Substrate-storing container

Abstract

A substrate storing container has a container body for accommodating substrates; and a door that is detachably fitted to an opening of the container body with a gasket interposed therebetween. The container body and door are separately formed of molding material containing synthetic resin having a water absorption of 0.1% or lower and outgassing in a total amount of 15 ppm or lower when measured after a 24 hour heating at 80 deg. C. by the dynamic headspace technique. The synthetic resin in the molding material is at least one kind selected from cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, and an alloy resin of cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, or polyethylene terephthalate.

1 . A substrate storing container comprising:
 a container body for accommodating substrates; and   a door that is detachably fitted to an opening of the container body with a gasket interposed therebetween,   wherein the container body and door are separately formed of molding material containing synthetic resin having a water absorption of 0.1% or lower and outgassing in a total amount of 15 ppm or lower when measured after a 24 hour heating at 80 deg. C. by the dynamic headspace technique,   wherein the synthetic resin in the molding material is at least one kind selected from cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, and an alloy resin of cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, or polyethylene terephthalate.   
     
     
         2 . The substrate storing container according to  claim 1 , wherein when air inside the container body with the door fitted to the opening is purged so as to make the relative humidity 5% or lower, the state in which the relative humidity is 5% or lower can be maintained for two hours or longer. 
     
     
         3 . The substrate storing container according to  claim 1 , wherein the heat distortion temperature of the synthetic resin of the molding material is specified to be 120 deg. C. or higher. 
     
     
         4 . The substrate storing container according to  claim 1 , further comprising:
 a supporting structure disposed in the container body for supporting substrates,   wherein the supporting structure is formed of molding material containing synthetic resin having a heat distortion temperature of 120 deg. C. or higher and a water absorption of 0.1% or lower, and   wherein the synthetic resin of the molding material is composed of at least one kind selected from cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, and an alloy resin of cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, or polyethylene terephthalate.   
     
     
         5 . The substrate storing container according to  claim 1 , further comprising:
 opening and closing valves for air replacement, attached to the container body,   wherein part of the opening and closing valve is formed of molding material containing synthetic resin having a heat distortion temperature of 120 deg. C. or higher and a water absorption of 0.1% or lower, and   wherein the synthetic resin of the molding material is composed of at least one kind selected from cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, polyphenylene sulfide, and an alloy resin of cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, or polyphenylene sulfide.   
     
     
         6 . The substrate storing container according to  claim 1 ,
 wherein the door has a substrate holding retainer attached thereto,   wherein the retainer is formed of molding material containing synthetic resin having a heat distortion temperature of 120 deg. C. or higher and a water absorption of 0.1% or lower, and   wherein the synthetic resin of the molding material is composed of at least one kind selected from cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, and an alloy resin of cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, or polyethylene terephthalate.   
     
     
         7 . The substrate storing container according to  claim 2 , wherein the heat distortion temperature of the synthetic resin of the molding material is specified to be 120 deg. C. or higher. 
     
     
         8 . The substrate storing container according to  claim 2 , further comprising:
 a supporting structure disposed in the container body for supporting substrates,   wherein the supporting structure is formed of molding material containing synthetic resin having a heat distortion temperature of 120 deg. C. or higher and a water absorption of 0.1% or lower, and   wherein the synthetic resin of the molding material is composed of at least one kind selected from cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, and an alloy resin of cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, or polyethylene terephthalate.   
     
     
         9 . The substrate storing container according to  claim 3 , further comprising:
 a supporting structure disposed in the container body for supporting substrates,   wherein the supporting structure is formed of molding material containing synthetic resin having a heat distortion temperature of 120 deg. C. or higher and a water absorption of 0.1% or lower, and   wherein the synthetic resin of the molding material is composed of at least one kind selected from cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, and an alloy resin of cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, or polyethylene terephthalate.   
     
     
         10 . The substrate storing container according to  claim 7 , further comprising:
 a supporting structure disposed in the container body for supporting substrates,   wherein the supporting structure is formed of molding material containing synthetic resin having a heat distortion temperature of 120 deg. C. or higher and a water absorption of 0.1% or lower, and   wherein the synthetic resin of the molding material is composed of at least one kind selected from cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, and an alloy resin of cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, or polyethylene terephthalate.   
     
