Coating installation and coating method

Abstract

A coating method can use a coating device containing at least one recipient which can be evacuated and which is adapted to accommodate a substrate, at least one gas supply device which is used to introduce at least one gaseous precursor into the recipient and at least one heatable activation element which has a definable longitudinal extension and which is fastened by means of at least one associated mechanical fastening device. Electric current can be supplied to the activation element via at least two contact elements and the contact elements are fastened so as to be virtually immobile relative to the recipient. The activation element is arranged so as to be mobile relative to the recipient.

1 .- 16 . (canceled) 
     
     
         17 . A coating device, comprising at least one recipient, which can be evacuated and which is adapted to receive a substrate, at least one gas supply device, being adapted to introduce at least one gaseous precursor into the recipient, and at least one heatable activation element, which has a predeterminable longitudinal extent and is fastened by means of at least one dedicated mechanical fastening device, wherein an electrical current can be supplied to the activation element by means of at least two contact elements, the contact elements being fastened nearly immovably in relation to the recipient and the activation element being arranged movably in relation to the recipient. 
     
     
         18 . The coating device according to  claim 17 , wherein the longitudinal extent of the activation element is arranged completely inside the recipient. 
     
     
         19 . The coating device according to  claim 17 , wherein the activation element comprises at least one wire. 
     
     
         20 . The coating device according to  claims 17 , wherein the contact element comprises at least one roller, which is provided for being in contact with the activation element. 
     
     
         21 . The coating device according to  claim 19 , wherein the wire is led repeatedly through the active zone. 
     
     
         22 . The coating device according to  claim 17 , wherein a plurality of contact elements to which a predeterminable electrical potential difference can be respectively applied are arranged along the longitudinal extent of the activation element. 
     
     
         23 . The coating device according to  claim 17 , wherein the mechanical fastening device is electrically insulated. 
     
     
         24 . The coating device according to  claim 17 , wherein the activation element can be moved in relation to the recipient by a translatory movement of the mechanical fastening device. 
     
     
         25 . The coating device according to  claim 17 , wherein the activation element can be moved inside the recipient by a rotation of the mechanical fastening device. 
     
     
         26 . A coating device, comprising at least one recipient, which can be evacuated and which is adapted to receive a substrate, at least one gas supply device, being adapted to introduce at least one gaseous precursor into the recipient, and at least one heatable activation element, which has a predeterminable longitudinal extent and is fastened by means of at least one dedicated mechanical fastening device, wherein an electrical current is supplyable to the activation element by means of at least two contact elements, the contact elements being fastened nearly immovably in relation to the recipient and the activation element being arranged movably in relation to the recipient, wherein the movement of the activation element is induced by a movement of the mechanical fastening device. 
     
     
         27 . The coating device according to  claim 26 , wherein the activation element comprises at least one wire. 
     
     
         28 . The coating device according to  claims 26 , wherein the contact element comprises at least one roller, which is provided for being in contact with the activation element. 
     
     
         29 . The coating device according to  claim 27 , wherein a plurality of contact elements are arranged along the longitudinal extent of the activation element, said contact elements being adapted to be supplied by a respective electrical potential difference. 
     
     
         30 . The coating device according to  claim 26 , wherein the activation element is movable in relation to the recipient by a translatory movement of the mechanical fastening device and/or the activation element is movable inside the recipient by a rotation of the mechanical fastening device. 
     
     
         31 . A method for producing a coating on a substrate, wherein the substrate is introduced into a recipient which can be evacuated and at least one gaseous precursor is introduced into the recipient by way of at least one gas supply device and is activated by means of at least one electrically heated activation element, wherein an electrical current is supplied to the activation element by means of at least two contact elements, wherein at least one of the contact elements is arranged nearly fixedly in the recipient and the activation element is moved in relation to the recipient. 
     
     
         32 . The method according to  claim 31 , wherein the movement is performed in an oscillating manner. 
     
     
         33 . The method according to  claim 31 , wherein the activation element is moved in the recipient by a rotation of the mechanical fastening device. 
     
     
         34 . The method according to  claim 31 , wherein the activation element is moved in relation to the recipient by a translatory movement of the mechanical fastening device. 
     
     
         35 . The method according to  claim 31 , wherein the activation element comprises at least one wire. 
     
     
         36 . The method according to  claim 35 , wherein the wire repeatedly passes the active zone. 
     
     
         37 . The process according to  claim 31 , wherein a plurality of contact elements along the longitudinal extent of the activation element are in contact with the latter and a predeterminable electrical potential difference is applied to each contact element.