US2012168143A1PendingUtilityA1

Thermal Diffusion Chamber With Heat Exchanger

Individually held — no corporate assignee on recordPriority: Dec 30, 2010Filed: Dec 30, 2010Published: Jul 5, 2012
Est. expiryDec 30, 2030(~4.4 yrs left)· nominal 20-yr term from priority
H10P 72/0462H10P 72/0434C23C 16/46C23C 16/00F27B 5/16F28C 3/005F28F 1/32Y10T29/4935F28D 1/0477F28D 2021/0077
28
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Claims

Abstract

Preferably, a frame supporting a containment chamber, a sealed process chamber confined within the containment chamber, a heat source module disposed between the containment chamber and the process chamber, and a fluid inlet box with a flow adjustment structure, the fluid inlet box in fluidic communication with an exterior of the sealed process chamber, the flow adjustment structure controls fluid flow around the exterior of the sealed process chamber. Preferentially, a thermal sensor is disposed within and contactingly adjacent a wall of the sealed thermal chamber, the thermal sensor measures an internal temperature value of the sealed process chamber, and a controller communicating with the flow adjustment structure and the thermal sensor, the controller sets a flow position of the flow adjustment structure to regulate fluid flow through the fluid inlet box, and around the exterior of the sealed process chamber in response to the measured internal temperature value.

Claims

exact text as granted — not AI-modified
1 . A thermal diffusion chamber comprising:
 a frame supporting a containment chamber;   a sealed process chamber confined within the containment chamber;   a heat source module disposed between the containment chamber and the process chamber;   at least one fluid inlet box in fluidic communication with an exterior of the sealed process chamber, the fluid inlet box including at least a flow adjustment structure to control a fluid flow from a fluid source around the exterior of the sealed process chamber;   a thermal sensor assembly disposed within an interior of the sealed process chamber contactingly adjacent a wall of the sealed thermal chamber, the thermal sensor assembly measures an internal temperature value of the sealed process chamber; and   a controller communicating with the flow adjustment structure and the thermal sensor assembly, the controller sets a flow position of the flow adjustment structure to regulate fluid flow from the fluid source, through the fluid inlet box, and around the exterior of the sealed process chamber in response to the measured internal temperature value of the sealed process chamber.   
     
     
         2 . The thermal diffusion chamber of  claim 1 , in which the fluid inlet box further includes at least:
 a plate valve cooperating with the flow adjustment structure, the plate valve mitigates flow of fluids from the exterior of the sealed process chamber to an external environment of the containment chamber; and   an intake port supporting an inlet conduit, the inlet conduit in contacting adjacency with the plate valve.   
     
     
         3 . The thermal diffusion chamber of  claim 1 , in which the thermal sensor assembly comprising:
 a plurality of thermocouples disposed along a length of the sealed process chamber, the plurality of thermocouples responsive to a change in temperature of the interior of the sealed process chamber;   a sensor conduit extending from an opening of the sealed process chamber through at least a mid portion of the sealed process chamber, the sensor conduit shields the plurality of thermocouples from exposure to an internal environment of the sealed process chamber; and   a plurality of signal lines connected to and corresponding with each of the plurality of thermocouples, each signal line conveys a signal to the exterior of the sealed process chamber in response to the change in temperature of the interior of the sealed process chamber.   
     
     
         4 . The thermal diffusion chamber of  claim 3 , in which the opening of the sealed process chamber is a mouth of the sealed process chamber. 
     
     
         5 . The thermal diffusion chamber of  claim 3 , in which the opening of the sealed process chamber is an aperture through a side wall of the sealed process chamber. 
     
     
         6 . The thermal diffusion chamber of  claim 1 , further comprising a control signal buss communicating with at least the flow adjustment structure, the thermal sensor assembly, and the controller, the control signal buss receives the measured internal temperature value from the thermal sensor assembly, the control signal buss further sends a control signal to the flow adjustment structure in response to the received measured internal temperature value. 
     
     
         7 . The thermal diffusion chamber of  claim 6 , in which the controller comprising:
 an input/output module communicating with the control signal buss;   a processor communicating with the input/output module;   a memory storing control logic and communicating with the processor;   an input device communicating with the processor; and   a display communicating with the processor, wherein upon receipt by the input/output module of the measured internal temperature value by way of the control signal buss, the input/output module provides said measured internal temperature value to the processor, the processor accesses the stored control logic and determines the control signal, the processor transmits the control signal to the input/output module, which advances the control signal to the flow adjustment structure by way of the control signal buss, the processor further determines a flow capacity in use percentage of the fluid flowing through the fluid inlet box and a temperature of the fluid flowing through the fluid inlet box based on the measured internal temperature value, the processor further provides the flow capacity in use percentage and the temperature of the fluid flowing through the fluid inlet box to the display.   
     
     
         8 . A method of forming a thermal diffusion chamber by steps comprising:
 providing a frame;   supporting a containment chamber on the frame;   disposing a heat source module within the containment chamber;   confining a sealed process chamber within the heat source module;   securing at least one fluid inlet box in fluidic communication with an exterior of the sealed process chamber, the fluid inlet box including at least a flow adjustment structure to control a fluid flow from a fluid source around the exterior of the sealed process chamber;   disposing a thermal sensor assembly within the sealed process chamber, the thermal sensor assembly measures an internal temperature value of the sealed process chamber; and   connecting a controller to each the flow adjustment structure and the thermal sensor assembly, the controller sets a flow position of the flow adjustment structure to regulate fluid flow from the fluid source, through the fluid inlet box, and around the exterior of the sealed process chamber in response to the measured internal temperature value of the sealed process chamber.   
     
     
         9 . The method of  claim 8 , in which the fluid inlet box further includes at least:
 a plate valve cooperating with the flow adjustment structure, the plate valve mitigates flow of fluids from the exterior of the sealed process chamber to an external environment of the containment chamber; and   an intake port supporting an inlet conduit, the inlet conduit in contacting adjacency with the plate valve.   
     
     
         10 . The method of  claim 8 , in which the thermal sensor assembly comprising:
 a plurality of thermocouples disposed along a length of the sealed process chamber, the plurality of thermocouples responsive to a change in temperature of the interior of the sealed process chamber;   a sensor conduit extending from on opening of the sealed process chamber through at least a mid portion of the sealed process chamber, the sensor conduit shields the plurality of thermocouples from exposure to an internal environment of the sealed process chamber; and   a plurality of signal lines connected to and corresponding with each of the plurality of thermocouples, each signal line conveying a signal to the exterior of the sealed process chamber in response to the change in temperature of the interior of the sealed process chamber.   
     
