Organometallic-compound feeder

Abstract

An organometallic compound feeder comprising a packing container into which an organometallic compound that is in a solid state at an ordinary temperature is to be packed and a carrier gas is to be fed to sublimate the organometallic compound further comprises: a support plate which is to hold the organometallic compound carried on an inert carrier in the packing container and which is to allow the carrier gas to pass therethrough, a carrier gas inlet in an upper portion of the packing container, a carrier gas outlet which is opened below the support plate in a bottom portion of the packing container, and a baffle plate which is attached between the support plate and the carrier gas outlet and is larger than an opening diameter of the carrier gas outlet, and the feeder is configured so as to allow carrier gas to pass downward through the organometallic compound carried on the inert carrier packed on the support plate.

1 . An organometallic compound feeder comprising a packing container into which an organometallic compound that is in a solid state at an ordinary temperature is to be packed and a carrier gas is to be fed to sublimate the organometallic compound, which feeder further comprises:
 a support plate which is to hold the organometallic compound carried on an inert carrier in the packing container and which is to allow the carrier gas to pass therethrough,   a carrier gas inlet in an upper portion of the packing container,   a carrier gas outlet which is opened below the support plate, in a bottom portion of the packing container, and   a baffle plate which is attached to between the support plate and the carrier gas outlet and is larger than an opening diameter of the carrier gas outlet, and   which is configured so as to allow the carrier gas to pass downward through the organometallic compound carried on the inert carrier packed on the support plate.   
     
     
         2 . The organometallic compound feeder according to  claim 1 , wherein the support plate is a metal mesh of stainless steel having an opening size of from 1 mm to 5 mm. 
     
     
         3 . The organometallic compound feeder according to  claim 1  or  2 , wherein the baffle plate which is larger than the opening diameter of the carrier gas outlet is a disc-shaped flat plate and is placed approximately concentrically with the support plate and a barrel of the packing container. 
     
     
         4 . The organometallic compound feeder according to  claim 1 , wherein the carrier gas inlet is constructed such that the carrier gas supplied from the carrier gas inlet is ejected in a direction which is approximately perpendicular to a central axis of the packing container when the container is installed vertically. 
     
     
         5 . The organometallic compound feeder according to  claim 1 , wherein the organometallic compound is trimethylindium.