Reactor device with removable deposition monitor

Abstract

A reactor apparatus includes a first chamber coupled to a first source of vacuum, a monitor chamber isolated from the first chamber and coupled to a second source of vacuum, and at least one removable deposition monitor disposed in the monitor chamber.

1 . A reactor apparatus comprising:
 a first chamber coupled to a first source of vacuum;   a monitor chamber isolated from the first chamber and coupled to a second source of vacuum;   at least one removable deposition monitor disposed in the monitor chamber.   
     
     
         2 . The reactor apparatus according to  claim 1 , wherein the at least one removable deposition monitor is moveable between the monitor chamber and the first chamber. 
     
     
         3 . The reactor apparatus according to  claim 1 , wherein the first source of vacuum is different than the second source of vacuum. 
     
     
         4 . The reactor apparatus according to  claim 2 , wherein the at least one removable deposition monitor is moveable via a vacuum bellows drive configured to move the at least one removable deposition monitor into and out of the first chamber. 
     
     
         5 . The reactor apparatus according to  claim 2 , wherein the at least one removable deposition monitor is moveable via a magnetically-coupled transfer arm configured to move the at least one removable deposition monitor into and out of the deposition chamber. 
     
     
         6 . The reactor apparatus according to  claim 1 , wherein the at least one removable deposition monitor comprises a plurality of removable deposition monitors. 
     
     
         7 . A reactor apparatus comprising:
 a first chamber;   a monitor chamber partially isolated from the first chamber and coupled to a source of vacuum, the monitor chamber further comprising a non-isolated portion that is exposed to the first chamber; and   at least one removable deposition monitor disposed in the partially isolated portion of the monitor chamber.   
     
     
         8 . The reactor apparatus of  claim 7 , wherein the at least one removable deposition monitor is moveable between the partially isolated portion and the non-isolated portion. 
     
     
         9 . The reactor apparatus of  claim 7 , further comprising a valve separating the partially isolated and non-isolated portions of the monitor chamber. 
     
     
         10 . The reactor apparatus of  claim 7 , wherein the monitor chamber comprises a slit or hole in a chamber wall of the monitor chamber. 
     
     
         11 . The reactor apparatus according to  claim 7 , wherein the at least one removable deposition monitor comprises a plurality of removable deposition monitors. 
     
     
         12 . A reactor apparatus comprising:
 a first chamber;   a monitor chamber selectively isolated from the first chamber and coupled to a source of vacuum, the monitor chamber comprising a valve configured to selectively expose the monitor chamber to the first chamber; and   at least one removable deposition monitor disposed in the monitor chamber.   
     
     
         13 . The reactor apparatus of  claim 12 , wherein the at least one removable deposition monitor is moveable within the monitor chamber relative to a position overlying the valve. 
     
     
         14 . The reactor apparatus according to  claim 12 , wherein the at least one removable deposition monitor comprises a plurality of removable deposition monitors. 
     
     
         15 . The reactor apparatus according to  claim 12 , wherein the at least one removable deposition monitor is disposed on a rail coupled to a removable face plate secured to the monitor chamber.