Ignition apparatus for arc sources

Abstract

The present invention relates to an ignition device for igniting a high-current discharge of an electrical arc evaporator in a vacuum coating system. Ignition is performed by means of mechanically closing and opening a contact between the cathode and the anode. Contact is established by means of an ignition finger that can move on a forced path. On account of the forced path, the ignition finger can be moved by means of a simple mechanical drive to a park position, which is protected against coating, and said ignition finger can also be used to ignite a second target.

1 . Arc source with a first target and a second target, wherein the first and second target lie essentially in a first plane and an ignition device for igniting a spark on the first target and on the second target is provided, wherein the ignition device comprises a trigger finger mounted movably in such a manner that means for moving the fingertip of the trigger finger to the surface of the first target and to the surface of the second target are provided, characterized in that the means for executing the movement include a drive from the linear drive group or rotation drive group and the drive works together with guiding means in such a manner that the fingertip, when driven, moves on a forced path that touches and/or crosses both targets. 
     
     
         2 . Arc source according to  claim 1 , characterized in that the means for executing the movement comprise an axle, whose axis is tilted on the first plane against the normal, and in that the ignition finger is positioned rigidly on the axle and in that the drive is a rotation drive that is capable of rotating the axle, and in that the forced path consists of an arc of circle ending respectively on the first and on the second target. 
     
     
         3 . Arc source according to  claim 1 , characterized in that the means for executing the movement include an axle and in that the ignition finger is placed on the axle in a movable manner such that the height of the fingertip, defined by the perpendicular projection of the fingertip on the axle, is variable and the guiding means are formed as a slotted element at a radial distance from the axle, wherein the drive is a rotation drive. 
     
     
         4 . Arc source according to  claim 1 , characterized in that the means for executing the movement include a rail, on which the trigger finger is mounted in a linearly movable manner and the guiding means are formed as a slotted element. 
     
     
         5 . Arc source according to  claim 4 , characterized in that the drive is a linear drive. 
     
     
         6 . Arc source according to  claim 4 , characterized in that the drive is a rotation drive with which the rail can be rotated. 
     
     
         7 . Device for the treatment of work-pieces under vacuum with an arc source according to one of the preceding claims. 
     
     
         8 . Device according to  claim 7 , being a coating system. 
     
     
         9 . Device according to  claim 8 , being a plasma etching system.