Ultrasonic inspection equipment and ultrasonic inspection method

Abstract

Ultrasonic inspection equipment facilitates alignment of display positions of three-dimensional ultrasonic inspection data and three-dimensional shape data, and quickly discriminates between a defect echo and an inner-wall echo. A computer 102 A has a position correction function of correcting a relative display position between three-dimensional shape data and three-dimensional ultrasonic inspection data. A display position of the three-dimensional ultrasonic inspection data or that of the three-dimensional shape data is moved by a norm of a mean vector along the mean vector that is calculated from a plurality of vectors defined by a plurality of points selected in the three-dimensional ultrasonic inspection data and by a plurality of points selected in the three-dimensional shape data. The three-dimensional shape data and the three-dimensional ultrasonic inspection data are displayed in such a manner as to be superimposed on each other on a three-dimensional display unit 103 C.

1 . Ultrasonic inspection equipment comprising:
 an array-probe ultrasonic sensor including a plurality of piezoelectric vibration elements;   a pulser for supplying each of the piezoelectric vibration elements of the array-probe ultrasonic sensor with a transmission signal;   a receiver for receiving a signal from each of the piezoelectric vibration elements of the array-probe ultrasonic sensor;   a delay control unit for setting a delay time for the transmission signal and a delay time for the received signal differently for respective piezoelectric vibration elements;   a data storage unit for storing a waveform of an ultrasonic wave received by the array-probe ultrasonic sensor;   a computer for image processing, the computer generating three-dimensional ultrasonic inspection data from the waveform recorded by the data storage unit;   a data storage unit for storing three-dimensional shape data; and   a three-dimensional display unit for displaying three-dimensional shape data and the three-dimensional ultrasonic inspection data;   wherein the computer displays a picture of a reflection intensity distribution of a plane which is parallel to two axes of a coordinate system of the three-dimensional ultrasonic inspection data from the data storage unit in which the waveform of the ultrasonic wave received by the array-probe ultrasonic sensor is stored on a cross-section display screen,   displays the three-dimensional inspection data and the three-dimensional shape data from data storage unit in which three-dimensional shape data is stored in such a manner as to be superimposed on each other, and   displays a plane which shows a position of a plane of the picture of the reflection intensity distribution with the three-dimensional inspection data and the three-dimensional shape data on the screen of the display unit.   
     
     
         2 . An ultrasonic inspection method comprising the steps of:
 displaying a picture of a reflection intensity distribution of a plane which is parallel to two axes of a coordinate system of the three-dimensional ultrasonic wave received by the array-probe ultrasonic sensor is stored on a cross-section display screen,   displaying the three-dimensional inspection data and the three-dimensional shape data from data storage unit in which three-dimensional shape data is stored in such a manner as to be superimposed on each other, and   displaying a plane which shows a position of a plane of the picture of the reflection intensity distribution with the three-dimensional inspection data and the three-dimensional shape data on the screen of the display unit.