Turbine powered cleaning apparatus

Abstract

A rotary turbine cleaning device for cleaning semiconductor fabrication equipment works in conjunction with a clean room vacuum or other vacuum or other air pump. The fluid flow created by the vacuum action causes the rotors of the turbine assembly to rotate, thereby rotating the cleaning head. Attached to the cleaning head are bristles or other cleaning media which may dislodge particles from surfaces. The dislodged particles are drawn into the tube through an opening at the end of the tube and the vacuum action.

1 . A cleaning apparatus comprising:
 a tube having a first end coupled to an air pump and a rotatable cleaning device disposed at a second end, said rotatable cleaning device comprising:   a turbine with an axial shaft;   a rotatable head coupled to said shaft at said second end; and   bristles extending from said rotatable head.   
     
     
         2 . The cleaning apparatus as in  claim 1 , wherein said turbine comprises a rotor assembly including said shaft and a plurality of rotor blades. 
     
     
         3 . The cleaning apparatus as in  claim 1 , wherein said air pump comprises a vacuum and said turbine and said rotatable head are removably coupled to said tube. 
     
     
         4 . The cleaning apparatus as in  claim 3 , wherein said tube is a flexible tube. 
     
     
         5 . The cleaning apparatus as in  claim 1 , wherein said rotatable head is removable and interchangeable with further rotatable heads having different outer diameters than said rotatable head. 
     
     
         6 . The cleaning apparatus as in  claim 1 , wherein a terminus of said second end includes said shaft extending therethrough and an annular opening surrounding said shaft. 
     
     
         7 . The cleaning apparatus as in  claim 1 , wherein at least a segment of said shaft is disposed within a sleeve fixedly coupled to said tube and centrally located within said tube. 
     
     
         8 . The cleaning apparatus as in  claim 1 , wherein at least a segment of said shaft is disposed within a sleeve centrally located within said tube, said sleeve coupled to said tube by a friction fitting with ribs that contact an inner surface of said tube, said friction fitting opposed on an outer surface of said tube by a flange formed of a rigid material and which extends circumferentially around said tube. 
     
     
         9 . The cleaning apparatus as in  claim 1 , wherein said bristles extend outwardly form said rotatable head, comprise a plurality of axially spaced rows of bristles and include bristles formed of at least two different materials. 
     
     
         10 . The cleaning apparatus as in  claim 1 , wherein said first end is coupled to said air pump by way of a vacuum hose interposed therebetween. 
     
     
         11 . The cleaning apparatus as in  claim 1 , further comprising laminar flow vanes disposed within said tube and downstream from said turbine. 
     
     
         12 . The cleaning apparatus as in  claim 1 , further comprising a lumen disposed within or adjacent a wall of said tube and coupled to a fluid delivery source, said lumen terminating at said second end and capable of dispensing a cleaning fluid at said second end. 
     
     
         13 . The cleaning apparatus as in  claim 1 , wherein said air pump comprises a clean room vacuum and delivers an air flow ranging from about 100-250 cubic feet per minute. 
     
     
         14 . The cleaning apparatus as in  claim 1 , further comprising a filter disposed between said rotatable head and said turbine. 
     
     
         15 . A vacuum powered brush comprising:
 a vacuum system;   a vacuum hose having a first end coupled to said vacuum system;   a rotatable brush disposed at a second end of said vacuum hose, said rotatable brush comprising:   a turbine with an axial shaft and a plurality of rotor blades disposed within said hose; and   a rotatable brush head disposed at said second end and coupled to said shaft.   
     
     
         16 . The vacuum powered brush as in  claim 15 , wherein at least a segment of said shaft is disposed within a sleeve coupled to said tube and centrally located within said tube, and said bristles are formed of nylon. 
     
     
         17 . The vacuum powered brush as in  claim 15 , further comprising laminar flow vanes disposed within said tube and downstream from said turbine, wherein said bristles comprise a plurality of axially spaced rows of said bristles and said bristles include bristles formed of at least two different materials. 
     
     
         18 . The vacuum powered brush as in  claim 15 , wherein a diameter of said rotatable brush head is different than an outer diameter of said tube and said rotatable brush head is interchangeable with further rotatable brush heads having different diameters. 
     
     
         19 . The vacuum powered brush as in  claim 15 , wherein a terminus of said second end includes said shaft extending therethrough and an annular opening surrounding said shaft and further comprising laminar flow vanes disposed within said tube and downstream from said turbine. 
     
     
         20 . The vacuum powered brush as in  claim 15 , further comprising a lumen disposed within or adjacent a wall of said tube and coupled to a fluid delivery source, said lumen terminating at said second end and capable of dispensing a cleaning fluid at said second end. 
     
     
         21 . A cleaning apparatus comprising:
 a tube having a first end coupled directly or indirectly to an air pump and a rotatable cleaning device disposed at a second end thereof, said rotatable cleaning device comprising:   a turbine with an axial shaft that protrudes from said second end;   a head fixedly coupled to said shaft at said second end; and   a cleaning member coupled to and extending peripherally from said head, said cleaning member formed of a cleaning material comprising at least one of a scouring pad material formed of intertwined mesh and a compressible porous material.   
     
     
         22 . The cleaning apparatus as in  claim 21 , wherein said cleaning member comprises a plurality of discrete portions said cleaning material.