     
         11 . The method of  claim 10 , in which the opening of the sealed process chamber is a mouth of the sealed process chamber. 
     
     
         12 . The method of  claim 10 , in which the opening of the sealed process chamber is an aperture through a side wall of the sealed process chamber. 
     
     
         13 . The method of  claim 8 , by steps further comprising installing a control signal buss communicating with at least the flow adjustment structure, the thermal sensor assembly, and the controller, the control signal buss receives the measured internal temperature value from the thermal sensor assembly, the control signal buss further sends a control signal to the flow adjustment structure in response to the received measured internal temperature value. 
     
     
         14 . The method of  claim 13 , in which the controller comprises:
 an input/output module communicating with the control signal buss;   a processor communicating with the input/output module;   a memory storing control logic and communicating with the processor;   an input device communicating with the processor; and   a display communicating with the processor, wherein upon receipt by the input/output module of the measured internal temperature value by way of the control signal buss, the input/output module provides said measured internal temperature value to the processor, the processor accesses the stored control logic and determines the control signal, the processor transmits the control signal to the input/output module, which advances the control signal to the flow adjustment structure by way of the control signal buss, the processor further determines a flow capacity in use percentage of the fluid flowing through the fluid inlet box and a temperature of the fluid flowing through the fluid inlet box based on the measured internal temperature value, the processor further provides the flow capacity in use percentage and the temperature of the fluid flowing through the fluid inlet box to the display.   
     
     
         15 . A thermal diffusion chamber comprising:
 a frame supporting a containment chamber;   a sealed process chamber confined within the containment chamber;   a heat source module disposed between the containment chamber and the sealed process chamber;   a first fluid handling system in fluidic communication with an exterior of the sealed process chamber;   a second fluid handling system in fluidic communication with an interior of the sealed process chamber; and   a control system communicating with each the first and second fluid handling systems, the control system sets a first flow rate of a first fluid that flows around an exterior of the sealed process chamber in response to a measured temperature value of the sealed process chamber provided by a thermal sensor communicating with the process chamber, the control system further sets a second flow rate of a second fluid released into an interior of the sealed process chamber in response to the measured temperature of the sealed process chamber.   
     
     
         16 . The thermal diffusion chamber of  claim 15 , in which the heat source module comprising:
 a shell formed to conform in shape to, and positioned adjacent, an interior shape of the containment chamber;   an insulation core secured to the shell and formed to conform in shape to, and positioned adjacent, an exterior shape of the sealed process chamber;   a heat source confined by the insulation core, the heat source providing heat to the sealed process chamber; and   an energy usage monitoring device communicating with the heat source, the energy usage monitoring device determines a percentage of in use thermal capacity of the heat source.   
     
     
         17 . The thermal diffusion chamber of  claim 15 , in which the first fluid handling system comprising:
 a first fluid transfer device in fluid communication with at least one fluid inlet box, the at least one fluid inlet box in fluidic communication with an exterior of the sealed process chamber, the at least one fluid inlet box including at least a flow adjustment structure to control a flow of the first fluid around the exterior of the sealed process chamber;   a fluid return conduit in fluid communication with each the exterior of the sealed process chamber and the first fluid transfer device, the fluid return conduit returning the first fluid flowing around the sealed process chamber to the first fluid transfer device;   a thermal sensor communicating with each the returned first fluid and the control system, the thermal sensor measures a temperature value of the returned first fluid and provides said measured temperature value to the control system; and   a control valve disposed between the fluid return conduit and the first fluid transfer device, wherein upon receipt of the measured temperature value by the control system, the control system compares the measured temperature value to a predetermined temperature value and sends a control signal to the control valve, and wherein the control valve modulates flow of the returned first fluid from the exterior of the sealed process chamber to the first fluid transfer device in response to the control signal.   
     
     
         18 . The thermal diffusion chamber of  claim 15 , in which the second fluid handling system comprising:
 a second fluid transfer device in fluid communication with at least one fluid distribution conduit, the at least one fluid distribution conduit in fluidic communication with an interior of the sealed process chamber;   a feed conduit disposed between the second fluid transfer device and the at least one fluid distribution conduit, the feed conduit communicates the second fluid from the second fluid transfer device to the fluid distribution conduit;   a check valve disposed between the feed conduit and the at least one fluid distribution conduit, the check valve mitigating a back flow from the interior of the sealed process chamber to the second fluid transfer device;   an interior fluid control valve disposed between the second fluid transfer device and the at least one fluid distribution conduit to control a flow of the second fluid into the interior of the sealed process chamber;   a fluid collection conduit in fluid communication with the interior of the sealed process chamber and the second fluid transfer device, the fluid collection conduit returning the second fluid flowing into the interior of the sealed process chamber to the second fluid transfer device; and   a thermal sensor communicating with the returned second fluid and the control system, the thermal sensor measures a temperature value of the returned second fluid and provides said measured temperature value to the control system, wherein upon receipt of the measured temperature value by the control system, the control system compares the measured temperature value to a predetermined temperature value and sends an interior fluid control valve signal to the interior fluid control valve, and wherein the interior fluid control valve modulates flow of the returned second fluid from to the second fluid transfer device in response to the interior fluid control valve signal.   
     
     
         19 . The thermal diffusion chamber of  claim 15 , in which the control system comprising:
 a control signal buss communicating with at least the first and second fluid handling systems; and   a controller communicating with the control signal buss, the controller comprising:
 an input/output module communicating with the control signal buss; 
 a processor communicating with the input/output module; 
 a memory storing control logic and communicating with the processor; 
 an input device communicating with the processor; and 
   a display communicating with the processor, wherein upon receipt by the input/output module of a measured temperature value of the first fluid flowing around the exterior of the sealed process chamber, the input/output module provides said measured temperature value of the first fluid flowing around the exterior of the sealed process chamber to the processor, the processor accesses the stored control logic and determines the control signal based on the measured temperature value of the first fluid flowing around the exterior of the sealed process chamber, the processor transmits the control signal to the input/output module, the input/output module advances the control signal by way of the control signal buss to the first fluid handling system, the processor further determines an in use flow capacity percentage of fluid flowing through the first fluid handling system, the processor still further provides the in use flow capacity percentage of the first fluid transfer devices and the measured temperature value of the first fluid flowing around the exterior of the sealed process chamber to the display.   
     
