Preparation method of palladium alloy composite membrane for hydrogen separation

Abstract

Disclosed herein is a method of preparing a palladium alloy composite membrane for hydrogen separation, including (a) providing a first metal coating layer on a porous support using an electroplating process; (b) providing a palladium coating layer on the first metal coating layer using a dry plating process; and (c) heat treating the palladium coating layer to form an alloy layer of palladium and the first metal.

What is claimed is: 
     
         1 . A method of preparing a palladium alloy composite membrane for hydrogen separation, comprising:
 (a) forming a palladium coating layer on a porous support using a dry sputtering deposition process;   (b) forming a metal coating layer on the palladium coating layer using a dry sputtering deposition process; and   (c) subjecting the metal coating layer to a reflow process under a hydrogen atmosphere to form an alloy layer.   
     
     
         2 . The method according to  claim 1 , wherein the porous support is a porous metal support or a porous ceramic support. 
     
     
         3 . The method according to  claim 2 , wherein the porous metal support is a porous nickel support. 
     
     
         4 . The method according to  claim 1 , wherein the metal coating layer is formed of copper. 
     
     
         5 . The method according to  claim 1 , further comprising modifying a surface of the porous support using a hydrogen plasma surface treatment before the formation of the palladium coating layer of the step (a).