Integrated optical device including substrates stacked along an optical axis thereof

Abstract

An optical device includes a first substrate having a first top surface and a first bottom surface, a second substrate having a second top surface and a second bottom surface, and a spacer substrate between substantially planar portions of the second top surface and the first bottom surface. The spacer, first, and second substrates seal an interior space between the second top surface of the second substrate and the first bottom surface of the first substrate. At least two of the first, second, and spacer substrates are aligned and secured on a wafer level. An optoelectronic element is within the interior space. An optical axis of the optical device extends through one of the first top and bottom surfaces and the second top and bottom surfaces. An electrical interconnection extends from the optoelectronic element to outside the interior space.

1 . An optical device, comprising:
 a first substrate having a first top surface and a first bottom surface;   a second substrate having a second top surface and a second bottom surface;   a spacer substrate between a substantially planar portion of the second top surface of the second substrate and a substantially planar portion of the first bottom surface of the first substrate, the spacer substrate, the first substrate and the second substrate sealing an interior space between the second top surface of the second substrate and the first bottom surface of the first substrate, at least two of the first substrate, the second substrate, and the spacer substrate being aligned and secured on a wafer level;   an optoelectronic element within the interior space, an optical axis of the optical device extending through one of the first top and bottom surfaces and the second top and bottom surfaces; and   an electrical interconnection extending from the optoelectronic element to outside the interior space.   
     
     
         2 . The optical device as claimed in  claim 1 , wherein the optoelectronic element transmits light. 
     
     
         3 . The optical device as claimed in  claim 2 , wherein the optical device is used in a laser pointer. 
     
     
         4 . The optical device as claimed in  claim 2 , wherein the optical device is used with a plurality of fibers. 
     
     
         5 . The optical device as claimed in  claim 1 , wherein the optoelectronic element receives light. 
     
     
         6 . The optical device as claimed in  claim 5 , wherein the optical device is used with a plurality of fibers. 
     
     
         7 . The optical device as claimed in  claim 1 , wherein the optoelectronic element is a transceiver. 
     
     
         8 . The optical device as claimed in  claim 1 , wherein the optical device is used in an optical head. 
     
     
         9 . The optical device as claimed in  claim 1 , wherein the optical device is used in data storage.