Borazine-based resin, process for its production, borazine-based resin composition, insulating film and method for its formation

Abstract

Interlayer insulating films 5,7 (insulating films) provided in a memory capacitor cell 8 are formed between a gate electrode 3 and a counter electrode 8 C formed on a silicon wafer 1. The interlayer insulating films 5,7 comprise a borazine-based resin, having a specific dielectric constant of no greater than 2.6, a Young's modulus of 5 GPa or greater and a leak current of no greater than 1×10 −8 A/cm 2 .

1 . A process for production of a borazine-based resin that is a polymer having a borazine skeleton on a main chain or a side chain thereof,
 wherein the process comprises:   a first step of polymerizing a B,B′,B″-trialkynylborazine and a hydrosilane in the presence of a solid catalyst, so as to form a borazine-based resin having a number average molecular weight in a range of 500 to 5 million, and   a second step of removing the solid catalyst after completing the first step,   wherein the solid catalyst is a heterogeneous metal-containing catalyst selected from the group consisting of simple metal powders, simple supported metals, Raney nickel, polymer-supported rhodium catalysts, polymer-supported platinum catalysts, and silica gel-supported platinum catalysts with surface functional groups.   
     
     
         2 . A process for production of a borazine-based resin according to  claim 1 ;
 wherein the solid catalyst is a supported catalyst comprising a catalyst supported on compound-based carrier.   
     
     
         3 . A process for production of a borazine-based resin according to  claim 1 , wherein said polymerizing is performed so as to form a borazine-based resin having a number average molecular weight in a range of 1000 to 1 million. 
     
     
         4 . A process for production of a borazine-based resin according to  claim 1 ,
 wherein the B,B′,B″-trialkyhylborazine is represented by the following formula (3):   
       
         
           
           
               
               
           
         
         where 
         R 1  represents alkyl, aryl, aralkyl or hydrogen, and 
         R 2  represents alkyl, aryl, aralkyl or hydrogen. 
       
     
     
         5 . A process for production of a borazine-based resin according to  claim 1 ,
 wherein the hydrosilane is represented by the following formula (4):   
       
         
           
           
               
               
           
         
         where 
         R 3  and R 4  represent identical or different monovalent groups selected from among alkyl, aryl, aralkyl and hydrogen, 
         R 5  represents a substituted or unsubstituted aromatic divalent group, an oxypoly (dimethylsiloxy) group or oxygen, 
         or by the following formula (5): 
       
       
         
           
           
               
               
           
         
       
       where R 6  represents alkyl, aryl, aralkyl or hydrogen, and n represents an integer of 2 or greater. 
     
     
         6 . A process for production of a borazine-based resin according to  claim 1 , wherein said solid catalyst is a heterogeneous metal-containing catalyst selected from the group consisting of polymer-supported rhodium catalysts, polymer-supported platinum catalysts and silica gel-supported platinum catalysts with surface functional groups. 
     
     
         7 . A process for production of a borazine-based resin according to  claim 1 , wherein said solid catalyst is a heterogeneous metal-containing catalyst selected from the group consisting of polymer-supported platinum catalysts. 
     
     
         8 . A process for production of a borazine-based resin according to  claim 1 , wherein said solid catalyst is a platinum-alumina solid catalyst.