Variable wavelength interference filter, optical module, and optical analysis device

Abstract

An etalon includes a first substrate, a second substrate facing the first substrate, a fixed mirror provided on a surface of the first substrate that faces the second substrate, a movable mirror provided on the second substrate and facing the fixed mirror via an inter-mirror gap, and a first electrode provided on the surface of the first substrate that faces the second substrate. A first multilayer stopper portion is provided by a portion of the first electrode being stacked with at least a portion of an outer circumferential edge of the fixed mirror.

1 . A variable wavelength interference filter comprising:
 a first substrate;   a second substrate facing the first substrate;   a first reflection film provided on a first surface of the first substrate, the first surface facing the second substrate;   a second reflection film provided on the second substrate, the second reflection film facing the first reflection film and being separated therefrom by a predetermined gap; and   a first electrode provided on the first surface of the first substrate;   wherein a first multilayer stopper portion is provided by a portion of the first electrode being stacked with at least a portion of an outer circumferential edge of the first reflection film.   
     
     
         2 . The variable wavelength interference filter according to  claim 1 , further comprising a second electrode provided on a surface of the second substrate, the surface facing the first substrate,
 wherein a second multilayer stopper portion is provided by a portion of the second electrode being stacked with at least a portion of an outer circumferential edge of the second reflection film.   
     
     
         3 . The variable wavelength interference filter according to  claim 1 , wherein a second electrode facing the first electrode is provided on the second substrate, and
 the first electrode and the second electrode are drive electrodes which change a dimension of the gap as a voltage is applied thereto.   
     
     
         4 . The variable wavelength interference filter according to  claim 1 , wherein a second electrode facing the first electrode is provided on the second substrate, and
 the first electrode and the second electrode are electrostatic capacitance measuring electrodes which measure an electrostatic capacitance held between the first electrode and the second electrode.   
     
     
         5 . The variable wavelength interference filter according to  claim 1 , wherein the first electrode is an electric charge removing electrode which removes an electric charge from the first reflection film. 
     
     
         6 . The variable wavelength interference filter according to  claim 1 , wherein in the first multilayer stopper portion, the first reflection film and the first electrode are stacked in this order from the first substrate. 
     
     
         7 . The variable wavelength interference filter according to  claim 1 , wherein in the first multilayer stopper portion, the first electrode and the first reflection film are stacked in this order from the first substrate. 
     
     
         8 . The variable wavelength interference filter according to  claim 1 , wherein the first electrode is made of a non-light-transmissive material, and
 the first multilayer stopper portion is provided in a ring shape prescribing a light transmitting area for incident light transmitted through the first reflection film and the second reflection film, as viewed in a plan view of the first substrate and the second substrate.   
     
     
         9 . The variable wavelength interference filter according to  claim 8 , wherein the second electrode is provided on a surface of the second substrate, the surface facing the first substrate,
 a portion of the second electrode is stacked on an outer circumferential edge of the second reflection film to form a ring-shaped second multilayer stopper portion, and   an inner diameter dimension of the first multilayer stopper portion is smaller than an inner diameter dimension of the second multilayer stopper portion, as viewed in the plan view.   
     
     
         10 . An optical module comprising:
 the variable wavelength interference filter according to  claim 1 ; and   a light receiving unit which receives inspection target light transmitted through the variable wavelength interference filter.   
     
     
         11 . An optical analysis device comprising:
 the optical module according to  claim 10 ; and   an analytical processing unit which analyzes an optical property of the inspection target light, based on light received by the light receiving unit of the optical module.   
     
     
         12 . A variable wavelength interference filter comprising:
 a first reflection film;   a second reflection film facing the first reflection film with a predetermined gap therebetween; and   a first electrode;   wherein a first protrusion is provided by a portion of the first electrode being stacked with at least a portion of an outer circumferential edge of the first reflection film.   
     
     
         13 . The variable wavelength interference filter according to  claim 12 , further comprising a second electrode facing the first electrode,
 wherein a second protrusion is provided by a portion of the second electrode being stacked with at least a portion of an outer circumferential edge of the second reflection film.   
     
     
         14 . A variable wavelength interference filter comprising:
 a first reflection film;   a second reflection film facing the first reflection film with a predetermined gap therebetween; and   a protrusion provided by an electrode being stacked with at least a portion of an outer circumferential edge of the first reflection film, the protrusion being adapted to prevent the first reflection film and the second reflection film from sticking to each other.   
     
     
         15 . A variable wavelength interference filter comprising:
 a first reflection film;   a second reflection film facing the first reflection film with a predetermined gap therebetween; and   a protrusion provided on an outer circumferential edge of the first reflection film;   wherein G 1  is a width of the gap, G 2  is a width of a space between the protrusion and the second reflection film, and G 1 >G 2 .