     
         11 . The substrate storing container according to  claim 2 , further comprising:
 opening and closing valves for air replacement, attached to the container body,   wherein part of the opening and closing valve is formed of molding material containing synthetic resin having a heat distortion temperature of 120 deg. C. or higher and a water absorption of 0.1% or lower, and   wherein the synthetic resin of the molding material is composed of at least one kind selected from cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, polyphenylene sulfide, and an alloy resin of cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, or polyphenylene sulfide.   
     
     
         12 . The substrate storing container according to  claim 3 , further comprising:
 opening and closing valves for air replacement, attached to the container body,   wherein part of the opening and closing valve is formed of molding material containing synthetic resin having a heat distortion temperature of 120 deg. C. or higher and a water absorption of 0.1% or lower, and   wherein the synthetic resin of the molding material is composed of at least one kind selected from cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, polyphenylene sulfide, and an alloy resin of cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, or polyphenylene sulfide.   
     
     
         13 . The substrate storing container according to  claim 4 , further comprising:
 opening and closing valves for air replacement, attached to the container body,   wherein part of the opening and closing valve is formed of molding material containing synthetic resin having a heat distortion temperature of 120 deg. C. or higher and a water absorption of 0.1% or lower, and   wherein the synthetic resin of the molding material is composed of at least one kind selected from cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, polyphenylene sulfide, and an alloy resin of cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, or polyphenylene sulfide.   
     
     
         14 . The substrate storing container according to  claim 7 , further comprising:
 opening and closing valves for air replacement, attached to the container body,   wherein part of the opening and closing valve is formed of molding material containing synthetic resin having a heat distortion temperature of 120 deg. C. or higher and a water absorption of 0.1% or lower, and   wherein the synthetic resin of the molding material is composed of at least one kind selected from cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, polyphenylene sulfide, and an alloy resin of cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, or polyphenylene sulfide.   
     
     
         15 . The substrate storing container according to  claim 8 , further comprising:
 opening and closing valves for air replacement, attached to the container body,   wherein part of the opening and closing valve is formed of molding material containing synthetic resin having a heat distortion temperature of 120 deg. C. or higher and a water absorption of 0.1% or lower, and   wherein the synthetic resin of the molding material is composed of at least one kind selected from cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, polyphenylene sulfide, and an alloy resin of cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, or polyphenylene sulfide.   
     
     
         16 . The substrate storing container according to  claim 9 , further comprising:
 opening and closing valves for air replacement, attached to the container body,   wherein part of the opening and closing valve is formed of molding material containing synthetic resin having a heat distortion temperature of 120 deg. C. or higher and a water absorption of 0.1% or lower, and   wherein the synthetic resin of the molding material is composed of at least one kind selected from cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, polyphenylene sulfide, and an alloy resin of cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, or polyphenylene sulfide.   
     
     
         17 . The substrate storing container according to  claim 10 , further comprising:
 opening and closing valves for air replacement, attached to the container body,   wherein part of the opening and closing valve is formed of molding material containing synthetic resin having a heat distortion temperature of 120 deg. C. or higher and a water absorption of 0.1% or lower, and   wherein the synthetic resin of the molding material is composed of at least one kind selected from cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, polyphenylene sulfide, and an alloy resin of cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, or polyphenylene sulfide.   
     
     
         18 . The substrate storing container according to  claim 2 ,
 wherein the door has a substrate holding retainer attached thereto,   wherein the retainer is formed of molding material containing synthetic resin having a heat distortion temperature of 120 deg. C. or higher and a water absorption of 0.1% or lower, and   wherein the synthetic resin of the molding material is composed of at least one kind selected from cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, and an alloy resin of cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, or polyethylene terephthalate.   
     
     
         19 . The substrate storing container according to  claim 4 ,
 wherein the door has a substrate holding retainer attached thereto,   wherein the retainer is formed of molding material containing synthetic resin having a heat distortion temperature of 120 deg. C. or higher and a water absorption of 0.1% or lower, and   wherein the synthetic resin of the molding material is composed of at least one kind selected from cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, and an alloy resin of cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, or polyethylene terephthalate.   
     
     
         20 . The substrate storing container according to  claim 4 ,
 wherein the door has a substrate holding retainer attached thereto,   wherein the retainer is formed of molding material containing synthetic resin having a heat distortion temperature of 120 deg. C. or higher and a water absorption of 0.1% or lower, and   wherein the synthetic resin of the molding material is composed of at least one kind selected from cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, and an alloy resin of cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, or polyethylene terephthalate.