Reduced capacitance display element

Abstract

A display element, such as an interferometric modulator, includes a transparent conductor configured as a first electrode and a movable minor configured as a second electrode. Advantageously, the partial reflector is positioned between the transparent conductor and the movable mirror. Because the transparent conductor serves as an electrode, the partial reflector does not need to be conductive. Accordingly, a greater range of materials may be used for the partial reflector. In addition, a transparent insulative material, such as a dielectric, may be positioned between the transparent conductor and the partial reflector, for example, in order to decrease a capacitance of the display element without changing a gap distance between the partial reflector and the movable minor. Thus, a capacitance of the display element may be reduced without changing the optical characteristics of the display element.

1 - 28 . (canceled) 
     
     
         29 . A display element comprising:
 a substantially transparent conductive layer;   a partially reflective insulator having a thickness of between about 40 and 150 Angstroms;   a moveable reflective layer, the partially reflective insulator being positioned between the conductive layer and the moveable reflective layer, wherein a voltage applied between the conductive layer and the moveable reflective layer induces movement of the moveable reflective layer; and   a first dielectric layer positioned between the conductive layer and the partially reflective insulator.   
     
     
         30 . The display element of  claim 29 , wherein when the voltage is applied between the conductive layer and the moveable reflective layer, at least a portion of the moveable reflective layer moves so that the at least a portion of the moveable reflective layer physically contacts the partially reflective insulator. 
     
     
         31 . The display element of  claim 29 , further comprising a second dielectric layer positioned between the partially reflective insulator and the moveable reflective layer. 
     
     
         32 . The display element of  claim 29 , wherein the first dielectric layer includes a material selected from the group consisting of SiO 2 , Al 2 O 3 , and Silicon Nitride. 
     
     
         33 . The display element of  claim 29 , wherein the partially reflective insulator includes a material selected from the group consisting of Silicon Nitride, CrO 2 , CrO 3 , Cr 2 O 3 , Cr 2 O, and CrOCN. 
     
     
         34 . The display element of  claim 29 , further comprising a circuit configured to drive the moveable reflective layer such that light reflected by the moveable reflective layer and the partially reflective insulator can be modulated so as to form part of a viewable image. 
     
     
         35 . The display element of  claim 34 , wherein the display element includes a display element in a reflective display. 
     
     
         36 . The display element of  claim 29 , wherein the display element is included with a plurality of other display elements to form an image by selectively modulating incident light. 
     
     
         37 . The display element of  claim 29 , wherein the moveable reflective layer includes a metal. 
     
     
         38 . A method of forming a display element, the method comprising:
 forming a substantially transparent conductive layer;   forming a moveable reflective layer;   forming a partially reflective insulator having a thickness of between about 40 and 150 Angstroms, the partially reflective insulator being formed between the conductive layer and the moveable reflective layer, wherein a voltage applied between the conductive layer and the moveable reflective layer induces movement of the moveable reflective layer; and   forming a first dielectric layer between the conductive layer and the partially reflective insulator.   
     
     
         39 . The method of  claim 38 , wherein when the voltage is applied between the conductive layer and the moveable reflective layer, at least a portion of the moveable reflective layer moves so that the at least a portion of the moveable reflective layer physically contacts the partially reflective insulator. 
     
     
         40 . The method of  claim 38 , further comprising forming a second dielectric layer between the partially reflective insulator and the moveable reflective layer. 
     
     
         41 . The method of  claim 38 , wherein the first dielectric layer includes a material selected from the group consisting of SiO 2 , Al 2 O 3 , and Silicon Nitride. 
     
     
         42 . The method of  claim 38 , wherein the partially reflective insulator includes a material selected from the group consisting of Silicon Nitride, CrO 2 , CrO 3 , Cr 2 O 3 , Cr 2 O, and CrOCN. 
     
     
         43 . The method of  claim 38 , wherein the display element includes a display element in a reflective display. 
     
     
         44 . The method of  claim 38 , wherein the moveable reflective layer includes a metal. 
     
     
         45 . A display element comprising:
 means for transmitting light and conducting electricity;   means for partially reflecting light, the partially reflecting means having a thickness of between about 40 and 150 Angstroms, and the partially reflecting means including an insulator;   moveable means for reflecting light, the partially reflecting means being positioned between the transmitting means and the movable reflecting means, wherein a voltage applied between the transmitting means and the movable reflecting means induces movement of the movable reflecting means; and   means for insulating positioned between the transmitting means and the partially reflecting means.   
     
     
         46 . The display element of  claim 45 , wherein the transmitting means includes a substantially transparent conductive layer, the partially reflecting means includes a partially reflective insulator layer, the movable reflecting means includes a moveable reflective layer, and the insulating means includes a first dielectric layer. 
     
     
         47 . The display element of  claim 46 , wherein when the voltage is applied between the conductive layer and the moveable reflective layer, at least a portion of the moveable reflective layer moves so that the at least a portion of the moveable reflective layer physically contacts the partially reflective insulator. 
     
     
         48 . The display element of  claim 46 , further comprising a second dielectric layer positioned between the partially reflective insulator and the moveable reflective layer. 
     
     
         49 . The display element of  claim 46 , wherein the first dielectric layer includes a material selected from the group consisting of SiO 2 , Al 2 O 3 , and Silicon Nitride. 
     
     
         50 . The display element of  claim 46 , wherein the partially reflective insulator includes a material selected from the group consisting of Silicon Nitride, CrO 2 , CrO 3 , Cr 2 O 3 , Cr 2 O, and CrOCN. 
     
     
         51 . The display element of  claim 46 , further comprising a circuit configured to drive the moveable reflective layer such that light reflected by the moveable reflective layer and the partially reflective insulator can be modulated so as to form part of a viewable image. 
     
     
         52 . The display element of  claim 51 , wherein the display element includes a display element in a reflective display. 
     
     
         53 . The display element of  claim 46 , wherein the display element is included with a plurality of other display elements to form an image by selectively modulating incident light. 
     
     
         54 . The display element of  claim 46 , wherein the moveable reflective layer includes a metal.