     
         20 . A method of forming a thermal diffusion chamber by steps comprising:
 providing a frame;   supporting a containment chamber on the frame;   disposing a heat source module within the containment chamber;   confining a sealed process chamber within the heat source module;   affixing a first fluid handling system in fluidic communication with an exterior of the sealed process chamber;   positioning a second fluid handling system in fluidic communication with an interior of the sealed process chamber; and   connecting a control system to each the first and second fluid handling systems, the control system sets a first flow rate of a first fluid that flows around the exterior of the sealed process chamber in response to a measured temperature value of the sealed process chamber provided by a thermal sensor communicating with the process chamber, the control system further sets a second flow rate of a second fluid released into an interior of the sealed process chamber in response to the measured temperature of the sealed process chamber.   
     
     
         21 . The method of  claim 20 , in which the heat source module comprising:
 a shell formed to conform in shape to, and positioned adjacent, an interior shape of the containment chamber;   an insulation core secured to the shell and formed to conform in shape to, and positioned adjacent, an exterior shape of the sealed process chamber;   a heat source confined by the insulation core, the heat source providing heat to the sealed process chamber; and   an energy usage monitoring device communicating with the heat source, the energy usage monitoring device determines a percentage of in use thermal capacity of the heat source.   
     
     
         22 . The method of  claim 21 , in which the first fluid handling system comprising:
 a first fluid transfer device in fluid communication with at least one fluid inlet box, the at least one fluid inlet box in fluidic communication with an exterior of the sealed process chamber, the at least one fluid inlet box including at least a flow adjustment structure to control a flow of the first fluid around the exterior of the sealed process chamber;   a fluid return conduit in fluid communication with each the exterior of the sealed process chamber and the first fluid transfer device, the fluid return conduit returning the first fluid flowing around the sealed process chamber to the first fluid transfer device;   a thermal sensor communicating with each the returned first fluid and the control system, the thermal sensor measures a temperature value of the returned first fluid and provides said measured temperature value to the control system; and   a control valve disposed between the fluid return conduit and the first fluid transfer device, wherein upon receipt of the measured temperature value by the control system, the control system compares the measured temperature value to a predetermined temperature value and sends a control signal to the control valve, and wherein the control valve modulates flow of the returned first fluid from the exterior of the sealed process chamber to the first fluid transfer device in response to the control signal.   
     
     
         23 . The method of  claim 22 , in which the second fluid handling system comprising:
 a second fluid transfer device in fluid communication with at least one fluid distribution conduit, the at least one fluid distribution conduit in fluidic communication with an interior of the sealed process chamber;   a feed conduit disposed between the second fluid transfer device and the at least one fluid distribution conduit, the feed conduit communicates the second fluid from the second fluid transfer device to the fluid distribution conduit;   a check valve disposed between the feed conduit and the at least one fluid distribution conduit, the check valve mitigating a back flow from the interior of the sealed process chamber to the second fluid transfer device;   an interior fluid control valve disposed between the second fluid transfer device and the at least one fluid distribution conduit to control a flow of the second fluid into the interior of the sealed process chamber;   a fluid collection conduit in fluid communication with the interior of the sealed process chamber and the second fluid transfer device, the fluid collection conduit returning the second fluid flowing into the interior of the sealed process chamber to the second fluid transfer device; and   a thermal sensor communicating with the returned second fluid and the control system, the thermal sensor measures a temperature value of the returned second fluid and provides said measured temperature value to the control system, wherein upon receipt of the measured temperature value by the control system, the control system compares the measured temperature value to a predetermined temperature value and sends an interior fluid control valve signal to the interior fluid control valve, and wherein the interior fluid control valve modulates flow of the returned second fluid from to the second fluid transfer device in response to the interior fluid control valve signal.   
     
     
         24 . The method of  claim 23 , in which the control system comprising:
 a control signal buss communicating with at least the first and second fluid handling systems; and   a controller communicating with the control signal buss, the controller comprising:
 an input/output module communicating with the control signal buss; 
 a processor communicating with the input/output module; 
 a memory storing control logic and communicating with the processor; 
 an input device communicating with the processor; and 
 a display communicating with the processor, wherein upon receipt by the input/output module, via the control signal buss, of the measured temperature value of the returned first fluid of the first fluid handling system, the input/output module provides said temperature measurement value of the returned first fluid of the first fluid handling system to the processor, the processor accesses the stored control logic and determines the control signal based on the measured temperature value of the returned first fluid of the first fluid handling system, the processor transmits the control signal to the input/output module, which advances the control signal by way of the control signal buss to the first fluid handling system, the processor further determines an in use flow capacity percentage of fluid flowing through the first fluid handling system, the processor still further provides the in use flow capacity percentage of the first fluid transfer devices and the measured temperature value of the returned first fluid of the first fluid handling system to the display. 
   
     
     
         25 . A thermal diffusion chamber comprising:
 a frame supporting a containment chamber;   a sealed process chamber confined within the containment chamber;   a heat source module disposed between the containment chamber and the process chamber;   a fluid handling system in fluidic communication with an exterior of the sealed process chamber;   a closed loop heat exchange system in fluidic communication with an interior of the sealed process chamber; and   a control system communicating with each the fluid handling system and the closed loop heat exchange system, the control system sets a flow rate of a first fluid of a first fluid source flowing around an exterior of the sealed process chamber in response to a measured internal temperature of the sealed process chamber, the control system further sets a flow rate of a second fluid flowing through the closed loop heat exchange system in response to the measured internal temperature of the sealed process chamber.   
     
     
         26 . The thermal diffusion chamber of  claim 25 , in which the heat source module comprising:
 a shell formed to conform in shape to, and positioned adjacent, an interior shape of the containment chamber;   an insulation core secured to the shell and formed to conform in shape to, and positioned adjacent, an exterior shape of the sealed process chamber;   a heat source confined by the insulation core, the heat source providing heat to the sealed process chamber; and   an energy usage monitoring device communicating with the heat source, the energy usage monitoring device determines a percentage of in use thermal capacity of the heat source.   
     
