Method and apparatus for peeling protective tape

Abstract

A method of peeling a protective tape, includes the steps of mounting a wafer on a stage, the wafer having the protective tape adhered thereto so that the protective tape overlaps only a portion of a notch of the wafer, attaching a peeling adhesive tape to the protective tape, projecting a lift pin from the stage so that the portion of the protective tape which overlaps the notch is raised by a top surface of the lift pin, and with the protective tape raised by the lift pin, pulling the peeling adhesive tape so as to peel the protective tape from the wafer. The top surface of the lift pin has a shape that allows the top surface to raise the portion of the protective tape which overlaps the notch.

1 . A method of peeling a protective tape, comprising the steps of:
 mounting a wafer on a stage, said wafer having said protective tape adhered thereto so that said protective tape overlaps only a portion of a notch of said wafer;   attaching a peeling adhesive tape to said protective tape;   projecting a lift pin from said stage so that the portion of said protective tape which overlaps said notch is raised by a top surface of said lift pin; and   with said protective tape raised by said lift pin, pulling said peeling adhesive tape so as to peel said protective tape from said wafer;   wherein said top surface of said lift pin has a shape that allows said top surface to raise said portion of said protective tape which overlaps said notch.   
     
     
         2 . The method according to  claim 1 , wherein said top surface of said lift pin has a width equal to or less than the minimum width of said notch. 
     
     
         3 . A method of peeling a protective tape, comprising the steps of:
 mounting a wafer having said protective tape adhered thereto on a stage, said protective tape having a first portion covering a notch of said wafer, said protective tape also having a second portion extending outwardly from a peripheral edge of said wafer;   attaching a peeling adhesive tape to said protective tape;   projecting a lift pin from said stage so that said first and second portions are raised by a top surface of said lift pin; and   with said protective tape raised by said lift pin, pulling said peeling adhesive tape so as to peel said protective tape from said wafer;   wherein said top surface of said lift pin has a narrow portion and a wide portion so that said first portion is raised by said narrow portion and said second portion is raised by said wide portion.   
     
     
         4 . A protective tape peeling apparatus comprising:
 a stage on which a wafer is mounted, said wafer having a protective tape adhered thereto so that said protective tape overlaps only a portion of a notch of said wafer;   means for attaching a peeling adhesive tape to said protective tape;   means for peeling said peeling adhesive tape; and   a lift pin projectably mounted in said stage;   wherein a top surface of said lift pin has a shape that allows said top surface to raise the portion of said protective tape which overlaps said notch.   
     
     
         5 . The protective tape peeling apparatus according to  claim 4 , wherein said top surface of said lift pin has a width equal to or less than the minimum width of said notch. 
     
     
         6 . A protective tape peeling apparatus comprising:
 a stage on which a wafer having a protective tape adhered thereto is mounted, said protective tape having a first portion covering a notch of said wafer, said protective tape also having a second portion extending outwardly from a peripheral edge of said wafer;   means for attaching a peeling adhesive tape to said protective tape;   means for peeling said peeling adhesive tape; and   a lift pin projectably mounted in said stage;   wherein a top surface of said lift pin has a narrow portion and a wide portion so that said first portion can be raised by said narrow portion and said second portion can be raised by said wide portion.