Systems for and methods of manufacturing micro-structures

Abstract

Methods of and devices for making pores, nozzles, and slits are described. In some embodiments, the methods create pattern in the molded substrate by controlling the location and direction of a controlled flow stream through molding plates. The molding plate contains a predefined pattern that is able to be used to create the desired pattern in the molding plate.

1 . A method of manufacturing a material comprising:
 a) passing one or more flow streams through a first aperture on a first surface of a molding plate;   b) applying a molding material to a second surface of the molding plate; and   c) forming one or more apertures on the molding material using the one or more flow streams.   
     
     
         2 . The method of  claim 1 , wherein the one or more flow streams comprise a gas stream, a liquid stream, dispersion of particles, an electromagnetic field or a combination thereof. 
     
     
         3 . The method of  claim 1 , wherein the one or more apertures on the molding material comprise one or more through holes. 
     
     
         4 . The method of  claim 1 , wherein the molding material is in a fluidic form, in a powder form, in a gel form, in an emulsion form, or a combination thereof. 
     
     
         5 . The method of  claim 1 , wherein the molding material comprises a polymeric material. 
     
     
         6 . The method of  claim 5 , wherein the polymeric material comprises epoxy, silicone, urethane, polysulfone, nylone, polycarbonate, or a combination thereof. 
     
     
         7 . The method of  claim 1 , wherein the molding material comprises a piezo-material, an electrically conductive material, an electro-active material, a magnetic material, a thermally conductive material, a photo sensitive material, an insulation material or a combination thereof 
     
     
         8 . The method of  claim 1  further comprising forming a pattern on the molding material using a pattern on the molding plate. 
     
     
         9 . The method of  claim 8 , wherein the pattern on the molding material is geometrically complimentary to the pattern on the molding plate. 
     
     
         10 . The method of  claim 8 , wherein forming the pattern on the molding material using a pattern on the molding plate is independent from forming the one or more apertures on the molding material using the one or more flow streams. 
     
     
         11 . The method of  claim 1  further comprising solidifying the molding material. 
     
     
         12 . The method of  claim 1  further comprising controlling a size, a location, a shape, or a combination thereof of the one or more apertures on the molding material using the one or more flow streams. 
     
     
         13 . The method of  claim 1  further comprising adjusting a size, a location, a shape, or a combination thereof of the one or more apertures on the molding material by applying an external stimulus. 
     
     
         14 . The method of  claim 1 , wherein the material comprises a micromembrane, a multi-layered nozzle, a cooling device, a microelecrtric circuit, a filtration device, or a combination thereof. 
     
     
         15 . A method of manufacturing a material comprising:
 a) forming a first layer of the material containing a first aperture using a first flow stream passing through the first aperture; and   b) forming a second layer of the material containing a second aperture using a second flow stream passing through the second aperture; wherein the first aperture couples with the second aperture forming a through hole on the first and the second layer.   
     
     
         16 . The method of  claim 15 , wherein the second flow stream comprises the first flow stream. 
     
     
         17 . The method of  claim 15 , wherein the second aperture has a diameter larger than a diameter of the first aperture. 
     
     
         18 . The method of  claim 15  further comprising controlling a size of the first aperture by adjusting a flow rate of the first flow stream. 
     
     
         19 . The method of  claim 15  further comprising adjusting a size, a location, a shape, or a combination thereof of the first aperture by applying an external stimulus. 
     
     
         20 . The method of  claim 15  further comprising forming a third aperture on the first layer of the material using a third flow stream passing through the third aperture. 
     
     
         21 . The method of  claim 20 , wherein the second flow stream comprises the first flow stream and the third flow stream. 
     
     
         22 . The method of  claim 15 , wherein the first aperture has a diameter in a range of 1 nanometer to 100 micrometers. 
     
     
         23 . The method of  claim 15 , wherein the first aperture has a diameter smaller than 100 micrometer. 
     
     
         24 . The method of  claim 15 , wherein the first aperture aligns with the second aperture. 
     
     
         25 . An apparatus for fabricating a material comprising:
 a) a molding plate comprising a flow stream aperture;   b) a flow stream channel coupling with the flow stream aperture; and   c) a flow stream controller configured to provide a continuous flow stream through the flow stream channel to form an aperture on a molding material before a solidification reaction of the molding material.   
     
     
         26 . The apparatus of  claim 25 , wherein the molding plate comprises a molding pattern capable of forming a complementary pattern on the molding material. 
     
     
         27 . The apparatus of  claim 25 , wherein the continuous flow stream has a constant pressure flow. 
     
     
         28 . The apparatus of  claim 25 , wherein the continuous flow stream comprises a gas stream, a liquid stream, dispersion of particles, an electromagnetic field, or a combination thereof. 
     
     
         29 . The apparatus of  claim 25 , wherein a size of the aperture is controllable by the continuous flow stream. 
     
     
         30 . The apparatus of  claim 25 , wherein a size of the aperture is dependent on a flow rate of the continuous flow stream. 
     
     
         31 . The apparatus of  claim 25 , wherein the aperture comprises a through hole.