Mems-scanning mirror device and method for manufacturing the same

Abstract

An MEMS-scanning mirror device includes an electrostatic comb actuator, in which a mirror surface is formed below a top surface (TOPS) of the mirror device. In a method for manufacturing the MEMS-scanning mirror device having the electrostatic comb actuator, a mirror surface ( 10 BS) of a mirror plate ( 10 B) is formed by removing an insulating layer (I) thereon.

1 . An MEMS-scanning mirror device comprising:
 an electrostatic comb actuator; and   a mirror portion driven by the electrostatic comb actuator,   wherein a mirror surface of the mirror portion is positioned below a surface of the electrostatic comb actuator.   
     
     
         2 . The MEMS-scanning mirror device according to  claim 1 , wherein
 the device has a structure including at least three layers of silicon, and   the mirror surface is formed in a surface of any one of the silicon layers other than the uppermost layer.   
     
     
         3 . The MEMS-scanning mirror device according to  claim 1 , wherein
 the device includes the electrostatic comb actuator,   a silicon wafer is further provided on a device layer of an SOI wafer, and   the mirror surface is formed in a surface of the device layer of the SOI wafer.   
     
     
         4 - 6 . (canceled) 
     
     
         7 . The MEMS-scanning mirror device according to  claim 1 , further comprising:
 a handle layer; and   at least two device layers provided above the handle layer,   wherein the device layer that is the uppermost layer forms the surface of the electrostatic comb actuator, and   the device layer below the uppermost layer forms the mirror surface.   
     
     
         8 . (canceled)