Method and apparatus for manufacturing a polishing article with uniform height abrasive particles

Abstract

A method of making an abrasive article including the step of preparing a master plate with a surface having a shape. Depositing a spacer layer on the surface of the master plate. A slurry containing an adhesive and abrasive particles is deposited on a surface of the spacer layer. A substrate embedded with abrasive particles having a surface generally complementary to the surface of the master plate is fabricated. A spacer layer is formed by various method controlled the height of the protruded abrasive particles. The master plate and the spacer layer are separated from the substrate to expose abrasive particle protruding a substantially uniform height. An abrasive article made according to this method is also disclosed.

1 . A method of making an abrasive article comprising:
 providing a master plate with a surface having a shape;   distributing a slurry containing a carrier fluid and abrasive particles on the master plate;   evaporating the carrier fluid from the slurry;   depositing a seed layer onto the master plate and the abrasive particles;   depositing a substrate layer on to the seed layer forming a first surface charged with abrasive particles and a second surface including the substrate material;   releasing the substrate containing the abrasive particles from the master plate; and   etching the first surface of the substrate layer to reveal the abrasive particles.   
     
     
         2 . The method of  claim 1  further comprising preparing the master plate and the substrate with one of flat, concave, convex, curvilinear, spherical, or grooved surfaces. 
     
     
         3 . The method of  claim 1  further comprising machining features into the surface of the master plate. 
     
     
         4 . The method of  claim 1  further comprising depositing a release layer onto the surface of the master plate. 
     
     
         5 . The method of  claim 4  wherein depositing the release layer further comprises one of spraying, coating, or printing the release layer on the surface of the master plate. 
     
     
         6 . The method of  claim 1  wherein evaporating the carrier fluid from the slurry includes treating the carrier fluid with alcohol, water or solvent. 
     
     
         7 . The method of  claim 1  wherein the substrate is a metal. 
     
     
         8 . An abrasive article formed by the method of  claim 1  comprising a plurality of abrasive particles embedded in a substrate and protruding to a substantially uniform height above the first surface. 
     
     
         9 . A method of making an abrasive article comprising:
 preparing a master plate with a surface having a shape;   distributing a slurry containing a carrier fluid and abrasive particles on a surface of the spacer layer;   hardening the carrier fluid of the slurry;   depositing a seed layer onto the hardened carrier fluid and the abrasive particles on the master plate;   depositing a substrate layer on to the seed layer, the abrasive particles, the hardened carrier fluid and the substrate layer forming an element including a first surface charged with abrasive particles and a second surface containing the substrate material and substantially free of abrasive particles;   releasing the element containing the abrasive particles from the master plate; and   etching the first surface of the element to reveal the abrasive particles.   
     
     
         10 . The method of  claim 9  wherein preparing the master plate and the substrate with a surface having a shape includes a shape with at least one of flat surface, a concave surface, a convex surface, a curvilinear surface, a spherical surface, or a grooved surface. 
     
     
         11 . The method of  claim 9  comprising machining features into the surface of the master plate. 
     
     
         12 . The method of  claim 9  further comprising depositing a release layer which includes spraying, depositing, coating, or printing a release layer on the surface of the master plate 
     
     
         13 . The method of  claim 8  wherein the substrate includes a low stress electrodeposited metal. 
     
     
         14 . An abrasive article of  claim 9  comprising a plurality of abrasive particles embedded in a substrate and protruding to a substantially uniform height to form a reference surface. 
     
     
         15 . The abrasive article of  claim 14  wherein the abrasive particles comprise diamonds with a primary diameter of less than about 5 microns. 
     
     
         16 . The abrasive article of  claim 14  wherein the substrate and the reference surface comprise one of a flat, concave, convex, curvilinear, spherical, or grooved surface. 
     
     
         17 . A method of lapping a surface of a work piece comprising:
 positioning an abrasive article made according to the method of  claim 1  opposite the surface of the work piece;   applying a lubricant to the abrasive article; and   engaging the surface of the work piece with the abrasive particles and moving the work piece relative to the abrasive article to form a substantially uniform hydrostatic film of lubricant between the surface of the work piece and the reference surface on the abrasive article.   
     
     
         18 . The method of  claim 17  comprising t preparing the master plate and the substrate with one of flat, concave, convex, curvilinear, spherical, or grooved surfaces. 
     
     
         19 . The method of  claim 17  wherein the work piece comprises one of machined metal parts, silicon wafers, slider bars for hard disk drives. 
     
     
         20 . A method of lapping a surface of a work piece comprising:
 positioning an abrasive article made according to the method of  claim 8  opposite the surface of the work piece;   applying a lubricant to the abrasive article; and   engaging the surface of the work piece with the abrasive particles and moving the work piece relative to the abrasive article to form a substantially uniform hydrostatic film of lubricant between the surface of the work piece and the reference surface on the abrasive article.