfer passages being curved comprises one or more of the heat transfer passages being curved to facilitate flow from the inlet manifold passages to the outlet manifold passages. 
     
     
         18 . The apparatus for removing heat from a heat source of  claim 16 , wherein at least one of the upper sheet, the plurality of interior sheets, and the lower sheet comprise a shape, and the shape is formed by photochemical etching. 
     
     
         19 . The apparatus for removing heat from a heat source of  claim 16 , wherein the plurality of sheets are coupled together by diffusion bonding. 
     
     
         20 . The apparatus for removing heat from a heat source of  claim 19 , wherein the plurality of sheets are coated with a diffusion aid. 
     
     
         21 . The apparatus for removing heat from a heat source of  claim 20 , the diffusion aid comprising nickel. 
     
     
         22 . The apparatus for removing heat from a heat source of  claim 16 , wherein the plurality of sheets are coupled by soldering or brazing. 
     
     
         23 . An apparatus for transferring heat with a target, the apparatus comprising:
 an upper sheet;   a plurality of interior sheets; and   a lower sheet, wherein:
 the upper sheet defines a surface for coupling with a target, wherein heat transfers between the target and the upper sheet when the target is coupled with the surface; 
 at least one of the upper sheet, the plurality of interior sheets, and the lower sheet define the inlet port, wherein the inlet port is configured to receive a fluid; 
 the plurality of interior sheets are coupled with the upper sheet, wherein heat transfers between the upper sheet and the plurality of interior sheets, and wherein the plurality of interior sheets define:
 a plurality of inlet manifold passages for receiving the fluid from the inlet port; 
 a plurality of heat transfer passages for receiving the fluid from the plurality of inlet manifold passages, wherein heat transfers between the fluid and the plurality of interior sheets, and wherein the plurality of heat transfer passages are configured to direct all of the fluid received from the inlet manifold passages in one or more directions substantially parallel to the surface, and wherein one or more of the heat transfer passages are about a fin strip array; and 
 a plurality of outlet manifold passages for receiving the fluid from the plurality of heat transfer passages; 
 
 the lower sheet is coupled with at least one of the plurality of interior sheets; and 
 at least one of the upper sheet, the plurality of interior sheets, and the lower sheet define the outlet port, wherein the outlet port is configured to receive the fluid from the plurality of outlet manifold passages and output the fluid. 
   
     
     
         24 . An apparatus for transferring heat with a target, the apparatus comprising:
 an upper sheet;   a plurality of interior sheets; and   a lower sheet, wherein:
 the upper sheet defines a surface for coupling with a target, wherein heat transfers between the target and the upper sheet when the target is coupled with the surface; 
 at least one of the upper sheet, the plurality of interior sheets, and the lower sheet define the inlet port, wherein the inlet port is configured to receive a fluid; 
 the plurality of interior sheets are coupled with the upper sheet, wherein heat transfers between the upper sheet and the plurality of interior sheets, and wherein the plurality of interior sheets define:
 a plurality of inlet manifold passages for receiving the fluid from the inlet port; 
 a plurality of heat transfer passages for receiving the fluid from the plurality of inlet manifold passages, wherein heat transfers between the fluid and the plurality of interior sheets, and wherein the plurality of heat transfer passages are configured to direct all of the fluid received from the inlet manifold passages in one or more directions substantially parallel to the surface, and wherein at least one of the plurality of inlet manifold passages or plurality of outlet manifold passages are tapered; and 
 a plurality of outlet manifold passages for receiving the fluid from the plurality of heat transfer passages; 
 
 the lower sheet is coupled with at least one of the plurality of interior sheets; and 
 at least one of the upper sheet, the plurality of interior sheets, and the lower sheet define the outlet port, wherein the outlet port is configured to receive the fluid from the plurality of outlet manifold passages and output the fluid. 
   
     
     
         25 . The apparatus for transferring heat with a target of  claim 24 , wherein at least one of the plurality of inlet manifold passages or plurality of outlet manifold passages being tapered comprises at least one of the plurality of inlet manifold passages or plurality of outlet manifold passages being tapered in one dimension. 
     
     
         26 . The apparatus for transferring heat with a target of  claim 24 , wherein at least one of the plurality of inlet manifold passages or plurality of outlet manifold passages being tapered comprises at least one of the plurality of inlet manifold passages or plurality of outlet manifold passages being tapered in two dimensions.