Photolithographic Patterning of Polymeric Materials

Abstract

The invention comprises methods for the photolithographic patterning of features in a photo-curable polymer composition coated onto a plastic substrate. In one embodiment of this invention, the plastic substrate is coated with a reflective film such as a metallic barrier. In another embodiment, the plastic substrate is coated or co-extruded with a polymer barrier layer containing an additive that absorbs the photo-curing radiation. In yet another embodiment the plastic substrate contains an intrinsic additive that absorbs the photo-curing radiation. Combinations of these embodiments are also within the scope of this invention. The methods of the present invention may be advantageously applied to the fabrication of optical waveguides comprising a photo-curable polymer supported on a plastic substrate, but are applicable to the fabrication of any device or object comprising a photo-curable polymer supported on a plastic substrate.

1 - 32 . (canceled) 
     
     
         33 . An optical device comprising:
 a plastic substrate;   an intermediate layer opaque to UV radiation; and   a patterned UV-cured polymer deposited thereon, wherein the device is free from gap filling between cured polymer regions or undesirable roughness at the boundary of said cured polymer regions.   
     
     
         34 . An optical device according to  claim 33  wherein said intermediate layer comprises a metal film. 
     
     
         35 . An optical device according to  claim 33  wherein said intermediate layer comprises a polymer with an additive that absorbs said UV radiation. 
     
     
         36 . An optical device according to  claim 35  wherein said intermediate layer is co-extruded with said plastic substrate. 
     
     
         37 . An optical device according to  claim 33  wherein said plastic substrate is chosen from the group consisting of polyethylene terephthalate and a polycarbonate. 
     
     
         38 . An optical device according to  claim 33  wherein the UV-cured polymer comprises a siloxane polymer. 
     
     
         39 . A waveguide-based optical touch screen sensor comprising the optical device according to  claim 33 . 
     
     
         40 . An optical device comprising:
 a plastic substrate; and   a patterned radiation-cured polymer deposited thereon;   wherein the plastic substrate contains an additive that absorbs radiation used to cure the polymer, and wherein the device is free from gap filling between cured polymer regions or undesirable roughness at the boundary of said cured polymer regions.   
     
     
         41 . An optical device according to  claim 40 , wherein the radiation is UV radiation. 
     
     
         42 . An optical device according to  claim 40  wherein said plastic substrate is chosen from the group consisting of: polyethylene terephthalate containing an additive that absorbs radiation used to cure the polymer; and a polycarbonate containing an additive that absorbs radiation used to cure the polymer. 
     
     
         43 . An optical device according to  claim 40  wherein the radiation-cured polymer comprises a siloxane polymer. 
     
     
         44 . A waveguide-based optical touch screen sensor comprising the optical device according to  claim 40 . 
     
     
         45 . An optical device comprising:
 a plastic substrate;   an intermediate layer opaque to UV radiation formed by co-extrusion with said plastic substrate; and   a patterned UV-cured polymer deposited thereon, wherein the device is free from gap filling between cured polymer regions or undesirable roughness at the boundary of said cured polymer regions.   
     
     
         46 . An optical device according to  claim 45  wherein said plastic substrate is chosen from the group consisting of polyethylene terephthalate and a polycarbonate. 
     
     
         47 . An optical device according to  claim 45  wherein the UV-cured polymer comprises a siloxane polymer. 
     
     
         48 . A waveguide-based optical touch screen sensor comprising the optical device according to  claim 45 . 
     
     
         49 . An optical device comprising a plastic substrate comprising a UV absorbing additive and having a patterned UV-cured polymer deposited thereon, wherein the device is free from gap filling between cured polymer regions or undesirable roughness at the boundary of said cured polymer regions. 
     
     
         50 . An optical device according to  claim 49  wherein said plastic substrate is chosen from the group consisting of: polyethylene terephthalate comprising a UV absorbing additive; and a polycarbonate comprising a UV absorbing additive. 
     
     
         51 . An optical device according to  claim 49  wherein the UV-cured polymer comprises a siloxane polymer. 
     
     
         52 . A waveguide-based optical touch screen sensor comprising the optical device according to  claim 49 .