Method For Forming Thin Film And Apparatus Therefor

Abstract

A plurality of antenna elements, each of which has first and second linear conductors whose first ends are electrically interconnected are formed. The antenna elements are arranged in plane in such a way that the first and second linear conductors are alternated and separated from one another at regular intervals, thereby forming one or more array antennas which are disposed in a chamber. The second ends of the first linear conductors are connected to a high-frequency power supply, and the second ends of the second linear conductors are connected to ground. A plurality of substrates are parallel placed on both sides of the array antennas at distances approximate to the distances between the linear conductors. A film is formed by introducing an ingredient gas into the chamber.

1 . A thin film formation apparatus, comprising:
 a chamber equipped with an inlet port configured to introduce a source gas and an exhaust port for evacuation;   one or more array antennas placed in the chamber, each of the array antennas including a plurality of antenna elements, each of the antenna elements having a first and a second linear conductor of said antenna elements being electrically connected to each other, the first and the second linear conductors placed alternately in a plane in equal intervals, the second ends of each of the first linear conductors connected to a high-frequency power source and the second ends of each of the second linear conductors being grounded; and   a plurality of substrate holders configured to support a plurality of substrates on both sides of and in parallel to said array antennas so as to have respective distances between the array antennas and the substrates about equal to the intervals.   
     
     
         2 . The thin film formation apparatus as set forth in  claim 1 , further comprising:
 dielectric bodies covering the first linear conductors.   
     
     
         3 . A solar cell production apparatus, comprising:
 a chamber equipped with an inlet port configured to introduce a source gas and an exhaust port for evacuation;   one or more array antennas placed in the chamber, each of the said array antennas includes a plurality of antenna elements, each of the antenna elements having a first and a second conductors, a first end of the first linear conductor and a first end of the second linear conductor of said antenna elements being electrically connected to each other, the first and the second linear conductors placed alternately in a plane in equal intervals, the second ends of each of the first linear conductors connected to a high-frequency power source and the second ends of each of the second linear conductors being grounded; and   a plurality of substrate holders configured to support a plurality of substrates on both sides of and in parallel to said array antennas so as to have respective distances between the array antennas and the substrates about equal to the intervals.   
     
     
         4 . The solar cell production apparatus as set forth in  claim 3 , further comprising:
 dielectric bodies covering the first linear conductors.