Vacuum pump and member used for vacuum pump

Abstract

To provide a vacuum pump in which possibilities of decreased exhaust performance and gas leakage at the time of breakage of a rotor are lessened, in the case where a rotating part closes the inside opening portion of an exhaust outlet portion to decrease the height dimension of the vacuum pump, and further a connector lead wire is installed, easily. An inside opening edge portion of a gas discharge passage for combining the downstream space of the rotor with the exhaust outlet portion is caused to take a shape such that the opening edge portion has no blind portion when a gas exhaust passage forming member is viewed from at least either of an upper side or an oblique upper side, or from at least either of an lower side or an oblique lower side. Furthermore, the inner corner portion of this opening edge portion is formed into a rounded shape to reduce stress concentration. Also, a base is provided with a groove for combining a lead wire installing hole with a hole in the central part, and further the corners of these parts are formed into a rounded shape.

1 . A vacuum pump comprising:
 an inlet port;   a motor;   a rotating body rotatably driven by the motor;   a stator located facing the rotating body;   an outlet port for exhausting a gas that has been sucked in through the inlet port; and   a gas exhaust passage combining a downstream space of the rotating body with the outlet port and being formed in a flow channel of the gas,   and the rotating body extending into an inner circumferential side in a radial direction of the rotating body, of the gas exhaust passage,   wherein no blind portion exists at an opening edge portion of the gas exhaust passage, of the downstream space side when a as exhaust passage forming member that forms the gas exhaust passage is viewed from at least either of an upper side or an oblique upper side, or from at least either of a lower side or an oblique lower side.   
     
     
         2 . The vacuum pump according to  claim 1 , wherein the gas exhaust passage forming member is the stator. 
     
     
         3 . The vacuum pump according so  claim 1 , further comprising a casing that covers an outer circumferential side. of the rotating body and/or the stator, wherein
 the gas exhaust passage forming member is the casing.   
     
     
         4 . The vacuum pump according to  claim 1 , further comprising a housing or a base member that supports the stator, wherein
 the gas exhaust passage forming member is the housing or the base member.   
     
     
         5 . The vacuum pump according to  claim 1 , further comprising an outlet port member that forms the outlet port and extends inward the vacuum pump, wherein
 the gas exhaust passage forming member is the outlet port member.   
     
     
         6 . The vacuum pump according to any one of  claims 1  to  5 , wherein an inner corner portion of the opening edge portion has a rounded inner corner shape that reduces stress concentration. 
     
     
         7 . A vacuum pump comprising:
 an inlet port.;   a motor;   a rotating body rotatably driven by the motor;   a stator located facing the rotating body; and   an outlet port for exhausting a gas that has been sucked in through the inlet port;   and a gas exhaust passage combining a downstream space of the rotating body with the outlet port is formed in a flow channel of the gas,   and the rotating body extends into an inner circumferential side in a radial direction of the rotating body, of the gas exhaust passage,   wherein an inner corner portion of an opening edge portion of the gas exhaust passage, of the downstream space side has a rounded inner corner shape that reduces stress concentration.   
     
     
         8 . The vacuum pump according to any one of  claims 1  to  7 , further comprising a connector for connecting a controller that controls the rotation of the rotating body, wherein
 the housing or the base member has a nearly coaxial hole that is nearly coaxial with a rotation center axis of the rotating body, a conductor wire insertion hole into which a conductor wire that connects the connector and the motor is inserted, and a groove that combines the nearly coaxial hole with the conductor wire insertion hole. 
 
     
     
         9 . A vacuum pump comprising:
 an inlet port;   a motor;   a rotating body rotatably driven by the motor;   a stator located facing the rotating body;   a housing or a base member supporting the stator; and   a connector for connecting a controller that controls the rotation of the rotating body;   wherein the housing or the base member has a nearly coaxial hole that is nearly coaxial with a rotation center axis of the rotating body, a conductor wire insertion hole into which a conductor wire that connects the connector and the motor is inserted, and a groove that combines the nearly coaxial hole with the conductor wire insertion hole.   
     
     
         10 . The vacuum pump according to  claim 8  or  9 , wherein an edge of at least one from the nearly coaxial hole, the conductor wire insertion hole, and the groove has a rounded outer corner shape such that damage of the conductor wire caused by contact with the edge is reduced. 
     
     
         11 . The vacuum pump according to any one of  claims 8  to  10 , wherein
 an outer circumferential end of the groove in the radial direction of the rotating body is positioned further toward the outer circumferential side than an inner circumferential end of the conductor wire insertion hole. 
 
     
     
         12 . A member for use in a vacuum pump comprising:
 an inlet port;   a motor;   a rotating body rotatably driven by the motor;   a stator located facing the rotating body; and   an outlet port for exhausting a gas that has been sucked in through the inlet port;   and a gas exhaust passage combining a downstream space of the rotating body with the outlet port and being formed in a flow channel of the gas,   wherein no blind portion exists at an opening edge portion of the gas exhaust passage, of the downstream space side when the member is viewed from at least either of an upper side or an oblique upper side, or from at least either of a lower side or an oblique lower side.