Method and device for the absorption of heat in a vacuum coating apparatus

Abstract

An apparatus and method for heat absorption in vacuum coating installations includes an absorber having a line system to supply a coolant. The line system is enclosed by a jacket tight relative to the vacuum chamber, flow spaces are arranged between the line system and the jacket, which are connected to a source of heat exchanger medium so that the line system is flowed around by a heat exchanger medium sealed relative to the vacuum chamber.

1 . Apparatus for heat absorption in vacuum coating installations with an absorber, which has a line system for guiding of a coolant, wherein the line system is enclosed by a jacket, tight relative to a vacuum chamber, and flow spaces are arranged between the line system and the jacket, the spaces being connected to a source of the heat exchanger medium. 
     
     
         2 . Apparatus according to  claim 1 , wherein the line system comprises a closed outer tube having a coolant line arranged in an internal space of the outer tube, and the outer tube is provided with a jacket tube arranged spaced via a spacer to form a flow space connected to the source of heat exchanger medium. 
     
     
         3 . Apparatus according to  claim 2 , wherein an inner tube open to the internal space is arranged in the outer tube and the inner tube is connected to a vacuum source or sink and the internal space of the outer tube is connected to a vacuum sink or vacuum source. 
     
     
         4 . Apparatus according to  claim 3 , wherein the inner tube is arranged concentrically in the outer tube. 
     
     
         5 . Apparatus according to  claim 2 , wherein the jacket tube is arranged concentric to the outer tube. 
     
     
         6 . Apparatus according to  claim 2 , wherein an outside of the jacket tube is provided with surface-enlarging elements. 
     
     
         7 . Method for heat absorption in vacuum coating installations comprising flowing a coolant through a line system to take off absorbed heat, and flowing a heat exchanger medium sealed relative to a vacuum chamber around the line system. 
     
     
         8 . Method according to  claim 7 , wherein the coolant comprises water. 
     
     
         9 . Method according to  claim 7 , wherein the heat exchanger medium comprises a gas. 
     
     
         10 . Method according to  claim 9 , wherein the heat exchanger medium contains helium. 
     
     
         11 . Method according to  claim 10 , wherein the heat exchanger medium consists of helium. 
     
     
         12 . Method according to  claim 9 , wherein the heat exchanger medium contains hydrogen. 
     
     
         13 . Method according to  claim 12 , wherein the heat exchanger medium consists of hydrogen. 
     
     
         14 . Method according to  claim 9 , wherein the heat exchanger medium contains air. 
     
     
         15 . Method according to  claim 14 , wherein the heat exchanger medium consists of air. 
     
     
         16 . Method according to  claim 7 , wherein a temperature difference between the coolant and the heat exchanger medium is controlled by pressure, flow rate and/or gas composition.