Method And Apparatus To Apply Surface Release Coating For Imprint Mold

Abstract

A surface coating apparatus for preparing a work piece having a working surface for imprint lithography, wherein the work piece comprises either a mold or a substrate. The apparatus includes a vacuum chamber and a generator to produce chemical reaction radicals for cleaning the working surface. The generator may be located inside said vacuum chamber and connected to an inner surface of said vacuum chamber or external to the vacuum chamber and connected thereto via suitable couplings. A fixture within the vacuum chamber is configured to hold the work piece with the working surface accessible by the chemical reaction radicals, and a means is provided for depositing a molecular layer of surfactant on the working surface inside the vacuum chamber.

1 . A surface coating apparatus for preparing a work piece having a working surface for imprint lithography, wherein the work piece comprises either a mold or a substrate, comprising:
 a vacuum chamber;   a generator to produce chemical reaction radicals for cleaning the working surface, said generator located inside said vacuum chamber and connected to an inner surface of said vacuum chamber;   a fixture within said vacuum chamber configured to hold the work piece with the working surface accessible by said chemical reaction radicals, said fixture connected to said inner surface of said vacuum chamber; and,   a means for depositing a molecular layer of surfactant on said working surface inside said vacuum chamber.   
     
     
         2 . The surface coating apparatus of  claim 1  wherein said means comprises a vapor generator configured to produce a molecular vapor of surfactant and a means for deliver said molecular vapor of surfactant to said working surface. 
     
     
         3 . The surface coating apparatus of  claim 2  wherein said fixture includes a heater to heat said working surface. 
     
     
         4 . The surface coating apparatus of  claim 2  further comprising a means to increase a temperature of said working surface. 
     
     
         5 . The surface coating apparatus of  claim 2  further comprising a lamp to radiate light upon the work piece to increase a temperature of said working surface. 
     
     
         6 . The surface coating apparatus of  claim 2  wherein said vapor generator comprises:
 a reservoir to contain said surfactant, said reservoir comprising an internal volume to contain said surfactant and a port to dispense said molecular vapor of surfactant from said reservoir; and 
 a heater to increase a temperature of said surfactant, wherein said heater is either connected to said reservoir or embedded inside said internal volume. 
 
     
     
         7 . The surface coating apparatus of  claim 2  wherein said vapor generator comprises:
 a reservoir to contain said surfactant, said reservoir comprising an internal volume to contain said surfactant and a port to dispense said molecular vapor of surfactant from said reservoir; and 
 a bubbler to flow inert gas through said surfactant within said internal volume. 
 
     
     
         8 . The surface coating apparatus of  claim 7  wherein said vapor generator further comprises a heater to increase a temperature of said surfactant, wherein said heater is either connected to said reservoir or embedded inside said internal volume. 
     
     
         9 . The surface coating apparatus of  claim 2  wherein said vapor generator comprises:
 a reservoir defining an internal volume; 
 a port to dispense said molecular vapor of surfactant from said reservoir; and, 
 a dropper to deliver a plurality of droplets of surfactant into said internal volume of said reservoir. 
 
     
     
         10 . The surface coating apparatus of  claim 9  further including a controller operatively connected to said dropper, said controller configured to precisely control a volume of each droplet and to count droplets delivered by said dropper. 
     
     
         11 . The surface coating apparatus of  claim 1  further comprising a means for controlling moisture partial pressure inside said vacuum chamber. 
     
     
         12 . The surface coating apparatus of  claim 1  wherein said generator is a plasma generation electrode. 
     
     
         13 . The surface coating apparatus of  claim 1  wherein said generator is an ozone generation ultraviolet lamp. 
     
     
         14 . The surface coating apparatus of  claim 13  wherein said fixture includes a heater to heat said working surface. 
     
     
         15 . The surface coating apparatus of  claim 14  wherein said means comprises a vapor generator to produce a molecular vapor of surfactant and a means to deliver said molecular vapor of surfactant to said working surface. 
     
     
         16 . A surface coating apparatus for preparing a work piece having a working surface for imprint lithography, wherein the work piece comprises either a mold or a substrate, comprising:
 a vacuum chamber;   a generator to produce chemical reaction radicals for cleaning said working surface, said generator disposed outside of said vacuum chamber and connected to said vacuum chamber through a gas passing line for feeding said chemical reaction radicals into said vacuum chamber;   a fixture to hold the work piece with said working surface accessible by said chemical reaction radicals within said vacuum chamber, said fixture connected to an inner surface of said vacuum chamber; and,   a means for depositing a molecular layer of surfactant on said working surface inside said vacuum chamber.   
     
     
         17 . The surface coating apparatus of  claim 16  further comprising a means to increase a temperature of said working surface. 
     
     
         18 . An surface cleaning and coating tool comprising:
 a base;   a vacuum chamber fixed to said base, said vacuum chamber having an opening on a front side for loading and unloading;   a sliding guidance system connected to either an outer surface of said chamber or to said base;   a door panel to seal said opening, said door panel connected to said sliding guidance system, said sliding guidance system configured to engage said door panel in contact with said front side in a closed position;   a seal surrounding said opening between said door panel and said front side when said door panel is in contact with said front side;   a chuck with a heating means fixed to said door panel, said chuck inside said vacuum chamber when said door panel is at said closed position;   wherein said sliding guidance systems is configured to displace said door panel away from said front side at an substantial extent for loading or unloading said chuck;   an ozone generation UV lamp installed inside said vacuum chamber, said UV lamp adjacent to said chuck when said door panel is at said closed position; and   a vapor generator coupled to said base comprising a vapor generation reservoir and a vapor discharge port, said vapor discharge port coupled to said vacuum chamber through a vapor passing line with ON/OFF control.   
     
     
         19 . The surface cleaning and coating tool of  claim 18  further comprising:
 a pneumatic line system connected to said chamber for drawing a vacuum within said chamber and for discharging gas into said vacuum chamber; and 
 an electronic control system configured to operate said UV lamp, said heating means of said chuck, said vapor passing line, and said pneumatic line system. 
 
     
     
         20 . The surface cleaning and coating tool of  claim 19  further comprising a user interface mechanically connected to said base and operatively connected to said electronic control system.