Array substrate, display device having the same and method of manufacturing the same
Abstract
An array substrate includes a switching element, a signal transmission line, a passivation layer and a pixel electrode. The switching element is disposed on an insulating substrate. The signal transmission line is connected to the switching element and includes a barrier layer, a conductive line, and a copper nitride layer. The barrier layer is disposed on the insulating substrate. The conductive line is disposed on the barrier layer and includes copper or copper alloy. The copper nitride layer covers the conductive line. The passivation layer covers the switching element and the signal transmission line and has a contact hole through which a drain electrode of the switching element is partially exposed. The pixel electrode is disposed on the insulating substrate, and is connected to the drain electrode of the switching element through the contact hole.
Claims
exact text as granted — not AI-modified1 . An array substrate, comprising: a switching element on an insulating substrate; a signal transmission line connected to the switching element, the signal transmission line comprising: a barrier layer on the insulating substrate; a conductive line on the barrier layer, the conductive line comprising copper or copper alloy; and a copper nitride layer covering the conductive line.
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