     
         27 . The thermal diffusion chamber of  claim 25 , in which the fluid handling system comprising:
 a fluid transfer device in fluid communication with at least one fluid inlet box, the at least one fluid inlet box in fluidic communication with the exterior of the sealed process chamber, the at least one fluid inlet box including at least a flow adjustment structure to control a flow of the first fluid around the exterior of the sealed process chamber;   a fluid return conduit in fluid communication with each the exterior of the sealed process chamber and the fluid transfer device, the fluid return conduit returning the first fluid flowing around the sealed process chamber to the fluid transfer device;   a thermal sensor communicating with each the returned first fluid and the control system, the thermal sensor measures a temperature value of the returned first fluid and provides said measured temperature value to the control system; and   a control valve disposed between the fluid return conduit and the fluid transfer device, wherein upon receipt of the measured temperature value of the returned first fluid by the control system, the control system compares the measured temperature value of the returned first fluid to a predetermined temperature value and sends a control signal to the control valve, and wherein the control valve modulates flow of the returned first fluid from the exterior of the sealed process chamber to the fluid transfer device in response to the control signal.   
     
     
         28 . The thermal diffusion chamber of  claim 25 , in which the closed loop heat exchange system comprising:
 a fluid transfer device in fluid communication with at least one closed loop heat exchanger, wherein an exterior surface of the at least one closed loop heat exchanger is adjacent an interior surface of the sealed process chamber;   a feed conduit disposed between the at least one closed loop heat exchanger and the fluid transfer device, the feed conduit transporting the second fluid from the fluid transfer device to the at least one closed loop heat exchanger;   a check valve disposed between the feed conduit and the at least one closed loop heat exchanger, the check valve mitigating a back flow of the second fluid from the interior of the at least one closed loop heat exchanger to the fluid transfer device;   an interior control valve disposed between the fluid transfer device and the at least one closed loop heat exchanger to control a flow of fluid into an interior volume of the at least one closed loop heat exchanger; and   a thermal sensor communicating with the second fluid returned to the transfer device by the at least one closed loop heat exchanger, the thermal sensor further communicating with the control system, the thermal sensor measures a temperature value of the returned second fluid and provides said measured temperature value of the returned second fluid to the control system, wherein upon receipt of the measured temperature value of the returned second fluid by the control system, the control system compares the measured temperature value of the returned second fluid to a predetermined temperature value and sends a fluid control valve signal to the interior fluid control valve based on the comparison of the measured temperature value of the returned second fluid to the predetermined temperature value, and further wherein the interior fluid control valve modulates flow of the second fluid returned by the at least one closed loop heat exchanger to the fluid transfer device in response to the fluid control valve signal.   
     
     
         29 . The thermal diffusion chamber of  claim 25 , in which the control system comprising:
 a control signal buss communicating with at least the fluid handling system and the closed loop heat exchange system; and   a controller communicating with the control signal buss, the controller comprising:
 an input/output module communicating with the control signal buss; 
 a processor communicating with the input/output module; 
 a memory storing control logic and communicating with the processor; 
 an input device communicating with the processor; and 
 a display communicating with the processor, wherein upon receipt of a measured temperature value of the second fluid returned from an at least one closed loop heat exchanger of the closed loop heat exchange system to a fluid transfer device of the closed loop heat exchange system by the input/output module, by way of the control signal buss, the input/output module provides said measured temperature value to the processor, the processor accesses the stored control logic and determines a control signal based on the measured temperature value, the processor transmits the control signal to the input/output module, which advances the control signal by way of the control signal buss to the closed loop heat exchange system, the processor further determines an in use flow capacity percentage of fluid flowing through the closed loop heat exchange system and provides the in use flow capacity percentage of the closed loop heat exchange system and the measured temperature value of the second fluid returned from the at least one closed loop heat exchanger to the display. 
   
     
     
         30 . A method of forming a thermal diffusion chamber by steps comprising:
 providing a frame;   supporting a containment chamber on the frame;   disposing a heat source module within the containment chamber;   confining a sealed process chamber within the heat source module;   affixing a fluid handling system in fluidic communication with an exterior of the sealed process chamber;   positioning a closed loop heat exchange system in fluidic communication with an interior of the sealed process chamber; and   connecting a control system to each the fluid handling system and the closed loop heat exchange system, the control system sets a flow rate of a first fluid of a first fluid source flowing around the exterior of the sealed process chamber in response to a measured internal temperature of the sealed process chamber, the control system further sets a flow rate of a second fluid flowing through the closed loop heat exchange system in response to the measured internal temperature of the sealed process chamber.   
     
     
         31 . The method of  claim 30 , in which the heat source module comprising:
 a shell formed to conform in shape to, and positioned adjacent, an interior shape of the containment chamber;   an insulation core secured to the shell and formed to conform in shape to, and positioned adjacent, an exterior of the sealed process chamber;   a heat source confined by the insulation core, the heat source providing heat to the sealed process chamber; and   an energy usage monitoring device communicating with the heat source, the energy usage monitoring device determines a percent of utilizes thermal capacity of the heat source.   
     
     
         32 . The method of  claim 31 , in which the fluid handling system comprising:
 a first fluid transfer device in fluid communication with at least one fluid inlet box, the at least one fluid inlet box in fluidic communication with an exterior of the sealed process chamber, the at least one fluid inlet box including at least a flow adjustment structure to control a flow of the first fluid around the exterior of the sealed process chamber;   a fluid return conduit in fluid communication with each the exterior of the sealed process chamber and the first fluid transfer device, the fluid return conduit returning the first fluid flowing around the sealed process chamber to the first fluid transfer device;   a thermal sensor communicating with each the returned first fluid and the control system, the thermal sensor measures a temperature value of the returned first fluid and provides said measured temperature value of the returned first fluid to the control system; and   a control valve disposed between the fluid return conduit and the first fluid transfer device, wherein upon receipt by the control system of the measured temperature value of the returned first fluid, the control system compares the measured temperature value of the returned first fluid to a predetermined temperature value and sends a control signal to the control valve, and wherein the control valve modulates flow of the returned first fluid from the exterior of the sealed process chamber to the first fluid transfer device in response to the control signal.   
     
