Display apparatus and methods for manufacture thereof

Abstract

Display devices incorporating shutter-based light modulators are disclosed along with methods of manufacturing such devices. The methods are compatible with thin-film manufacturing processes known in the art and result in displays having lower power-consumption.

1 . A MEMS-based assembly for a spatial light modulator comprising:
 a substrate;   a light-modulating portion supported over the substrate, wherein the light-modulating portion comprises:
 a first portion, which, in all light-modulating portion positions, is oriented substantially horizontally with respect to the substrate; and 
 at least one second portion, which in all light-modulating portion positions, is at least partially transverse to first portion; and 
   an actuator for moving the light-modulating portion to selectively modulate light.   
     
     
         2 . The MEMS-based assembly of  claim 1 , wherein the at least second portion provides the light-modulating portion with an effective thickness with respect to bending normal to the first portion that is greater than the thickness of the first portion. 
     
     
         3 . The MEMS-based assembly of  claim 1 , wherein a front surface of the substrate defines a plane, and the at least second portion provides the light-modulating portion with an effective thickness with respect to bending out of the defined plane that is greater than the thickness of the first portion. 
     
     
         4 . The MEMS-based assembly of  claim 1 , wherein the at least one second portion extends along substantial portions of the periphery of the light-modulating portion. 
     
     
         5 . The MEMS-based assembly of  claim 1 , wherein the at least one second portion extends from the interior of the light-modulating portion. 
     
     
         6 . The MEMS-based assembly of  claim 1 , wherein the at least one second portion comprises a sidewall structure. 
     
     
         7 . The MEMS-based assembly of  claim 6 , wherein the sidewall structure comprises a first material and the first portion comprises a second, different material. 
     
     
         8 . The MEMS-based assembly of  claim 6 , wherein the sidewall structure comprises a first material and the first portion comprises the same first material. 
     
     
         9 . The MEMS-based assembly of  claim 6 , wherein the first and second portions of the light-modulating portion provide the light-modulating portion a three-dimensional aspect. 
     
     
         10 . The MEMS-based assembly of  claim 9 , wherein the three-dimensional aspect comprises a corrugation. 
     
     
         11 . The MEMS-based assembly of  claim 1 , wherein one of the first and second portions is less than 2 microns in thickness. 
     
     
         12 . The MEMS-based assembly of  claim 1 , wherein one of the first and second portions comprises an electrically conducting material. 
     
     
         13 . The MEMS-based assembly of  claim 12 , wherein the electrically conducting material comprises one of a metal or a semiconducting material. 
     
     
         14 . The MEMS-based assembly of  claim 12 , wherein the electrically conducting material comprises one of Al, Cu, Ag, Ni, Cr, Mo, W, Ti, Ta, Nb, Nd, Si, and Zr, or any combination thereof. 
     
     
         15 . The MEMS-based assembly of  claim 1 , wherein one of the first and second portions comprises a composite material. 
     
     
         16 . The MEMS-based assembly of  claim 1 , wherein one of the first and second portions comprises a multi-layer material. 
     
     
         17 . The MEMS-based assembly of  claim 16 , wherein the multi-layer material comprises one of Al 2 O 3 , Cr 2 O 3 , TiO 2 , HfO 2 , V 2 O 5 , Nb 2 O 5 , Ta 2 O 5 , SiO 2 , and Si 3 N 4 . 
     
     
         18 . The MEMS-based assembly of  claim 16 , wherein the multilayer material comprises a dielectric and the thickness of the dielectric at least partially inhibits light reflection by destructive interference. 
     
     
         19 . The MEMS-based assembly of  claim 1 , wherein one of the first and second portions comprises one of Titanium, Molydenum, Aluminum and Silicon or any combination thereof. 
     
     
         20 . The MEMS-based assembly of  claim 1 , wherein one of the first and second portions comprises a light blocking material. 
     
     
         21 . The MEMS-based assembly of  claim 1 , wherein one of the first and second portions comprises a light reflective material. 
     
     
         22 . The MEMS-based assembly of  claim 1 , wherein one of the first and second portions comprises a light absorbing material. 
     
     
         23 . The MEMS-based assembly of  claim 22 , wherein the light absorbing material comprises one of MoCr, MoW, MoTi, MoTa, TiW, and TiCr 
     
     
         24 . The MEMS-based assembly of  claim 22 , wherein the light absorbing material comprises a cermet, the cermet including a mixtures, wherein the mixture is one of Cr—Cr 2 O 3 , Cr—SiO 2  and Ti—TiN. 
     
     
         25 . The MEMS-based assembly of  claim 22 , wherein the light absorbing material comprises a semiconducting material, the semiconducting material including amorphous silicon or silicon-germanium alloys. 
     
     
         26 . The MEMS-based assembly of  claim 22 , wherein the light absorbing material comprises one of Ti and TiN. 
     
     
         27 . The MEMS-based assembly of  claim 1 , wherein one of the first and second portions comprises an encapsulating dielectric. 
     
     
         28 . The MEMS-based assembly of  claim 1 , wherein at least one second portion, in all light-modulating portion positions, is substantially normal the first portion. 
     
     
         29 . The MEMS-based assembly of  claim 1 , wherein the light-modulating portion is a shutter. 
     
     
         30 . The MEMS-based assembly of  claim 1 , wherein the light-modulating portion is backlit. 
     
     
         31 . A method of operating a MEMS-based assembly for a spatial light modulator, the MEMS-based assembly comprising a light-modulating portion supported over a substrate, wherein the light-modulating portion comprises a first portion and at least one second portion, the method comprising:
 moving the light-modulating portion to a position for which light is not substantially transmitted, and for which the at least one second portion is at least partially transverse to the first portion.   
     
     
         32 . A display comprising:
 a substrate;   a light-modulating portion supported over the substrate, wherein the light-modulating portion comprises
 a first portion, which, in all light-modulating portion positions, is oriented substantially horizontally with respect to the substrate, and 
 at least one second portion, which in all light-modulating portion positions, is at least partially transverse to first portion; 
   an actuator for moving the light-modulating portion to selectively modulate light; and   at least one light source generating the light.   
     
     
         33 . The display of  claim 32 , wherein the display is backlit with the at least one light source.