silicon heating furnace

Abstract

The silicon heating furnace is constructed by combining two semi-cylindrical furnaces. Each of the semi-cylindrical furnaces has a semi-cylindrical housing, an insulator, heaters, and an isothermal material. Radial direction separation preventing members are arranged in inner side of both ends of circumferential direction of the housing to prevent a separation of the insulator to radial direction. End face of circumferential direction covers are fixed on the radial direction separation preventing members to cover the end faces of circumferential direction of the insulator. Cooling pipes for end faces of circumferential direction through which cooling water passed are arranged between the end faces of circumferential direction of the insulator and the end face of circumferential direction covers.

1 - 5 . (canceled) 
     
     
         6 . A silicon heating furnace having a heating chamber for containing raw material silicon to be heated, comprising:
 two semi-cylindrical furnaces constructing the cylindrical silicon heating furnace by combining each other;   each of the semi-cylindrical furnaces having:   a semi-cylindrical housing;   a semi-cylindrical insulator arranged in inner side of the housing;   a heater arranged in inner side of the insulator;   a semi-cylindrical isothermal material made of heat-resistant glass, and arranged in inner side of the heater and heated by the heater, and constituting an inner wall of the heating chamber;   radial direction separation preventing members arranged in inner side of both ends of circumferential direction of the housing, and preventing a separation of the insulator to radial direction by contacting at end faces of circumferential direction of the insulator;   end face of circumferential direction covers fixed on the radial direction separation preventing members, and covering the end faces of circumferential direction of the insulator; and   cooling pipes for end faces of circumferential direction through which cooling water passed arranged between the end faces of circumferential direction of the insulator and the end face of circumferential direction covers.   
     
     
         7 . The silicon heating furnace according to  claim 6 , wherein
 both of the end face of circumferential direction covers and the cooling pipes for the end face of circumferential direction are made of titanium and welded each other.   
     
     
         8 . The silicon heating furnace according to  claim 6 , further comprising
 seals made of string of quartz fibers arranged toward axial direction between an inner surface of the end of circumferential direction of the insulator and an outer surface of the end of circumferential direction of the isothermal material.   
     
     
         9 . The silicon heating furnace according to  claim 6 , wherein
 each of the two semi-cylindrical furnaces comprises
 axial direction separation preventing members arranged at both ends of axial direction of the housing, preventing the insulator from being separated toward the axial direction by contacting to both end faces of axial direction; 
 supports having fixing plates fitted to the axial direction separation preventing members and supporting plate supporting the end of axial direction of the isothermal material; 
 side panel cooling pipes through which cooling water pass; 
 side wall members made of heat-resistant glass, covering the end faces of axial direction and constituting inner walls of the heating chamber. 
   
     
     
         10 . The silicon heating furnace according to  claim 7 , wherein
 each of the two semi-cylindrical furnaces comprises
 axial direction separation preventing members arranged at both ends of axial direction of the housing, preventing the insulator from being separated toward the axial direction by contacting to both end faces of axial direction; 
 supports having fixing plates fitted to the axial direction separation preventing members and supporting plate supporting the end of axial direction of the isothermal material; 
 side panel cooling pipes through which cooling water pass; 
 side wall members made of heat-resistant glass, covering the end faces of axial direction and constituting inner walls of the heating chamber. 
   
     
     
         11 . The silicon heating furnace according to  claim 8 , wherein
 each of the two semi-cylindrical furnaces comprises
 axial direction separation preventing members arranged at both ends of axial direction of the housing, preventing the insulator from being separated toward the axial direction by contacting to both end faces of axial direction; 
 supports having fixing plates fitted to the axial direction separation preventing members and supporting plate supporting the end of axial direction of the isothermal material; 
 side panel cooling pipes through which cooling water pass; 
 side wall members made of heat-resistant glass, covering the end faces of axial direction and constituting inner walls of the heating chamber. 
   
     
     
         12 . The silicon heating furnace according to  claim 9 , wherein
 the supports and the side panel cooling pipes are made of titanium and welded each other.   
     
     
         13 . The silicon heating furnace according to  claim 10 , wherein
 the supports and the side panel cooling pipes are made of titanium and welded each other.   
     
     
         14 . The silicon heating furnace according to  claim 11 , wherein
 the supports and the side panel cooling pipes are made of titanium and welded each other.