     
         33 . The method of  claim 32 , in which the closed loop heat exchanger comprising:
 a second fluid transfer device in fluid communication with at least one closed loop heat exchanger, wherein an exterior surface of the at least one closed loop heat exchanger is adjacent an interior surface of the sealed process chamber;   a feed conduit disposed between the at least one closed loop heat exchanger and the second fluid transfer device, the feed conduit provides the second fluid to an interior of the at least one closed loop heat exchanger;   a check valve disposed between the feed conduit and the at least one closed loop heat exchanger, the check valve mitigating a back flow of the second fluid from the interior of the at least one closed loop heat exchanger to the second fluid transfer device;   an interior control valve disposed between the second fluid transfer device and the at least one closed loop heat exchanger to control a flow of the second fluid into an interior volume of the at least one closed loop heat exchanger; and   a thermal sensor communicating with second fluid returned to the second fluid transfer device by the at least one closed loop heat exchanger, the thermal sensor further communicating with the control system, the thermal sensor measures a temperature value of the returned second fluid and provides said measured temperature value of the returned second fluid to the control system, wherein upon receipt by the control system of the measured temperature value of the returned second fluid, the control system compares the measured temperature value of the returned second fluid to a predetermined temperature value and sends a fluid control valve signal to the interior fluid control valve based on the comparison of the measured temperature value of the returned second fluid to the predetermined temperature value, and further wherein the interior fluid control valve modulates flow of the second fluid returned by the at least one closed loop heat exchanger to the second fluid transfer device in response to the fluid control valve signal.   
     
     
         34 . The method of  claim 33 , in which the control system comprising:
 a control signal buss communicating with at least the fluid handling system and the closed loop heat exchange system; and   a controller communicating with the control signal buss, the controller comprising:   an input/output module communicating with the control signal buss;
 a processor communicating with the input/output module; 
 a memory storing control logic and communicating with the processor; 
 an input device communicating with the processor; and 
 a display communicating with the processor, wherein upon receipt of the measured temperature value of the returned second fluid by the input/output module by way of the control signal buss, the input/output module provides the measured temperature value of the returned second fluid to the processor, the processor accesses the stored control logic and determines the fluid control valve signal based on the measured temperature value of the returned second fluid, the processor transmits the fluid control valve signal to the input/output module, which advances the fluid control valve signal by way of the control signal buss to the closed loop heat exchange system, the processor further determines an in use flow capacity percentage of fluid flowing through the closed loop heat exchange system and provides the in use flow capacity percentage of the closed loop heat exchange system and the measured temperature value of the returned second fluid from the at least one closed loop heat exchanger to the display. 
   
     
     
         35 . A thermal diffusion chamber comprising:
 a frame supporting a containment chamber;   a sealed process chamber confined within the containment chamber;   a heat source module disposed between the containment chamber and the process chamber;   a fluid handling system in fluidic communication with an exterior of the sealed process chamber;   an open loop heat exchange system in fluidic communication with an interior of the sealed process chamber; and   a control system communicating with each the fluid handling system and the open loop heat exchange system, the control system sets a flow rate of a first fluid of a first fluid source flowing around an exterior of the sealed process chamber in response to a measured internal temperature of the sealed process chamber, the control system further sets a flow rate of a second fluid flowing through the open loop heat exchange system in response to the measured internal temperature of the sealed process chamber.   
     
     
         36 . The thermal diffusion chamber of  claim 35 , in which the heat source module comprising:
 a shell formed to conform in shape to, and positioned adjacent, an interior shape of the containment chamber;   an insulation core secured to the shell and formed to conform in shape to, and positioned adjacent, an exterior shape of the sealed process chamber;   a heat source confined by the insulation core, the heat source providing heat to the sealed process chamber; and   an energy usage monitoring device communicating with the heat source, the energy usage monitoring device determines a percent of utilizes thermal capacity of the heat source.   
     
     
         37 . The thermal diffusion chamber of  claim 35 , in which the fluid handling system comprising:
 a fluid transfer device in fluid communication with at least one fluid inlet box, the at least one fluid inlet box in fluidic communication with an exterior of the sealed process chamber and including at least a flow adjustment structure to control a flow of the first fluid around the exterior of the sealed process chamber;   a fluid return conduit in fluid communication with the exterior of the sealed process chamber and the first fluid transfer device, the fluid return conduit returning the first fluid flowing around the sealed process chamber to the first fluid transfer device;   a thermal sensor communicating with the returned first fluid and the control system, the thermal sensor measures a temperature value of the returned first fluid, the thermal sensor further provides said measured temperature value of the returned first fluid to the control system; and   a control valve disposed between the fluid return conduit and the first fluid transfer device, wherein upon receipt by the control system of the measured temperature value of the returned first fluid, the control system compares the measured temperature value of the returned first fluid to a predetermined temperature value and sends a control signal to the control valve, and wherein the control valve modulates flow of the return first fluid from the exterior of the sealed process chamber to the first fluid transfer device in response to the control signal.   
     
     
         38 . The thermal diffusion chamber of  claim 35 , in which the open loop heat exchange system comprising:
 a fluid transfer device in fluid communication with at least one open loop heat exchanger, wherein an exterior surface of the at least one open loop heat exchanger is adjacent an interior surface of the sealed process chamber;   a feed conduit disposed between the at least one open loop heat exchanger and the fluid transfer device, the feed conduit provides the second fluid to an interior of the at least one open loop heat exchanger;   a check valve disposed between the feed conduit and the at least one open loop heat exchanger, the check valve mitigating a back flow of the second fluid from the interior of the at least one open loop heat exchanger to the fluid transfer device;   an interior control valve disposed between the fluid transfer device and the at least one open loop heat exchanger to control a flow of the second fluid into an interior volume of the at least one open loop heat exchanger; and   a thermal sensor communicating with the second fluid returned to the fluid transfer device by the at least one open loop heat exchanger, the thermal sensor further communicating with the control system, the thermal sensor measures a temperature value of the returned second fluid and provides said measured temperature value of the returned second fluid to the control system, wherein upon receipt by the control system of the measured temperature value of the returned second fluid, the control system compares the measured temperature value of the returned second fluid to a predetermined temperature value and sends a fluid control valve signal to the interior fluid control valve based on the comparison of the measured temperature value of the returned second fluid to the predetermined temperature value, and further wherein the interior fluid control valve modulates flow of the second fluid returned by the at least one open loop heat exchanger to the second fluid transfer device in response to the fluid control valve signal, and still further wherein the at least open loop heat exchanger includes at least one fluid distribution conduit, the fluid distribution conduit provides openings to release the second fluid from the at least one open loop heat exchanger into an interior volume of the sealed process chamber.   
     
