Vapor phase deposition system

Abstract

A showerhead for vacuum deposition of several species, said showerhead being divided into several quarters containing each at least one outlet for said species, each of said quarter defining the wall of an underlying compartment containing at least one species, wherein two adjacent compartments contains different species.

1 . A showerhead for vacuum deposition of several species, said showerhead being divided into several quarters containing each at least one outlet for said species, each of said quarter defining the wall of an underlying compartment containing at least one species, wherein two adjacent compartments contains different species. 
     
     
         2 . A showerhead according to  claim 1  wherein said outlets are distributed on at least one circle segment. 
     
     
         3 . A showerhead according to  claim 1  comprising three compartments containing the same species. 
     
     
         4 . A showerhead according to  claim 3  comprising six compartments containing the same species. 
     
     
         5 . A showerhead according to  claim 3  wherein the compartments containing the same species communicate with a same reservoir. 
     
     
         6 . A showerhead according to  claim 5  comprising furthermore a homogenizing compartment positioned between the quarters and said reservoir(s), to improve the pressure and flow uniformity of the gas species flowing into the quarters. 
     
     
         7 . A showerhead according to  claim 6  wherein said homogenizing compartment and said quarters are located in a way to ensure direct lateral introduction of the species into the quarters. 
     
     
         8 . A showerhead according to  claim 1  containing a central aperture. 
     
     
         9 . A showerhead quarter according to  claim 1  adapted to support an inner pressure ranging between 10 −6  and 10 mbar, and with outlets having a diameter less than 5 mm, such outlets being distributed on at least one annular array on the showerhead external surface, said surface being flat or having other regular geometries (i.e concave, convex, or with any angular and/or radial (recurrent) symmetries), having a thickness in proximity of the outlet positions of less than 1 mm.