US2012092741A1PendingUtilityA1
Two-Mirror Scanning System
Individually held — no corporate assignee on recordPriority: Mar 27, 2009Filed: Dec 21, 2011Published: Apr 19, 2012
Est. expiryMar 27, 2029(~2.7 yrs left)· nominal 20-yr term from priority
G02B 26/101H04N 9/3173H04N 9/3129G02B 26/0833
51
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Claims
Abstract
A scanning beam projection system includes a two-mirror scanning system. One mirror scans in one direction, and a second mirror scans in a second direction. A fast scan mirror receives a modulated light beam from a fold mirror and directs the modulated light beam to a slow can mirror. The fold mirror may be formed on an output optic or may be formed on a common substrate with the slow scan mirror.
Claims
exact text as granted — not AI-modified1 - 17 . (canceled)
18 . A micro-electromechanical systems (MEMS) device comprising:
a substrate; a scanning platform coupled to the substrate, the scanning platform operable to have a variable angular displacement with respect to the substrate; and a fixed mirror on the substrate.
19 . The MEMS device of claim 18 further comprising a reflective device coupled to the scanning platform.
20 . The MEMS device of claim 19 wherein the reflective device comprises a reflective coating applied to the scanning platform.
21 . The MEMS device of claim 19 wherein the reflective device comprises a mirror coupled to the scanning platform.
22 . The MEMS device of claim 18 wherein the fixed mirror on the substrate comprises a reflective coating applied to the substrate.
23 - 28 . (canceled)Join the waitlist — get patent alerts
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