     
         39 . The thermal diffusion chamber of  claim 35 , in which the control system comprising:
 a control signal buss communicating with at least the fluid handling system and the open loop heat exchange system; and   a controller communicating with the control signal buss, the controller comprising:
 an input/output module communicating with the control signal buss; 
 a processor communicating with the input/output module; 
 a memory storing control logic and communicating with the processor; 
 an input device communicating with the processor; and 
 a display communicating with the processor, wherein upon receipt of a measured temperature value of the second fluid returned from an at least one open loop heat exchanger of the open loop heat exchange system by the input/output module by way of the control signal buss, the input/output module provides to the processor said measured temperature value of the second fluid returned from the at least one open loop heat exchanger, the processor accesses the stored control logic and determines a control signal based on the measured temperature value, the processor transmits the control signal to the input/output module, which advances the control signal by way of the control signal buss to the open loop heat exchange system, the processor further determines an in use flow capacity percentage of fluid flowing through the open loop heat exchange system and provides the in use flow capacity percentage of the open loop heat exchange system and the measured temperature value of the returned second fluid from the at least one open loop heat exchanger to the display. 
   
     
     
         40 . A method of forming a thermal diffusion chamber by steps comprising:
 providing a frame;   supporting a containment chamber on the frame;   disposing a heat source module within the containment chamber;   confining a sealed process chamber within the heat source module;   affixing a fluid handling system in fluidic communication with an exterior of the sealed process chamber;   positioning a open loop heat exchange system in fluidic communication with an interior of the sealed process chamber; and   connecting a control system to each the fluid handling system and the open loop heat exchange system, the control system sets a flow rate of a first fluid of a first fluid source flowing around an exterior of the sealed process chamber in response to a measured internal temperature of the sealed process chamber, the control system further sets a flow rate of a second fluid flowing through the open loop heat exchange system in response to the measured internal temperature of the sealed process chamber.   
     
     
         41 . The method of  claim 40 , in which the heat source module comprising:
 a shell formed to conform in shape to, and positioned adjacent, an interior shape of the containment chamber;   an insulation core secured to the shell and formed to conform in shape to, and positioned adjacent, an exterior shape of the sealed process chamber;   a heat source confined by the insulation core, the heat source providing heat to the sealed process chamber; and   an energy usage monitoring device communicating with the heat source, the energy usage monitoring device determines a percent of utilizes thermal capacity of the heat source.   
     
     
         42 . The method of  claim 41 , in which the fluid handling system comprising:
 a first fluid transfer device in fluid communication with at least one fluid inlet box, the at least one fluid inlet box in fluidic communication with an exterior of the sealed process chamber and including at least a flow adjustment structure to control a flow of fluid around the exterior of the sealed process chamber;   a fluid return conduit in fluid communication with the exterior of the sealed process chamber and the first fluid transfer device, the fluid return conduit returning to the first fluid transfer device the first fluid flowing around the sealed process chamber;   a thermal sensor communicating with the returned first fluid and the control system, the thermal sensor measures a temperature value of the returned first fluid, the thermal sensor further provides said measured temperature value of the returned first fluid to the control system; and   a control valve disposed between the fluid return conduit and the first fluid transfer device, wherein upon receipt by the control system of the measured temperature value of the returned first fluid, the control system compares the measured temperature value of the returned first fluid to a predetermined temperature value and sends a control signal to the control valve, and wherein the control valve modulates flow of the return first fluid from the exterior of the sealed process chamber to the first fluid transfer device in response to the control signal.   
     
     
         43 . The method of  claim 42 , in which the open loop heat exchange system comprising:
 a fluid transfer device in fluid communication with at least one open loop heat exchanger, wherein an exterior surface of the at least one open loop heat exchanger is adjacent an interior surface of the sealed process chamber;   a feed conduit disposed between the at least one open loop heat exchanger and the fluid transfer device, the feed conduit provides the second fluid to an interior of the at least one open loop heat exchanger;   a check valve disposed between the feed conduit and the at least one open loop heat exchanger, the check valve mitigating a back flow of the second fluid from the interior of the at least one open loop heat exchanger to the fluid transfer device;   an interior control valve disposed between the fluid transfer device and the at least one open loop heat exchanger to control a flow of the second fluid into an interior volume of the at least one open loop heat exchanger; and   a thermal sensor communicating with the second fluid returned to the fluid transfer device by the at least one open loop heat exchanger, the thermal sensor further communicating with the control system, the thermal sensor measures a temperature value of the returned second fluid and provides said measured temperature value of the returned second fluid to the control system, wherein upon receipt by the control system of the measured temperature value of the returned second fluid, the control system compares the measured temperature value of the returned second fluid to a predetermined temperature value and sends a fluid control valve signal to the interior fluid control valve based on the comparison of the measured temperature value of the returned second fluid to the predetermined temperature value, and further wherein the interior fluid control valve modulates flow of the second fluid returned by the at least one open loop heat exchanger to the second fluid transfer device in response to the fluid control valve signal, and still further wherein the at least open loop heat exchanger includes at least one fluid distribution conduit, the fluid distribution conduit provides openings to release the second fluid from the at least one open loop heat exchanger into an interior volume of the sealed process chamber.   
     
     
         44 . The method of  claim 43 , in which the control system comprising:
 a control signal buss communicating with at least the fluid handling system and the open loop heat exchange system; and   a controller communicating with the control signal buss, the controller comprising:
 an input/output module communicating with the control signal buss; 
 a processor communicating with the input/output module; 
 a memory storing control logic and communicating with the processor; 
 an input device communicating with the processor; and 
 a display communicating with the processor, wherein upon receipt of the measured temperature value of the returned second fluid by the input/output module by way of the control signal buss, the input/output module provides the measured temperature value of the returned second fluid to the processor, the processor accesses the stored control logic and determines the fluid control valve signal based on the measured temperature value of the returned second fluid, the processor transmits the fluid control valve signal to the input/output module, which advances the fluid control valve signal by way of the control signal buss to the open loop heat exchange system, the processor further determines an in use flow capacity percentage of fluid flowing through the open loop heat exchange system and provides the in use flow capacity percentage of the open loop heat exchange system and the measured temperature value of the returned second fluid from the at least one open loop heat exchanger to the display. 
   
