Flexural resonator element and flexural resonator for reducing energy loss due to heat dissipation

Abstract

A flexural resonator element includes a base body and a beam with a groove and a through-hole, the beam being extended in a Y direction from the base body and flexurally vibrating in an X direction orthogonal to the Y direction, the groove being formed on a surfaces of the beam perpendicular to a Z direction orthogonal to the X direction and the Y direction, and the through-hole having a smaller width in the X direction than a width of an opening of the groove in the X direction and penetrating from an inner surface of the groove formed on the surface of the beam to a surface of the beam opposite to the surface of the beam having the groove.

1 . A flexural resonator element, comprising:
 a base body; and
 a beam with two grooves and a through-hole, the beam being extended in a Y direction from the base body and flexurally vibrating in an X direction orthogonal to the Y direction, 
   the two grooves being formed on a surface of the beam perpendicular to a Z direction orthogonal to the X direction and the Y direction, and   the through-hole having a smaller width in the X direction than a width of an opening of the groove in the X direction and penetrating from an inner surface of the groove formed on the surface of the beam to a surface of the beam opposite to the surface of the beam having the groove.   
     
     
         2 . The flexural resonator element according to  claim 1 , wherein the through-hole includes a plurality of through-holes, the plurality of through-holes being formed in the groove. 
     
     
         3 . The flexural resonator element according to  claim 1 , wherein the beam includes a first electrode provided on the inner surface of the groove, a second electrode provided on a surface of the beam perpendicular to the X direction, and a plug provided on an inner surface of the through-hole. 
     
     
         4 . The flexural resonator element according to  claim 1 , wherein the base body and the beam are made of quartz crystal. 
     
     
         5 . The flexural resonator element according to  claim 1 , wherein the flexural resonator element is of a tuning fork type in which the beam includes two cantilevered beams extended in parallel to each other from the base body. 
     
     
         6 . The flexural resonator element according to  claim 1 , wherein the base body includes a base portion and a pair of connecting portions extended from the base portion in directions opposite to each other, and the beam includes a pair of detection beams extended from the base portion in directions opposite to each other and two pairs of driving beams extended from the connecting portion in directions opposite to each other. 
     
     
         7 . A flexural resonator, comprising:
 the flexural resonator element of  claim 1 ;   a casing housing the flexural resonator element; and   a cover sealing the casing.