Contacting device

Abstract

The present invention relates to a device for contacting a wafer during submersion in a liquid. The device comprises a main body fixed to a transportation device; an electrical contact for contacting the wafer and a pressure element for pressing the electrical contact towards the wafer.

1 . Transporting device for transporting wafers through a liquid, where the transportation device is provided for continuously receiving wafers at a first end and transporting them substantially horizontally to a second end before releasing the wafers, where the transporting device comprises at least two holding devices for holding and electrically contacting each wafer between the at least two contacting devices during the transportation through the liquid, where each holding device comprises:
 a main body comprising a substantially wedge-shaped opening for receiving an end of each wafer;   an electrical contact for contacting the end of each wafer, where the electrical contact is connected to a power supply;   a pressure element movably connected to the main body, for pressing the electrical contact towards the end of each wafer.   
     
     
         2 . Transportation device according to  claim 1 , wherein the main body comprises one substantially wedge-shaped opening on each side. 
     
     
         3 . Transportation device according to  claim 1  or  2 , where the electrical contact is provided on the pressure element. 
     
     
         4 . Transportation device according to  claim 1 , where the pressure element is provided for pressing each wafer towards an upper surface of the substantially wedge-shaped opening. 
     
     
         5 . Transportation device according to  claim 4 , where the pressure element is substantially T-shaped, comprising a substantially vertical central member and a substantially horizontal cross member, where the substantially horizontal cross member is provided for pressing each wafer towards the upper surface of the substantially wedge-shaped opening in a direction parallel to the substantially vertical central member. 
     
     
         6 . Transportation device according to  claim 5 , where the substantially vertical central member is provided movable in a channel through the main body. 
     
     
         7 . Transportation device according to  claim 4 , where the pressure element is pivotably connected to the main body by means of a pin inserted in the opening of the main body. 
     
     
         8 . Transportation device according to  claim 1 , where the electrical contact is connected to the power supply by means of a bus connector for connection to a bus bar. 
     
     
         9 . Transportation device according to  claim 8 , where the electrical contact is connected to the bus connector by means of an electrical conductor provided in channels through the main body. 
     
     
         10 . Transportation device according to  claim 3 , where the electrical contact is upwardly protruding. 
     
     
         11 . Transportation device according to  claim 1 , where the pressure element is provided in an opening of the main body. 
     
     
         12 . Transportation device according to  claim 1 , where the pressure element comprises floating elements for providing the movement of the pressure element in relation to the main body due to buoyancy forces. 
     
     
         13 . Transportation device according to  claim 1 , where the pressure element comprises a magnet for providing the movement of the pressure element in relation to the main body due to magnetic forces. 
     
     
         14 . Device according to  claim 1 , where the pressure element is connected to poles movably provided in channels in the main body. 
     
     
         15 . Device according to  claim 14 , where bus connectors having a larger diameter than the poles are connected in the end of the poles, and where the movement of the pressure element is caused by inclining bus bars guiding the bus connectors. 
     
     
         16 . Transportation device according to  claim 2 , where the pressure element is provided for pressing each wafer towards an upper surface of the substantially wedge-shaped opening. 
     
     
         17 . Transportation device according to  claim 3 , where the pressure element is provided for pressing each wafer towards an upper surface of the substantially wedge-shaped opening.