     
     
         45 . A thermal diffusion chamber comprising:
 a frame supporting a containment chamber;   a sealed process chamber confined within the containment chamber;   a heat source module disposed between the containment chamber and the process chamber;   an fluid handling system in fluidic communication with an exterior of the sealed process chamber;   a closed loop heat exchange system in fluidic communication with an interior of the sealed process chamber;   an open loop heat exchange system in fluidic communication with the interior of the sealed process chamber; and   a control system communicating with each the fluid handling system, the closed loop heat exchange system, and the open loop heat exchange system, the control system sets a flow rate of a first fluid flowing around an exterior of the sealed process chamber, the control system further sets a flow rate of a second fluid through the closed loop heat exchange system, the control system still further sets a flow rate of a third fluid through the open loop heat exchange system.   
     
     
         46 . The thermal diffusion chamber of  claim 45 , in which the heat source module comprising:
 a shell formed to conform in shape to, and positioned adjacent, an interior shape of the containment chamber;   an insulation core secured to the shell and formed to conform in shape to, and positioned adjacent, an exterior shape of the sealed process chamber;   a heat source confined by the insulation core, the heat source providing heat to the sealed process chamber; and   an energy usage monitoring device communicating with the heat source, the energy usage monitoring device determines a percent of utilizes thermal capacity of the heat source.   
     
     
         47 . The thermal diffusion chamber of  claim 45 , in which the fluid handling system comprising:
 a fluid transfer device in fluid communication with at least one fluid inlet box, the at least one fluid inlet box in fluidic communication with an exterior of the sealed process chamber and including at least a flow adjustment structure to control a flow of the first fluid around the exterior of the sealed process chamber;   a fluid return conduit in fluid communication with the exterior of the sealed process chamber and the fluid transfer device, the fluid return conduit returning the first fluid flowing around the sealed process chamber to the fluid transfer device;   a thermal sensor communicating with the returned first fluid and the control system, the thermal sensor measures a temperature value of the returned first fluid, the thermal sensor further provides said measured temperature value of the returned first fluid to the control system; and   a control valve disposed between the fluid return conduit and the fluid transfer device, wherein upon receipt by the control system of the measured temperature value of the returned first fluid, the control system compares the measured temperature value of the returned first fluid to a predetermined temperature value and sends a control signal to the control valve, and wherein the control valve modulates flow of the return first fluid from the exterior of the sealed process chamber to the fluid transfer device in response to the control signal.   
     
     
         48 . The thermal diffusion chamber of  claim 45 , in which the closed loop heat exchange system comprising:
 a fluid transfer device;   an at least one closed loop heat exchanger in fluid communication with the fluid transfer device, wherein an exterior surface of the at least one closed loop heat exchanger is adjacent an interior surface of the sealed process chamber;   a feed conduit disposed between the at least one closed loop heat exchanger and the fluid transfer device, the feed conduit provides the second fluid to an interior of the at least one closed loop heat exchanger; and   a check valve disposed between the feed conduit and the at least one closed loop heat exchanger, the check valve mitigating a back flow of the second fluid from the interior of the at least one closed loop heat exchanger to the fluid transfer device.   
     
     
         49 . The thermal diffusion chamber of  claim 45 , in which the open loop heat exchanger comprising:
 a fluid transfer device in fluid communication with at least one open loop heat exchanger, wherein an exterior surface of the at least one open loop heat exchanger is adjacent an interior surface of the sealed process chamber;   a feed conduit disposed between the at least one open loop heat exchanger and the fluid transfer device, the feed conduit provides the second fluid to an interior of the at least one open loop heat exchanger;   a check valve disposed between the feed conduit and the at least one open loop heat exchanger, the check valve mitigating a back flow of the third fluid from the interior of the at least one open loop heat exchanger to the fluid transfer device; and   an interior control valve disposed between the fluid transfer device and the at least one open loop heat exchanger to control a flow of the third fluid into an interior volume of the at least one open loop heat exchanger, wherein the at least open loop heat exchanger includes at least one fluid distribution conduit, the fluid distribution conduit provides openings to release the third fluid from the at least one open loop heat exchanger into an interior volume of the sealed process chamber.   
     
     
         50 . The thermal diffusion chamber of  claim 45 , in which the control system comprising:
 a control signal buss communicating with at least the fluid handling system, the closed loop heat exchange system, and the open loop heat exchange system; and   a controller communicating with the control signal buss, the controller comprising:
 an input/output module communicating with the control signal buss; 
 a processor communicating with the input/output module; 
 a memory storing control logic and communicating with the processor; 
 an input device communicating with the processor; and 
 a display communicating with the processor, wherein upon receipt of a second fluid temperature value measured by a thermal sensor communicating with the second fluid of an at least one closed loop heat exchanger of the closed loop heat exchange system by the input/output module, by way of the control signal buss, the input/output module provides to the processor said measured temperature value of the second fluid, the processor accesses the stored control logic and determines a control signal based on the measured temperature value of the second fluid, the processor further transmits the control signal to the input/output module, which advances the control signal by way of the control signal buss to the closed loop heat exchange system, the processor further determines an in use capacity percentage of the closed loop heat exchange system and provides the in use capacity percentage of the closed loop heat exchange system and the measured temperature value of the second fluid to the display. 
   
     
     
         51 . A method of forming a thermal diffusion chamber by steps comprising:
 providing a frame;   supporting a containment chamber on the frame;   disposing a heat source module within the containment chamber;   confining a sealed process chamber within the heat source module;   affixing an fluid handling system in fluidic communication with an exterior of the sealed process chamber;   positioning a closed loop heat exchange system in fluidic communication with an interior of the sealed process chamber;   locating an open loop heat exchange system in fluidic communication with the interior of the sealed process chamber; and   connecting a control system to each the fluid handling system, the closed loop heat exchange system, and the open loop heat exchange system, the control system sets a flow rate of a first fluid flowing around an exterior of the sealed process chamber, the control system further sets a flow rate of a second fluid through the closed loop heat exchange system, the control system still further sets a flow rate of a third fluid through the open loop heat exchange system.   
     
     
         52 . The method of  claim 51 , in which the heat source module comprising:
 a shell formed to conform in shape to, and positioned adjacent, an interior shape of the containment chamber;   an insulation core secured to the shell and formed to conform in shape to, and positioned adjacent, an exterior shape of the sealed process chamber;   a heat source confined by the insulation core, the heat source providing heat to the sealed process chamber; and   an energy usage monitoring device communicating with the heat source, the energy usage monitoring device determines a percent of utilizes thermal capacity of the heat source.   
     
