System and method of illuminating interferometric modulators using backlighting

Abstract

An interferometric modulator array device with backlighting is disclosed. The interferometric modulator array device includes a plurality of interferometric modulator elements. Each of the interferometric modulator elements includes an optical cavity. The interferometric modulator array includes an optical aperture region, and at least one reflecting element is positioned so as to receive light passing through the optical aperture region and reflect at least a portion of the received light to the cavities of the interferometric modulator elements. The interferometric modulator elements may be separated from each other such that an optical aperture region is formed between adjacent interferometric modulator elements.

1 . A spatial light modulator comprising:
 a light-modulating array including a plurality of light-modulating elements each including an optical resonant cavity between first and second optical surfaces;   an optical aperture region in the light-modulating array; and   at least one reflecting element configured to receive light passing through the optical aperture region and to reflect at least a portion of the received light to at least one of the optical resonant cavities, the at least one reflecting element having a sloped surface.   
     
     
         2 . The spatial light modulator of  claim 1 , wherein the optical aperture region is positioned at a substantially central location in the light-modulating array. 
     
     
         3 . The spatial light modulator of  claim 1 , wherein the at least one reflecting element has a substantially convex geometry. 
     
     
         4 . The spatial light modulator of  claim 1 , wherein the at least one reflecting element has a substantially concave geometry. 
     
     
         5 . The spatial light modulator of  claim 1 , further comprising a mask aligned with the at least one reflecting element so as to at least partially obstruct a view of the at least one reflecting element. 
     
     
         6 . The spatial light modulator of  claim 5 , wherein the mask includes at least a portion of an etalon. 
     
     
         7 . The spatial light modulator of  claim 6 , wherein the portion of the etalon includes one or more layers of partially reflective, partially transmissive material, and one or more spacing layers. 
     
     
         8 . The spatial light modulator of  claim 1 , wherein the at least one reflecting element includes at least a shaped feature and a reflecting material over the shaped feature. 
     
     
         9 . The spatial light modulator of  claim 1 , wherein the at least one reflecting element includes sections interconnected so as to form a continuous unitary structure extending proximal to the plurality of light-modulating elements. 
     
     
         10 . The spatial light modulator of  claim 1 , wherein the plurality of light-modulating elements includes a metal layer, and wherein the metal layer includes a plurality of optically transmissive apertures. 
     
     
         11 . The spatial light modulator of  claim 1 , wherein at least some of the light-modulating elements are separated from each other, wherein the optical aperture region is between the separated light-modulating elements. 
     
     
         12 . The spatial light modulator of  claim 1 , wherein the at least one reflecting element includes a reflective material in substantially particulate form suspended in a substantially transparent material. 
     
     
         13 . The spatial light modulator of  claim 1 , wherein the sloped surface is curved. 
     
     
         14 . The spatial light modulator of  claim 1 , wherein the at least one reflecting element has flat or planar sections tilted with respect to the optical surfaces. 
     
     
         15 . The spatial light modulator of  claim 1 , further comprising:
 a display; and   a processor configured to communicate with the display and configured to process image data.   
     
     
         16 . The spatial light modulator of  claim 15 , further comprising a driver circuit configured to send at least one signal to the display. 
     
     
         17 . The spatial light modulator of  claim 16 , further comprising a controller configured to send at least a portion of the image data to the driver circuit. 
     
     
         18 . A spatial light modulator comprising:
 a light-modulating array including a plurality of a light-modulating elements each including a first optical surface, a second optical surface, and an optical resonant cavity between the first and second optical surfaces;   means for passing light through the light-modulating array; and   means for reflecting at least a portion of light passed through the light-passing means to at least one of the optical resonant cavities, wherein the light-reflecting means has a sloped surface.   
     
     
         19 . The device of  claim 18 , wherein the light-passing means includes an optical aperture region, or wherein the light-reflecting means includes a reflecting element. 
     
     
         20 . The device of  claim 18 , wherein the sloped surface is curved. 
     
     
         21 . The device of  claim 20 , wherein the sloped surface has a substantially convex geometry. 
     
     
         22 . The device of  claim 20 , wherein the sloped surface has a substantially concave geometry. 
     
     
         23 . The device of  claim 18 , wherein the sloped surface includes flat or planar sections tilted with respect to the optical surfaces. 
     
     
         24 . A method of manufacturing a spatial light modulator, the method comprising:
 forming a light-modulating array including
 a plurality of light-modulating elements each including an optical resonant cavity between first and second optical surfaces, and 
 an optical aperture region; and 
   forming at least one reflecting element configured to receive light passing through the optical aperture region and to reflect at least a portion of the received light to at least one of the optical resonant cavities, the at least one reflecting element having a sloped surface.   
     
     
         25 . The method of  claim 24 , further comprising forming a concealing feature on the substrate aligned with the at least one reflecting element so as to conceal the at least one reflecting element. 
     
     
         26 . The method of  claim 25 , wherein forming the concealing feature includes forming a mask including at least one of an absorbing material and a reflective material. 
     
     
         27 . The method of  claim 25 , wherein forming the concealing feature includes disposing a metal film so as to form an etalon including the metal film and the at least one reflecting element. 
     
     
         28 . The method of  claim 25 , wherein forming the at least one reflecting element includes forming a shaped base structure and depositing a reflecting material on the shaped base structure. 
     
     
         29 . The method of  claim 24 , wherein the forming at least one reflecting element includes:
 depositing a layer of reflecting material; and   surface treating the layer of reflecting material.   
     
     
         30 . The method of  claim 24 , wherein forming the at least one reflecting element includes depositing a composite material including reflective particles suspended in a substantially transparent material.