Vacuum device

Abstract

A vacuum chamber has an opening. A door is to close the opening. A first rail extends in a first direction with a space between the first rail and the opening when viewed in a planar view. Further, the first rail supports the door to be movable in the first direction. Further, the first rail has a portion facing the opening in a second direction crossing the first direction when viewed in a planar view. Furthermore, the first rail has a first movable portion movable in the second direction.

1 . A vacuum device comprising:
 a vacuum chamber having an opening;   a door for closing said opening; and   a first rail extending in a first direction with a space between said first rail and said opening when viewed in a planar view, supporting said door to be movable in said first direction, and having a portion facing said opening in a second direction crossing said first direction when viewed in a planar view,   said first rail having a first movable portion movable in said second direction.   
     
     
         2 . The vacuum device according to  claim 1 , wherein each of said first and second directions crosses a direction of gravity. 
     
     
         3 . The vacuum device according to  claim 1 , further comprising a first driving portion for moving said first movable portion. 
     
     
         4 . The vacuum device according to  claim 1 , further comprising a second driving portion for moving said door in said first direction. 
     
     
         5 . The vacuum device according to  claim 4 , wherein said second driving portion is attached to said door to define a position of said door in said first direction and to render a position of said door free in said second direction. 
     
     
         6 . The vacuum device according to  claim 1 , wherein:
 said first rail has a taper portion tapered upward to have a size in said second direction getting smaller toward its tip, and   said door has a portion sandwiching said taper portion in said second direction.   
     
     
         7 . The vacuum device according to  claim 1 , further comprising: a second rail extending in said first direction with a space between said second rail and said opening when viewed in a planar view, having a portion facing said opening in said second direction when viewed in a planar view, and guiding said door in said first direction, wherein
 said second rail has a second movable portion movable in said second direction.   
     
     
         8 . The vacuum device according to  claim 1 , wherein:
 said vacuum device is to handle a plurality of workpieces collectively, and   said vacuum chamber has a plurality of regions for disposing said plurality of workpieces therein.   
     
     
         9 . The vacuum device according to  claim 8 , wherein:
 said plurality of regions are arranged in one direction for one length, and   said door has a length larger than said one length in said one direction.