Material supply system and method

Abstract

A system and a method for feeding a solid into a solid deposition system is described. Solid contained in a hopper is directed into a vibratory bowl. The frequency of the vibrations of the vibratory bowl can be modulated by a feedback system. The solid can then be entrained in a carrier gas which can flow to a distributor for deposition on a substrate.

1 . A vibratory bowl, comprising: a supply reservoir, a divider, and a ramp having a first end adjacent to the supply reservoir and a second end adjacent to the divider. 
     
     
         2 . The vibratory bowl of  claim 1 , wherein the ramp is a spiral ramp. 
     
     
         3 . The vibratory bowl of  claim 1 , wherein the divider divides the second end of ramp into a return side and an exit side. 
     
     
         4 . The vibratory bowl of  claim 3 , further comprising a return pathway having a first end adjacent to the return side of the divider and a second end adjacent to the supply reservoir. 
     
     
         5 . The vibratory bowl of  claim 3 , further comprising an exit pathway having a first end adjacent to the exit side of the divider and a second end leading to the exit of the vibratory bowl. 
     
     
         6 . The vibratory bowl of  claim 1 , wherein the ramp has a slope of 1° to 15°. 
     
     
         7 . The vibratory bowl of  claim 6 , wherein the ramp has a slope of 2° to 10°. 
     
     
         8 . A method for delivering a solid, comprising: directing a solid from a supply reservoir up a ramp to a divider, and separating the solid into a return portion and an output portion. 
     
     
         9 . The method of  claim 8 , wherein the supply reservoir is a portion of a vibratory bowl. 
     
     
         10 . The method of  claim 8 , further comprising moving the solid from a reserve into the supply reservoir. 
     
     
         11 . The method of  claim 8 , further comprising returning the return portion to the supply reservoir via a return pathway. 
     
     
         12 . The method of  claim 8 , wherein the output portion of the solid exits the ramp via an exit pathway. 
     
     
         13 . The method of  claim 8 , wherein the ramp is a spiral ramp. 
     
     
         14 . The method of  claim 12 , wherein the solid exits the ramp at a rate of about 0.1 to 50 grams/minute. 
     
     
         15 . The method of  claim 14 , wherein the solid exits the ramp at a rate of about 0.25 grams/minute. 
     
     
         16 . The method of  claim 12 , further comprising entraining the output portion of the solid in a carrier gas. 
     
     
         17 . The method of  claim 16 , wherein the carrier gas has a flow rate of about 0.2 slpm to about 3000 slpm. 
     
     
         18 . The method of  claim 16 , further comprising flowing a carrier gas at the exit pathway. 
     
     
         19 . The method of  claim 16 , further comprising directing the solid entrained in the carrier gas toward a substrate. 
     
     
         20 . The method of  claim 8 , further comprising reducing the pressure inside the supply reservoir. 
     
     
         21 - 42 . (canceled) 
     
     
         43 . A loading system, comprising: a powder supply; a vacuum system; a fill port configured to deliver powder into the vacuum system; a vibratory feeder; and a load hopper connected to the vacuum system. 
     
     
         44 . The loading system of  claim 43  wherein the vibratory feeder comprises: a vibratory bowl, comprising: a supply reservoir, a divider, and a ramp having a first end adjacent to the supply reservoir and a second end adjacent to the divider; a hopper configured to contain a solid; an inlet having a first end adjacent to the hopper and a second end adjacent to the vibratory bowl; and an outlet having a first end adjacent to the exit pathway of the vibratory bowl and a second end leading to an exit of the vibratory feeder. 
     
     
         45 . A method of loading a sealed solid delivery system under reduced pressure, comprising the steps of: detecting a low level of a solid in a load hopper connected by a first valve to the sealed solid delivery system; closing the first valve; closing a second valve between the load hopper and a vacuum system; opening a third valve located between the load hopper and a solid supply; opening a fourth valve configured to vent the load hopper; transferring solid from the solid supply to the load hopper; closing the third and fourth valves; and opening the first and second valves.