Electromechanical system having a dielectric movable membrane

Abstract

An electromechanical device includes a partially reflective and partially transmissive layer and a movable functional element. The movable functional element includes a patterned flexible dielectric layer and a reflective layer mechanically coupled to the flexible dielectric layer. The patterned flexible dielectric layer is configured to flex in response to voltages applied to the partially reflective and partially transmissive layer to move the functional element in a direction generally perpendicular to the partially reflective and partially transmissive layer. The reflective layer is situated between the flexible dielectric layer and the partially reflective and partially transmissive layer.

1 . An electromechanical device comprising:
 an optical stack; and   a plurality of movable elements spaced from each other, each of the movable elements including
 a flexible dielectric layer that flexes to move the movable element in a direction generally perpendicular to the optical stack; and 
 a reflective layer mechanically coupled to the flexible dielectric layer and situated between the flexible dielectric layer and the optical stack. 
   
     
     
         2 . The device of  claim 1 , wherein each of the flexible dielectric layers includes SiON. 
     
     
         3 . The device of  claim 1 , wherein each of the reflective layers is in substantially continuous contact with the flexible dielectric layer. 
     
     
         4 . The device of  claim 1 , wherein the optical stack includes a partially reflective layer and partially transmissive layer, wherein the flexible dielectric layer flexes in response to voltages applied to the partially reflective layer and partially transmissive layer to move the movable element towards the partially reflective layer and partially transmissive layer. 
     
     
         5 . The device of  claim 4 , wherein the partially reflective and partially transmissive layer includes at least one of chromium and molybdenum-chromium. 
     
     
         6 . The device of  claim 1 , further including a plurality of posts supporting the plurality of movable elements, wherein a coefficient of thermal expansion of each of the flexible dielectric layers is substantially similar to a coefficient of thermal expansion of the posts. 
     
     
         7 . The device of  claim 6 , wherein the flexible dielectric layers and the plurality of posts include a same dielectric material. 
     
     
         8 . The device of  claim 1 , wherein each of the flexible dielectric layers includes a first side and a second side opposite to the first side, each of the reflective layers adjacent to the first side of the flexible dielectric layer, and wherein each of the movable elements further includes a conductive layer adjacent to the second side of the flexible dielectric layer. 
     
     
         9 . The device of  claim 8 , wherein each of the reflective layers includes a material and wherein each of the conductive layers includes the material. 
     
     
         10 . The device of  claim 1 , further comprising:
 a display;   a processor configured to communicate with the display, the processor being configured to process image data; and   a memory device configured to communicate with the processor.   
     
     
         11 . The device of  claim 10 , further comprising a driver circuit configured to send at least one signal to the display. 
     
     
         12 . The device of  claim 11 , further comprising a controller configured to send at least a portion of the image data to the driver circuit. 
     
     
         13 . The device of  claim 10 , further comprising an image source module configured to send the image data to the processor. 
     
     
         14 . The device of  claim 13 , wherein the image source module includes at least one of a receiver, a transceiver, and a transmitter. 
     
     
         15 . The device of  claim 10 , further including an input device configured to receive input data and to communicate the input data to the processor. 
     
     
         16 . An electromechanical device comprising:
 an optical stack; and   a plurality of movable elements spaced from each other, each of the movable elements including
 means for reflecting light; and 
 dielectric means for flexing the movable element in a direction generally perpendicular to the optical stack, the flexing means mechanically coupled to the reflecting means, the reflecting means situated between the flexing means and the optical stack. 
   
     
     
         17 . The device of  claim 16 , wherein the reflecting means includes a reflective layer, or wherein the flexing means includes a flexible dielectric layer. 
     
     
         18 . A method of manufacturing an electromechanical device, the method comprising:
 forming a plurality of movable elements, wherein forming the plurality of movable element includes
 forming a flexible dielectric layer, the flexible dielectric layer mechanically coupled to a reflective layer situated between the flexible dielectric layer and an optical stack, the patterned flexible dielectric layer configured to flex to move the element in a direction generally perpendicular to the optical stack. 
   
     
     
         19 . The method of  claim 18 , further comprising forming the optical stack.