Semiconductor Device

Abstract

A method for fabricating a semiconductor device comprises forming a partial-insulated substrate comprising an insulating region located below both a channel region of a cell transistor and one of a storage node contact region and a bit line contact region, and forming a cell transistor comprising a fin region on the partial-insulated substrate.

1 . A semiconductor device, comprising:
 a partial-insulated substrate comprising a connection region configured to couple an upper silicon layer to a lower semiconductor substrate and an insulating region configured to electrically disconnect the upper silicon layer from the lower semiconductor substrate;   a channel region and a source/drain region over the insulating region; and   a gate electrode on the channel region.   
     
     
         2 . The semiconductor device according to  claim 1 , wherein the connection region is located below a partial portion of the channel region and a bit line contact region. 
     
     
         3 . The semiconductor device according to  claim 2 , wherein the bit line contact region comprises an area between fin regions of neighboring cell transistors formed in an active region. 
     
     
         4 . The semiconductor device according to  claim 1 , wherein the connection region is located below a partial portion of the channel region and a storage node contact region. 
     
     
         5 . The semiconductor device according to  claim 4 , wherein the storage node contact region comprises areas outside fin regions of neighboring cell transistors formed in an active region. 
     
     
         6 . The semiconductor device according to  claim 1 , wherein the insulating region is located below the channel region, a bit line contact region, and a partial portion of a storage node contact. 
     
     
         7 . The semiconductor device according to claim  11 , further comprising:
 a gate oxide layer between the channel region and the gate electrode; and   a spacer at sidewalls of the gate electrode.