     
         53 . The method of  claim 52 , in which the fluid handling system comprising:
 a first fluid transfer device in fluid communication with at least one fluid inlet box, the at least one fluid inlet box in fluidic communication with an exterior of the sealed process chamber and including at least a flow adjustment structure to control a flow of the first fluid around the exterior of the sealed process chamber;   a fluid return conduit in fluid communication with the exterior of the sealed process chamber and the fluid transfer device, the fluid return conduit returning the first fluid flowing around the sealed process chamber to the fluid transfer device;   a thermal sensor communicating with the returned first fluid and the control system, the thermal sensor measures a temperature value of the returned first fluid, the thermal sensor further provides said measured temperature value of the returned first fluid to the control system; and   a control valve disposed between the fluid return conduit and the first fluid transfer device, wherein upon receipt by the control system of the measured temperature value of the returned first fluid, the control system compares the measured temperature value of the returned first fluid to a predetermined temperature value and sends a control signal to the control valve, and wherein the control valve modulates flow of the return first fluid from the exterior of the sealed process chamber to the first fluid transfer device in response to the control signal.   
     
     
         54 . The method of  claim 53 , in which the closed loop heat exchange system comprising:
 a second fluid transfer device;   an at least one closed loop heat exchanger in fluid communication with the second fluid transfer device, wherein an exterior surface of the at least one closed loop heat exchanger is adjacent an interior surface of the sealed process chamber;   a feed conduit disposed between the at least one closed loop heat exchanger and the second fluid transfer device, the feed conduit provides the second fluid to an interior of the at least one closed loop heat exchanger; and   a check valve disposed between the feed conduit and the at least one closed loop heat exchanger, the check valve mitigating a back flow of the second fluid from the interior of the at least one closed loop heat exchanger to the second fluid transfer device.   
     
     
         55 . The method of  claim 54 , in which the open loop heat exchange system comprising:
 a third fluid transfer device;   an at least one open loop heat exchanger in fluid communication with the third fluid transfer device, wherein an exterior surface of the at least one open loop heat exchanger is adjacent an interior surface of the sealed process chamber;   a feed conduit disposed between the at least one open loop heat exchanger and the third fluid transfer device, the feed conduit provides the third fluid to an interior of the at least one open loop heat exchanger;   a check valve disposed between the feed conduit and the at least one open loop heat exchanger, the check valve mitigating a back flow of the third fluid from the interior of the at least one open loop heat exchanger to the third fluid transfer device; and   an interior control valve disposed between the third fluid transfer device and the at least one open loop heat exchanger, the interior control valve controls a flow of the third fluid into an interior volume of the at least one open loop heat exchanger, wherein the at least open loop heat exchanger includes at least one fluid distribution conduit, the fluid distribution conduit provides openings to release the third fluid from the at least one open loop heat exchanger into an interior volume of the sealed process chamber.   
     
     
         56 . The method of  claim 55 , in which the control system comprising:
 a control signal buss communicating with at least the fluid handling system, the closed loop heat exchange system, and the open loop heat exchange system; and   a controller communicating with the control signal buss, the controller comprising:
 an input/output module communicating with the control signal buss; 
 a processor communicating with the input/output module; 
 a memory storing control logic and communicating with the processor; 
 an input device communicating with the processor; and 
 a display communicating with the processor, wherein upon receipt by the input/output module of a second fluid temperature value measured by a thermal sensor communicating with the second fluid of the at least one closed loop heat exchanger, the input/output module provides said measured temperature value of the second fluid to the processor, the processor accesses the stored control logic and determines a control signal based on the measured temperature value of the second fluid, the processor further transmits the control signal to the input/output module, which advances the control signal by way of the control signal buss to the closed loop heat exchange system, the processor further determines an in use capacity percentage of the closed loop heat exchange system and provides the in use capacity percentage of the closed loop heat exchange system and the measured temperature value of the second fluid to the display. 
   
     
     
         57 . The thermal diffusion chamber of  claim 1 , in which the process chamber is configured to accommodate a substrate disposed within the process chamber, wherein the substrate has a width of at least 650 millimeters and a length of at least substantially 1650 millimeters. 
     
     
         58 . The method of  claim 8 , in which the process chamber is configured to accommodate a substrate disposed within the process chamber, wherein the substrate has a width of at least 650 millimeters and a length of at least substantially 1650 millimeters. 
     
     
         59 . The thermal diffusion chamber of  claim 15 , in which the process chamber is configured to accommodate a substrate disposed within the process chamber, wherein the substrate has a width of at least 650 millimeters and a length of at least substantially 1650 millimeters. 
     
     
         60 . The method of  claim 20 , in which the process chamber is configured to accommodate a substrate disposed within the process chamber, wherein the substrate has a width of at least 650 millimeters and a length of at least substantially 1650 millimeters. 
     
     
         61 . The method of  claim 25 , in which the process chamber is configured to accommodate a substrate disposed within the process chamber, wherein the substrate has a width of at least 650 millimeters and a length of at least substantially 1650 millimeters. 
     
     
         62 . The thermal diffusion chamber of  claim 30 , in which the process chamber is configured to accommodate a substrate disposed within the process chamber, wherein the substrate has a width of at least 650 millimeters and a length of at least substantially 1650 millimeters. 
     
     
         63 . The method of  claim 35 , in which the process chamber is configured to accommodate a substrate disposed within the process chamber, wherein the substrate has a width of at least 650 millimeters and a length of at least substantially 1650 millimeters. 
     
     
         64 . The method of  claim 40 , in which the process chamber is configured to accommodate a substrate disposed within the process chamber, wherein the substrate has a width of at least 650 millimeters and a length of at least substantially 1650 millimeters. 
     
     
         65 . The thermal diffusion chamber of  claim 45 , in which the process chamber is configured to accommodate a substrate disposed within the process chamber, wherein the substrate has a width of at least 650 millimeters and a length of at least substantially 1650 millimeters. 
     
     
         66 . The method of  claim 51 , in which the process chamber is configured to accommodate a substrate disposed within the process chamber, wherein the substrate has a width of at least 650 millimeters and a length of at least substantially 1650 millimeters.

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