Charged particle beam device and image display method

Abstract

According to the present invention, in a charged particle beam device having a charged particle source, an objective lens for focusing a primary-charged particle beam emitted from the charged particle source, a scan deflector for scanning the primary-charged particle beam on a sample, and a detector for detecting signal particles generated from the sample under scanning of the primary-charged particle beam, whereby a sample image is obtained by using the signal particles of the detector, the charged particle beam device comprises a deflector for deflecting an angle of irradiation of the primary-charged particle beam onto the sample, first and second independent power supplies for passing currents to the deflector, and a switch for switching over voltages applied from the two power supplies in unit of one line or one frame of scanning of the primary-charged particle beam.

1 . A charged particle beam device having
 a charged particle source;   an objective lens which focuses a primary-charged particle beam emitted from said charged particle source;   a scan deflector which scans said primary-charged particle beam on a sample; and   a detector which detects signal particles generated from the sample under scanning of said primary-charged particle beam, whereby a sample image is obtained by using the signal particles of said detector, comprising:
 a deflector which deflects an angle of irradiation of said primary-charged particle beam onto the sample; 
 independent first and second power supplies which pass currents to said deflector; and 
 a switch which switches over said two power supplies in unit of one line or one frame of scanning of said primary-charged particle beam. 
   
     
     
         2 . A charged particle beam device according to  claim 1 , wherein by using a first sample image captured through the use of signal particles when said first power supply is applied and a second sample image captured through the use of signal particles when said second power supply is applied, a stereoscopic image of said sample as viewed from obliquely above can be observed. 
     
     
         3 . A charged particle beam device according to  claim 1 , wherein a table for prescribing current values passed to said deflector in accordance with tilting directions of said primary-electron beam is memorized. 
     
     
         4 . A charged particle beam device according to  claim 1 , wherein a stigmator adapted to correct the primary-charged particle beam for astigmatism, is provided on the side of deflector opposing said charged particle source. 
     
     
         5 . A charged particle beam device according to  claim 1  further comprising a condenser lens on the side of deflector opposing said charged particle source, wherein an off-axis aberration generated in said objective lens is cancelled out by means of said condenser lens. 
     
     
         6 . A charged particle beam device having
 a charged particle source;   an objective lens which focuses a primary-charged particle beam emitted from said charged particle source;   a scan deflector which scans said primary-charged particle beam on a sample; and   a detector which detects signal particles generated from the sample under scanning of said primary-charged particle beam, whereby a sample image is obtained by using the signal particles of said detector, comprising:
 a deflector which deflects an angle of irradiation of said primary-charged particle beam onto the sample; and 
 a display unit which displays a first image and a second image under application of two different voltages to said deflector so as to acquire the first image and the second image, 
 wherein locations, on said display unit, of the first image and the second image which are displayed on said display unit are switched over. 
   
     
     
         7 . A charged particle beam device according to  claim 6 , wherein the locations of the first and second images are switched over in accordance with a cross method, a stereoscopic method or an anaglyph method. 
     
     
         8 . A charged particle beam device according to  claim 6 , wherein a stereoscopic image is formed on a stereoscopic display unit by using said first and second images.