Surface treatment apparatus

Abstract

To stabilize a gas flow at an opening which is provided in a treatment housing for surface treatment, and through which an object is carried in or out. An object 9 is carried through a carry-in opening 13 into a treatment housing 10 along a conveying direction and placed in a treatment space 19. A treatment gas is supplied by a supply system 30 into the treatment space 19 and the object 9 is subjected to surface treatment. The object 9 is carried out through a carry-out opening 14. An exhaust system 40 discharges gas from the treatment housing 10. Each of the openings 13 and 14 is defined by a pair of flow-rectifying faces 17 and 18, which face each other with an interval D therebetween in a direction perpendicular to the conveying direction. A depth L of the openings 13 and 14 along the conveying direction is twice or more, and more preferably six or more, of the interval D.

1 . A surface treatment apparatus for causing a treatment gas to contact a surface of an object and treating the surface, the apparatus comprising:
 a treatment housing including an opening through which the object is carried in or out in a conveying direction and a treatment space in which the surface treatment is performed;   a supply system for supplying the treatment gas to the treatment space; and   an exhaust system for discharging gas from an interior of the treatment housing, wherein   the opening of the treatment housing is defined by a pair of flow-rectifying faces which face each other, with an interval therebetween, in a direction perpendicular to the conveying direction, and a depth of the opening along the conveying direction is twice or more of the interval.   
     
     
         2 . The surface treatment apparatus according to  claim 1 , wherein the depth of the opening is six times or more of the interval.