Operation voltage supply apparatus

Abstract

The voltage application probe and the voltage measurement probe are connected to the voltage application pad and the voltage measurement pad of the semiconductor device. The voltage application pad and the voltage measurement pad are connected by the conductor, measuring the voltage applied to the voltage application pad through the voltage measurement probe. The voltage compensation circuit in the voltage development device operates to make the voltage applied to the voltage application pad equal to the set voltage for the voltage development device. Even when the resistance between the voltage application probe and the voltage application pad increases, the accurate setting voltage is applied to the voltage application pad.

1 . An operation voltage supply apparatus for using a test of a semiconductor artifact having a plurality of pads including a voltage application pad and a voltage measurement pad, comprising:
 a variable voltage source connected to a ground potential for outputting a first voltage;   a first operational amplifier connected to the variable voltage source for receiving the first voltage and outputting a second voltage;   a second operational amplifier connected to the first operational amplifier for outputting a third voltage to the first operational amplifier;   a voltage application probe to be connected to the voltage application pad for applying the second voltage to the voltage application pad; and   a voltage measurement probe to be connected to the voltage measurement pad for receiving a fourth voltage from the voltage measurement pad and applying the fourth voltage to the second operational amplifier.   
     
     
         2 . The operation voltage supply apparatus according to  claim 1 , wherein said voltage application probe is electrically isolated from the voltage measurement probe. 
     
     
         3 . The operation voltage supply apparatus according to  claim 1 , wherein said voltage application probe is located apart from the voltage measurement probe. 
     
     
         4 . The operation voltage supply apparatus according to  claim 1 , wherein said voltage application pad is a voltage source pad of the semiconductor artifact. 
     
     
         5 . The operation voltage supply apparatus according to  claim 1 , wherein said voltage application probe has one end electrically connected to an input terminal and another end electrically connected to the voltage application pad, said one end being electrically connected to an output terminal, said another end being electrically connected to the voltage measurement pad.